Patent US3870416A successfully refreshed from Google Patents.
US3870416A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer alignment apparatus
Assignee: AT&T Inc
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Filing: 1974-01-09
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Granted: 1975-03-11
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Expires: 1994-01-09
Abstract
Abstract A wafer alignment device comprises a support platform supported by three flexible rods extending downwardly to a linking ring. Three flexible rods extend upwardly from the linking ring to a stationary table. The support platform can be moved in x, y and theta directions, to align the wafer with great accuracy and without accompanying z-direction motion, for photolithographic printing purposes.
Inventors
- 👤 Kevin James Brady
- 👤 Victor Andrew Firtion
- 👤 Leif Rongved
- 👤 Thomas Edward Saunders
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 11:24
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716; B; B23; B23Q; B23Q1/00; B23Q1/25; B23Q1/26; B23Q1/34; B23Q1/36; H; H05; H05K; H05K13/00; H05K13/0015
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
77 words
Alignment apparatus comprising: means for supporting an object to be aligned comprising a support platform; a plurality of substantially parallel first rods extending from the support platform to a relatively movable linking member; a plurality of second rods substantially parallel to the first rods extending from the linking member to a relatively stationary table member; and means for adjusting the orientation of the support platform while observing the object, thereby to align the object with a reference.
Claim 2
Dependent Claim
77 words
Alignment apparatus comprising: means for supporting an object to be aligned comprising a support platform; a plurality of substantially parallel first rods extending from the support platform to a relatively movable linking member; a plurality of second rods substantially parallel to the first rods extending from the linking member to a relatively stationary table member; and means for adjusting the orientation of the support platform while observing the object, thereby to align the object with a reference.
Claim 3
Dependent Claim
77 words
Alignment apparatus comprising: means for supporting an object to be aligned comprising a support platform; a plurality of substantially parallel first rods extending from the support platform to a relatively movable linking member; a plurality of second rods substantially parallel to the first rods extending from the linking member to a relatively stationary table member; and means for adjusting the orientation of the support platform while observing the object, thereby to align the object with a reference.
Claim 4
Dependent Claim
77 words
Alignment apparatus comprising: means for supporting an object to be aligned comprising a support platform; a plurality of substantially parallel first rods extending from the support platform to a relatively movable linking member; a plurality of second rods substantially parallel to the first rods extending from the linking member to a relatively stationary table member; and means for adjusting the orientation of the support platform while observing the object, thereby to align the object with a reference.
Claim 5
Dependent Claim
35 words
The apparatus of claim 1 wherein: the support platform has an upper surface lying in an x-y plane; and the first and second rods all extend substantially in a z-direction perpendicular to the x-y plane.
Claim 6
Dependent Claim
48 words
The apparatus of claim 2 further comprising: a positioning member connected to the support platform and extending in the Z-direction; and wherein the adjusting means comprises means for applying forces to the positioning member at a vertical location substantially midway between the support platform and the linking member.
Claim 7
Dependent Claim
27 words
The apparatus of claim 3 wherein: the linking member comprises a ring along which the first rod connections and second rod connections are each substantially symmetrically distributed.
Claim 8
Dependent Claim
52 words
The apparatus of claim 4 wherein: the adjusting means comprises means for displacing the positioning member in the x direction, means for displacing the positioning member in the y direction and means for applying displaced forces to the positioning member in opposite directions simultaneously to give an angular displacement to the platform.
Claim 9
Dependent Claim
60 words
The apparatus of claim 5 wherein: the x-direction displacing means comprises two parallel, axially stiff, separated, flexible driver rods fixed to the positioning member; the y-direction displacing means comprises one axially stiff flexible driver rod fixed to the positioning member; and means for selectively driving the driver rods axially to give x, y or theta displacement to the support platform.
Claim 10
Dependent Claim
16 words
The apparatus of claim 6 wherein: the ring is located in viscous fluid for damping vibrations.
Claim 11
Dependent Claim
13 words
The apparatus of claim 7 wherein: the displacements are produced by piezoelectric transducers.
Claim 12
Independent Claim
138 words
A method for aligning a wafer pattern with a mask pattern comprising the steps of: mounting the wafer on a support platform having a plurality of substantially parallel flexible first rods extending therefrom to a linking member, and a plurality of second rods substantially parallel to the first rods extending vertically upwardly from the linking member to a support table; optically superimposing the mask and wafer patterns; observing the superimposed patterns through a microscope; applying horizontal forces so as to displace the platform and to align the wafer pattern with the mask pattern; said horizontal forces being applied to a positioning member extending vertically downwardly from the platform, and being applied at a vertical location corresponding substantially to the midpoints of the first rods, thereby to avoid any vertical displacement of the support platform during the alignment process.
Claim 13
Independent Claim
138 words
A method for aligning a wafer pattern with a mask pattern comprising the steps of: mounting the wafer on a support platform having a plurality of substantially parallel flexible first rods extending therefrom to a linking member, and a plurality of second rods substantially parallel to the first rods extending vertically upwardly from the linking member to a support table; optically superimposing the mask and wafer patterns; observing the superimposed patterns through a microscope; applying horizontal forces so as to displace the platform and to align the wafer pattern with the mask pattern; said horizontal forces being applied to a positioning member extending vertically downwardly from the platform, and being applied at a vertical location corresponding substantially to the midpoints of the first rods, thereby to avoid any vertical displacement of the support platform during the alignment process.
References Cited (Backward Citations)
US3266758A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-03-10 | 1978-09-09 | 1979-03-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-03-10 | 1982-09-09 | 1983-03-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-03-10 | 1986-09-09 | 1987-03-11 | $7700.00 | Window Closed / Lapsed |