Patent US3893231A successfully refreshed from Google Patents.
US3893231A
Expired / Lapsed
US
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Technique for fabricating vacuum waveguide in the x-ray region
Assignee: United States Department of the Navy
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Filing: 1974-12-19
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Granted: 1975-07-08
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Expires: 1994-12-19
Abstract
Abstract A method of fabricating vacuum waveguides in the x-ray region comprises the following steps: A. SELECTING AN OPTICALLY FLAT SUBSTRATE B. DEPOSITING A FILM OF METAL ON THE SUBSTRATE C. PHOTOETCHING A LINE CORRESPONDING TO THE WIDTH OF THE WAVEGUIDE IN THE METAL FILM D. SELECTING A PARYLENE PELLICLE E. DEPOSITING A METAL FILM ON ONE SIDE OF THE PELLICLE F. DEPOSITING A FILM PERPENDICULAR TO THE LENGTH OF THE WAVEGUIDE ON THE OPPOSITE SIDE OF THE PELLICLE G. PLACING THE PELLICLE IN FIXTURE WHICH APPLIES SLIGHT PRESSURE TO THE PELLICLE (STRETCHING THE PELLICLE OVER THE SUBSTRATE) H. EVACUATING THE FIXTURE.
Inventors
- 👤 John P Anderson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 14:54
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/136; G03; G03F; G03F7/00; G03F7/0005; G21; G21K; G21K1/00; G21K1/06; G21K2201/00; G21K2201/06; G21K2201/067; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49016
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
77 words
A METHOD OF FABRICATING A VACUUM WAVEGUIDE COMPRISING THE STEPS OF: A. SELECTING AN OPTIONALLY FLAT SUBSTRATE, B. DEPOSITING A FILM OF METAL ON SAID SUBSTRATE, C. PHOTOETCHING A LINE CORRESPONDING TO THE WIDTH OF SAID WAVEGUIDE IN SAID METAL FILM, D. SELECTING A PARYLENE PELLICLE, E. DEPOSITING A SECOND METAL FILM ON ONE SIDE OF SAID PELLICLE, F. DEPOSITING A THIRD FILM PERPENDICULAR TO THE LENGTH OF THE WAVEGUIDE ON THE OPPOSITE SIDE OF SAID PELICLE,
Claim 2
Independent Claim
77 words
A METHOD OF FABRICATING A VACUUM WAVEGUIDE COMPRISING THE STEPS OF: A. SELECTING AN OPTIONALLY FLAT SUBSTRATE, B. DEPOSITING A FILM OF METAL ON SAID SUBSTRATE, C. PHOTOETCHING A LINE CORRESPONDING TO THE WIDTH OF SAID WAVEGUIDE IN SAID METAL FILM, D. SELECTING A PARYLENE PELLICLE, E. DEPOSITING A SECOND METAL FILM ON ONE SIDE OF SAID PELLICLE, F. DEPOSITING A THIRD FILM PERPENDICULAR TO THE LENGTH OF THE WAVEGUIDE ON THE OPPOSITE SIDE OF SAID PELICLE,
Claim 3
Dependent Claim
16 words
The method of claim 1 wherein said optically flat substrate reflects energy in the x-ray region.
Claim 4
Dependent Claim
14 words
The method of claim 1 wherein said first, second and third films are gold.
References Cited (Backward Citations)
US3613230A
Cited
US3799777A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-07-07 | 1979-01-06 | 1979-07-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-07-07 | 1983-01-06 | 1983-07-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-07-07 | 1987-01-06 | 1987-07-08 | $7700.00 | Window Closed / Lapsed |