US3899728A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for maintaining high precision in a rotating device used with optical apparatus
Assignee: Max-Planck-Gesellschaft zur Förderung der Wissenschaften eV
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Filing: 1973-07-12
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Granted: 1975-08-12
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Expires: 1993-07-12
Abstract
Abstract Apparatus to maintain high precision in the location of an axis about which an object is tilted such as in an electronic microscope, in which the axis position is measured and the measurements compared with stored calibration values, and the difference between the measured and stored values used to drive positioning devices to correct for any error in axis position.
Inventors
- 👤 Walter Hoppe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 23:54
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/20
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
133 words
In a charged particle beam optical apparatus, the combination comprising: a frame; at least one support bearing mounted in said frame; a tilting device, including an elongated shaft rotatably mounted in said bearing for supporting a specimen and rotating said specimen about a specified axis of rotation; means, disposed adjacent and coupled to said tilting device, for measuring linear movement of said tilting device in at least one direction with respect to said beam; means, coupled to said frame, for movably supporting said tilting device for movement in at least said one direction; and means, coupled to said measuring means and said support means, for determining the position of said tilting device and axis of rotation and adjusting the position thereof by means of said support means with respect to said particle beam.
Claim 2
Dependent Claim
133 words
In a charged particle beam optical apparatus, the combination comprising: a frame; at least one support bearing mounted in said frame; a tilting device, including an elongated shaft rotatably mounted in said bearing for supporting a specimen and rotating said specimen about a specified axis of rotation; means, disposed adjacent and coupled to said tilting device, for measuring linear movement of said tilting device in at least one direction with respect to said beam; means, coupled to said frame, for movably supporting said tilting device for movement in at least said one direction; and means, coupled to said measuring means and said support means, for determining the position of said tilting device and axis of rotation and adjusting the position thereof by means of said support means with respect to said particle beam.
Claim 3
Dependent Claim
64 words
The combination recited in claim 1, wherein said measuring means comprises a capacitive length measuring device including cylindrical members disposed on the ends of said shaft and a plurality of plate electrodes disposed adjacent and spaced apart from said cylindrical members, said plates and said members in conjunction forming a plurality of capacitors adjacent the ends of said shaft for measuring the movement thereof.
Claim 4
Dependent Claim
16 words
The combination recited in claim 1, wherein said measuring means comprises an optical length measuring device.
Claim 5
Dependent Claim
18 words
The combinatioN recited in claim 1, wherein said means for supporting comprise a plurality of piezoelectric displacement devices.
Claim 6
Dependent Claim
15 words
The combination recited in claim 1, wherein said means for supporting comprise magnetostrictive displacement devices.
Claim 7
Dependent Claim
16 words
The combination recited in claim 1, wherein said means for supporting comprise elastically deformable support elements.
Claim 8
Dependent Claim
29 words
The combination recited in claim 2, wherein said bearing comprises a spherical bearing and additionally comprises at least one of said plate electrodes of said capacitive length measuring device.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-08-11 | 1979-02-10 | 1979-08-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-08-11 | 1983-02-10 | 1983-08-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-08-11 | 1987-02-10 | 1987-08-12 | $7700.00 | Window Closed / Lapsed |