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US3884703A Expired / Lapsed US ⏱️ 0.0 years remaining

Bisazide sensitized photoresistor composition with diacetone acrylamide

Assignee: Hitachi Ltd
•
Filing: 1973-04-11
•
Granted: 1975-05-20
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Expires: 1993-04-11
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Abstract

Abstract When the diacetone acrylamide is added to the photoresist composition which comprises a water soluble organic resin and a bisazide, the photoresist composition thus obtained has an excellent adhesion force for a substrate.

Inventors

  • 👤 Yoichi Oba
  • 👤 Teruo Tsunoda

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 16:01
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/085; G03F7/008; G03F7/0085; G03F7/027

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 100 words
A PHOTORESIST COMPOSITION COMPRISING A WATER SOLUBLE ORGANIC RESIN SELECTED FROM THE GROUP CONSISTING OF POLYACRYLAMIDE, POLYVINYLPYRROLIDONE, GELATIN, METHYLCELLULOSE, A WATER SOLUBLE SALT OF POLY-L-GLUTAMATE, A WATER SOLUBLE POLYACRYLAE, A COPOLYMER OF VINYL ALCOHOL AND MALEIC ACID, AND A CPOLYMER OF VINYL ALCOHOL AND ACRYLAMIDE, AND A BISAZIDE SELECTED FROM THE GROUP CONSISTINGOF SODIUM,-4,4''-DIAZIDESTILBENE-2,2''DISULFONATE, SODIUM-4,4''-DIAZIDESTIBENE-Y-CARBOXYLATE AND SODIUM-4,4''-DIAZIDEBENZALACETOPHENONE-2-SULFONATE, AS A PHOTOCHEMICAL REACTION INITIATOR, CHARACTERIZED INTHAT DIACETONE ACRYLAMIDE IS ADDED THEREIN IN AN AMOUNT OF AT LEAST 5 PARTS BY WEIGHT BASED ON 100 PARTS OF SAID WATER SOLUBLE RESIN, WHEREBY SAID PHOTORESIST COMPOSITION IS REMARKABLY IMPROVED IN ADHESION FOR A SUBSTRATE.
Claim 2
Dependent Claim 100 words
A PHOTORESIST COMPOSITION COMPRISING A WATER SOLUBLE ORGANIC RESIN SELECTED FROM THE GROUP CONSISTING OF POLYACRYLAMIDE, POLYVINYLPYRROLIDONE, GELATIN, METHYLCELLULOSE, A WATER SOLUBLE SALT OF POLY-L-GLUTAMATE, A WATER SOLUBLE POLYACRYLAE, A COPOLYMER OF VINYL ALCOHOL AND MALEIC ACID, AND A CPOLYMER OF VINYL ALCOHOL AND ACRYLAMIDE, AND A BISAZIDE SELECTED FROM THE GROUP CONSISTINGOF SODIUM,-4,4''-DIAZIDESTILBENE-2,2''DISULFONATE, SODIUM-4,4''-DIAZIDESTIBENE-Y-CARBOXYLATE AND SODIUM-4,4''-DIAZIDEBENZALACETOPHENONE-2-SULFONATE, AS A PHOTOCHEMICAL REACTION INITIATOR, CHARACTERIZED INTHAT DIACETONE ACRYLAMIDE IS ADDED THEREIN IN AN AMOUNT OF AT LEAST 5 PARTS BY WEIGHT BASED ON 100 PARTS OF SAID WATER SOLUBLE RESIN, WHEREBY SAID PHOTORESIST COMPOSITION IS REMARKABLY IMPROVED IN ADHESION FOR A SUBSTRATE.
Claim 3
Dependent Claim 22 words
The photoresist composition according to claim 1, in which the amount of diacetone acrylamide is the range of 50 to 200 parts.
Claim 4
Dependent Claim 40 words
A photoresist composition consisting essentially of an aqueous solution containing polyacrylamide and sodium-4,4''-diazidestilbene-2,2''-disulfonate, characterized in that in said aqueous solution is dissolved diacetone acrylamide of an amount of 10 to 100 parts by weight based on 100 parts of polyacrylamide.
Claim 5
Dependent Claim 40 words
A photoresist composition consisting essentially of an aqueous solution containing polyacrylamide and sodium-4,4''-diazidestilbene-2,2''-disulfonate, characterized in that in said aqueous solution is dissolved diacetone acrylamide of an amount of 10 to 100 parts by weight based on 100 parts of polyacrylamide.
Claim 6
Dependent Claim 40 words
A photoresist composition consisting essentially of an aqueous solution containing polyvinylpyrrolidene and sodium-4,4''-diazidestilbene-2,2''-disulfonate, characterized in that in said aqueous solution is dissolved diacetone acrylamide in an amount of 5 to 200 parts by weight based on 100 parts of polyvinylpyrolidone.
Claim 7
Dependent Claim 40 words
A photoresist composition consisting essentially of an aqueous solution containing polyvinylpyrrolidene and sodium-4,4''-diazidestilbene-2,2''-disulfonate, characterized in that in said aqueous solution is dissolved diacetone acrylamide in an amount of 5 to 200 parts by weight based on 100 parts of polyvinylpyrolidone.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1978-05-19 1978-11-18 1979-05-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1982-05-19 1982-11-18 1983-05-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1986-05-19 1986-11-18 1987-05-20 $7700.00 Window Closed / Lapsed

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