US3893160A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Resistive connecting contact for a silicon semiconductor component
Assignee: Telefunken Electronic GmbH
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Filing: 1973-08-28
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Granted: 1975-07-01
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Expires: 1993-08-28
Abstract
Abstract A resistive connecting contact for a silicon semiconductor component comprises, on the semiconductor body, a layer sequence platinum silicide-titanium-molybdenum-gold. The invention also includes a method of making such a connecting contact.
Inventors
- 👤 Leonhard Botzenhardt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 22:04
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/4432; H10P; H10P95/00
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
26 words
A RESISTIVE CONNECTING CONTACT FOR A SILICON SEMICONDUCTOR COMPONENT, CHARACTERIZED IN THAT THE CONTACT, STARTING FROM THE SILICON SEMICONDUCTOR BODY, COMPRISES THE LAYER SEQUENCE PLATINUM SILICIDE-TITANIUM-MOLYBDENUM-GOLD.
Claim 2
Dependent Claim
26 words
A RESISTIVE CONNECTING CONTACT FOR A SILICON SEMICONDUCTOR COMPONENT, CHARACTERIZED IN THAT THE CONTACT, STARTING FROM THE SILICON SEMICONDUCTOR BODY, COMPRISES THE LAYER SEQUENCE PLATINUM SILICIDE-TITANIUM-MOLYBDENUM-GOLD.
Claim 3
Dependent Claim
17 words
A connecting contact as defined in claim 1, wherein said titanium layer is approXimately 10 nm thick.
Claim 4
Dependent Claim
18 words
A connecting contact as defined in claim 2, wherein said molybdenum layer is approximately 0.3 Mu m thick.
Claim 5
Dependent Claim
17 words
A connecting contact as defined in claim 3, wherein said gold layer is approximately 0.6 Mu m.
Claim 6
Dependent Claim
47 words
A semiconductor component comprising a semiconductor body, a plurality of regions extending from one surface of said semiconductor body, an insulating layer on said one surface and a resistive connecting contact comprising a layer sequence platinum silicide-titanium-molybdenum-gold provided on at least one of said plurality of regions.
Claim 7
Dependent Claim
47 words
A semiconductor component comprising a semiconductor body, a plurality of regions extending from one surface of said semiconductor body, an insulating layer on said one surface and a resistive connecting contact comprising a layer sequence platinum silicide-titanium-molybdenum-gold provided on at least one of said plurality of regions.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-06-30 | 1978-12-30 | 1979-07-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-06-30 | 1982-12-30 | 1983-07-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-06-30 | 1986-12-30 | 1987-07-01 | $7700.00 | Window Closed / Lapsed |