Ion microanalyzer

Claim 2

An ion microanalyzer comprising: means for producing an ion beam; means for scanning the surface of a specimen with said ion beam; means for directly detecting a first portion of the secondary ions emitted from said specimen; a cathode ray tube having means for scanning the electron beam thereof synchronously with the scanning of said ion beam; a mass spectrometer for mass-analyzing a second portion of said secondary ions and for providing a signal representative of the mass-analysis; means for modulating the intensity of the electron beam of said cathode ray tube by the detected signal from said means for directly detecting a first portion of the secondary ions emitted from said specimen; and means for superimposing the signal obtained from said mass spectrometer on the signal obtained from said means for directly detecting a first portion of the secondary ions emitted from said specimen.

Claim 3

An ion microanalyzer according to claim 1, further, comprising shielding means surrounding the specimen.

Claim 4

An ion microanalyzer according to claim 2, in which the secondary ion detecting means is provided outside the shielding means.

Claim 5

An ion microanalyzer according to claim 1, wherein said means for directly detecting a first portion of the secondary ions emitted from said specimen is a secondary electron multiplier.

Claim 6

An ion microanalyzer according to claim 1, further comprising deflection means for deflecting the secondary ions to direct them to said means for directly detecting a first portion of the secondary ions emitted from said specimen.

Claim 7

An ion microanalyzer according to claim 5, wherein said deflection means for deflecting the secondary ions consists of a pair of electrodes one of which is made of a conductive film deposiTed on a scintillator, and said means for directly detecting a first portion of the secondary ions emitted from said specimen is constituted by said deflection means and a photomultiplier opposed to said scintillator.

Claim 8

An ion microanalyzer according to claim 6, wherein said ion microanalyzer includes means for maintaining one of said electrodes at the same electric potential as said specimen and shielding means surrounding said specimen, and further includes means for changing over the polarity of an electric potential applied to the other of said electrodes.

Claim 9

In an ion microanalyzer including: first means for producing an ion beam; second means for scanning the surface of a specimen with said ion beam; a cathode ray tube having means for scanning the electron beam thereof in synchronism with the scanning of said ion beam; and third means receiving a principal ion beam which includes a portion of the secondary ions emitted from said specimen for mass-analyzing said principal ion beam and for providing a first signal representative of the mass-analysis thereof; the improvement comprising fourth means, disposed separately from said third means, for directly detecting secondary ions emitted from said specimen separate from the portion of the secondary ions included in said principal ion beam and for providing a second signal representative of the directly detected secondary ions; and fifth means, coupled to said fourth means and said cathode ray tube for modulating the intensity of said electron beam in accordance with said second signal provided by said fourth means, and including means for superimposing said first signal on said second signal for modulating the intensity of said electron beam in accordance with said superimposed signals.

Claim 10

In an ion microanalyzer including: first means for producing an ion beam; second means for scanning the surface of a specimen with said ion beam; a cathode ray tube having means for scanning the electron beam thereof in synchronism with the scanning of said ion beam; and third means receiving a principal ion beam which includes a portion of the secondary ions emitted from said specimen for mass-analyzing said principal ion beam and for providing a first signal representative of the mass-analysis thereof; the improvement comprising fourth means, disposed separately from said third means, for directly detecting secondary ions emitted from said specimen separate from the portion of the secondary ions included in said principal ion beam and for providing a second signal representative of the directly detected secondary ions; and fifth means, coupled to said fourth means and said cathode ray tube for modulating the intensity of said electron beam in accordance with said second signal provided by said fourth means, and including means for superimposing said first signal on said second signal for modulating the intensity of said electron beam in accordance with said superimposed signals.

Claim 11

The improvement according to claim 8, wherein said fourth means comprises a secondary electron multiplier.

Claim 12

The improvement according to claim 8, wherein said third means comprises a mass analyzer and a comparator having first and second inputs and an output, said first input being connected to said mass analyzer, said second input being connected to a reference voltage and said output being coupled to the output of said fourth means.

Claim 13

The improvement according to claim 8, wherein said fourth means comprises deflection means for deflecting the secondary ions and directing the secondary ions into an ion detector.

Claim 14

The improvement according to claim 11, wherein said deflection means comprises a pair of electrodes, one of which is made of a conductive film deposited on a scintillator, and said ion detector comprises a photomultiplier disposed opposite said scintillator.

Claim 15

The improvement according to claim 12, further comprising shielding means surrounding said specimen with said fourth means located outside said shielding means.

Claim 16

The improvement according to claim 13, further comprising means for maintaining one of said electrodes at the same electric potential as said specimen and means for reversing the polarity of the electric potential applied to the other of said electrodes.