Patent US3877982A successfully refreshed from Google Patents.
US3877982A
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Monolithic acoustic surface wave amplifier device and method of manufacture
Assignee: United States Department of the Army
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Filing: 1973-12-06
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Granted: 1975-04-15
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Expires: 1993-12-06
Abstract
Abstract A monolithic acoustic surface wave amplifier device is provided by heating a piezoelectric substrate in vacuum and then depositing a thin barrier layer of silicon oxide on the piezoelectric substrate. A thin film of a III-V semiconductor is deposited on the thin barrier layer, the semiconductor film overcoated with a thin film of silicon oxide and the device completed by annealing in argon.
Inventors
- 👤 Larry A Coldren
- 👤 Gordon S Kino
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 22:59
CPC Classifications
G; G10; G10K; G10K11/00; G10K11/36
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
91 words
METHOD OF MAKING A MONOLITHIC ACOUSTIC SURFACE WAVE AMPLIFER DEVICE, SAID METHOD INCLUDING THE STEPS OF A. HEATING A LINBO3 DELAY LINE PIEZOELECTRIC SUBSTRATE IN VACUUM TO A TEMPERATURE ABOUT 550*C. AND THEN COOLING TO AOUT 400*C. B. DEPOSITING A THIN BARRIER LAYER OF ABOUT 300 ANGSTROMS IN THICKNESS OF SILICON OXIDE ON THE PIEZOELECTRIC SUBSTRATE C. DEPOSITING FILM OF ABOUT 500 ANGSTROMS IN THICKNESS OF INSB AT AOUT 350*C. ON THE BARRIER LAYER, D. OVERCOATING WITH A THIN FILM OF SILICON OXIDE, AND E. ANNEALING IN ARGON AT ABOUT 450*C.
Claim 2
Dependent Claim
91 words
METHOD OF MAKING A MONOLITHIC ACOUSTIC SURFACE WAVE AMPLIFER DEVICE, SAID METHOD INCLUDING THE STEPS OF A. HEATING A LINBO3 DELAY LINE PIEZOELECTRIC SUBSTRATE IN VACUUM TO A TEMPERATURE ABOUT 550*C. AND THEN COOLING TO AOUT 400*C. B. DEPOSITING A THIN BARRIER LAYER OF ABOUT 300 ANGSTROMS IN THICKNESS OF SILICON OXIDE ON THE PIEZOELECTRIC SUBSTRATE C. DEPOSITING FILM OF ABOUT 500 ANGSTROMS IN THICKNESS OF INSB AT AOUT 350*C. ON THE BARRIER LAYER, D. OVERCOATING WITH A THIN FILM OF SILICON OXIDE, AND E. ANNEALING IN ARGON AT ABOUT 450*C.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-04-14 | 1978-10-14 | 1979-04-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-04-14 | 1982-10-14 | 1983-04-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-04-14 | 1986-10-14 | 1987-04-15 | $7700.00 | Window Closed / Lapsed |