Patent US3887379A successfully refreshed from Google Patents.
US3887379A
Expired / Lapsed
US
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Photoresist azide sensitizer composition
Assignee: International Business Machines Corp
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Filing: 1973-08-15
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Granted: 1975-06-03
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Expires: 1993-08-15
Abstract
Abstract The light sensitivity and adhesion of photoresist compositions is improved by incorporating in them a sensitizer which is cyanine dye, said dye having at least one azido group substituted on an aromatic ring.
Inventors
- 👤 Nicholas J Clecak
- 👤 Robert J Cox
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 14:28
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/008; G03F7/0085; C; C09; C09B; C09B62/00; C09B62/44; C09B62/78; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/127; Y10S430/128
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
47 words
A NEGATIVE RESIST COMPOSITION COMPRISING A POLY-(2-CHLOR1,3-BUTADIENE) AND IN AN AMOUNT OF FORM 0.5 TO 10 PERCENT BY WEIGHT OF THE WEIGHT OF THE PHOTOSENSITIVE POLYMER, A PHOTOSENSITIZER SELECTED FROM THE GROUP CONSISTING OF 6-AZIDO-2-(4P-DIMETHYLAMINOPHENYL-2,4-BUTADIENYL(-NMETHYLBENZENTHIAZOLIUM IODIDE, 6-AZIDO-3-METHYL-2-3-(3-(6AZIDO-3-METHYLBENZOTHIAZOLYLIDENE) PROPENE )BENZOTHIAZOLIUM IODIDE, 6-AZIDO-3-METHYL-2-(PDIMETHYLAMINOSTYRYL) BENZETHIAZOLIUM IODIDE, AND NMETHYL-4-(6-AZIDO-3-METHYL-2BENZENETHIAZOLYLIDENEMETHYLENE) QUINOLINIUM IODIDE.
Claim 2
Dependent Claim
47 words
A NEGATIVE RESIST COMPOSITION COMPRISING A POLY-(2-CHLOR1,3-BUTADIENE) AND IN AN AMOUNT OF FORM 0.5 TO 10 PERCENT BY WEIGHT OF THE WEIGHT OF THE PHOTOSENSITIVE POLYMER, A PHOTOSENSITIZER SELECTED FROM THE GROUP CONSISTING OF 6-AZIDO-2-(4P-DIMETHYLAMINOPHENYL-2,4-BUTADIENYL(-NMETHYLBENZENTHIAZOLIUM IODIDE, 6-AZIDO-3-METHYL-2-3-(3-(6AZIDO-3-METHYLBENZOTHIAZOLYLIDENE) PROPENE )BENZOTHIAZOLIUM IODIDE, 6-AZIDO-3-METHYL-2-(PDIMETHYLAMINOSTYRYL) BENZETHIAZOLIUM IODIDE, AND NMETHYL-4-(6-AZIDO-3-METHYL-2BENZENETHIAZOLYLIDENEMETHYLENE) QUINOLINIUM IODIDE.
Claim 3
Dependent Claim
46 words
A negative resist composition comprising a poly-(2-chlor-1,3-butadiene) and in an amount of from 0.5 to 10 percent by weight of the weight of the photosensitive polymer, a photosensitizer selected from the group consisting of 6-Azido-2-(4-p-dimethylaminophenyl-2,4-butadienyl(-N-methylbenzenthiazolium iodide, 6-Azido-3-methyl-2-3-(3-(6-azido-3-methylbenzothiazolylidene) propene)benzothiazolium iodide, 6-Azido-3-methyl-2-(p-dimethylaminostyryl) benzenethiazolium iodide, and N-Methyl-4-(6-azido-3-methyl-2-benzenethiazolylidenemethylene) quinolinium iodide.
Claim 4
Dependent Claim
46 words
A negative resist composition comprising a poly-(2-chlor-1,3-butadiene) and in an amount of from 0.5 to 10 percent by weight of the weight of the photosensitive polymer, a photosensitizer selected from the group consisting of 6-Azido-2-(4-p-dimethylaminophenyl-2,4-butadienyl(-N-methylbenzenthiazolium iodide, 6-Azido-3-methyl-2-3-(3-(6-azido-3-methylbenzothiazolylidene) propene)benzothiazolium iodide, 6-Azido-3-methyl-2-(p-dimethylaminostyryl) benzenethiazolium iodide, and N-Methyl-4-(6-azido-3-methyl-2-benzenethiazolylidenemethylene) quinolinium iodide.
Claim 5
Dependent Claim
14 words
A photoresist composition as claimed in claim 1 wherein the photosensitizer is 6-azido-2-(4-p-dimethylaminophenyl-2,4-butadienyl)-N-methylbenzenethiazolium iodide.
Claim 6
Dependent Claim
15 words
A photoresist composition as claimed in claim 1 wherein the photosensitizer is 6-azido-3-methyl-2-(3-(6-azido-3-methylbenzothiazolylidene) propene)benzothiazolium iodide.
Claim 7
Dependent Claim
15 words
A photoresist composition as claimed in claim 1 wherein the photosensitizer is 6-azido-3-methyl-2-(p-dimethylaminostyryl) benzenethiazolium iodide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-06-02 | 1978-12-02 | 1979-06-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-06-02 | 1982-12-02 | 1983-06-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-06-02 | 1986-12-02 | 1987-06-03 | $7700.00 | Window Closed / Lapsed |