US3887392A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Material treatment method
Assignee: General Diode Corp
•
Filing: 1973-11-23
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Granted: 1975-06-03
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Expires: 1993-11-23
Abstract
Abstract Disclosed is a material treatment method including the steps of impregnating a porous carrier sheet with a treating material, positioning the sheet in contact with a material substrate, and inducing transfer of the treating material by applying microwave energy to the impregnated sheet. Deposition, cleansing and cooking operations are possible with the method described.
Inventors
- 👤 Arthur Y C Tang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 20:14
CPC Classifications
H; H05; H05B; H05B6/00; H05B6/64; B; B08; B08B; B08B7/00; B08B7/0064; B08B7/0071; H05B6/80; H05B6/806; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
85 words
A METHOD OF CLEANING A MATERIAL SUBSTRATE, HAVING IMPURILIES WHICH ARE CAPABLE OF BEING DISSOLVED IN AND CO-VAPORIZED WITH SOLVENT ON THE APPLICATION THERETO OF MICROWAVE ENERGY THE METHOD CONSISTING ESSENTIALLY OF: PROVIDING A POROUS CARRIER SHEET; IMPREGNATING SAID CARRIER SHEET WITH SAID SOLVENT; POSITIONING SAID IMPREGNATING SAID CARRIER SHET WITH SAID SOLVENT MATERIAL SUBSTRATE; APPLYING MICROWAVE ENERGY TO SAID IMPREGNATED CARRIER SHEET SO AS TO GENERATED HEAT THEREIN AND THEREBY VAPORIZE SAID IMPURITIES AND SAID SOLVENT AND REMOVE THE SAME FROM SAID MATERIAL SUBSTRATE.
Claim 2
Independent Claim
85 words
A METHOD OF CLEANING A MATERIAL SUBSTRATE, HAVING IMPURILIES WHICH ARE CAPABLE OF BEING DISSOLVED IN AND CO-VAPORIZED WITH SOLVENT ON THE APPLICATION THERETO OF MICROWAVE ENERGY THE METHOD CONSISTING ESSENTIALLY OF: PROVIDING A POROUS CARRIER SHEET; IMPREGNATING SAID CARRIER SHEET WITH SAID SOLVENT; POSITIONING SAID IMPREGNATING SAID CARRIER SHET WITH SAID SOLVENT MATERIAL SUBSTRATE; APPLYING MICROWAVE ENERGY TO SAID IMPREGNATED CARRIER SHEET SO AS TO GENERATED HEAT THEREIN AND THEREBY VAPORIZE SAID IMPURITIES AND SAID SOLVENT AND REMOVE THE SAME FROM SAID MATERIAL SUBSTRATE.
Claim 3
Independent Claim
85 words
A method of cleaning a material substrate, having impurities which are capable of being dissolved in and co-vaporized with solvent on the application thereto of microwave energy, the method consisting essentially of: providing a porous carrier sheet; impregnating said carrier sheet with said solvent; positioning said impregnated carrier sheet in contact with said material substrate; applying microwave energy to said impregnated carrier sheet so as to generate heat therein and thereby vaporize said impurities and said solvent and remove the same from said material substrate.
Claim 4
Independent Claim
85 words
A method of cleaning a material substrate, having impurities which are capable of being dissolved in and co-vaporized with solvent on the application thereto of microwave energy, the method consisting essentially of: providing a porous carrier sheet; impregnating said carrier sheet with said solvent; positioning said impregnated carrier sheet in contact with said material substrate; applying microwave energy to said impregnated carrier sheet so as to generate heat therein and thereby vaporize said impurities and said solvent and remove the same from said material substrate.
Claim 5
Dependent Claim
18 words
A device according to claim 1 wherein said substrate material comprises silicon wafer material for use as semiconductors.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-06-02 | 1978-12-02 | 1979-06-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-06-02 | 1982-12-02 | 1983-06-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-06-02 | 1986-12-02 | 1987-06-03 | $7700.00 | Window Closed / Lapsed |