Apparatus for determining concentration profile of an element

Claim 2

In apparatus for analyzing a specimen to determine the distribution of an element therein: means for scanning a portion of the specimen with an electron beam at a predetermined rate to produce x-rays having energy levels corresponding to the elements in the portion of the specimen which is scanned, x-ray selector means for providing output signals in response to x-rays having energy levels corresponding to a selected element, means for providing a ramp signal having a level corresponding to the position of the electron beam on the specimen, means responsive to the ramp signal and the output signals from the x-ray selector means for delivering output pulses having levels corresponding to the levels of the ramp signal when the output signals are received, whereby the level of each output pulse corresponds to the position of the element giving rise thereto, and display means responsive to the output pulses for indicating the distribution of the selected element in the specimen.

Claim 3

The apparatus of claim 1 including means for scanning the specimen repeatedly along a predetermined line and for resetting the ramp signal to an initial level at the beginning of each scan.

Claim 4

The apparatus of claim 1 wherein the means for delivering output pulses comprises an analog gate.

Claim 5

The apparatus of claim 1 further including gate means responsive to the timing signal for inhibiting delivery of the output signals to the analog gate means during retrace intervals between successive scans.

Claim 6

In apparatus for determining the distribution of a predetermined element in a specimen: an electron column device for scanning the specimen repeatedly along a predetermined line and providing a timing signal at the start of each scan, means responsive to x-rays emitted by the scanned portion of the specimen for delivering output signals in response to x-rays having energy levels corresponding to the predetermined element, a ramp generator for producing a ramp signal which increases from an initial level at a predetermined rate, said ramp signal being reset to the initial level in response to the timing signal whereby the level of the ramp signal corresponds to the position of the electron beam on the specimen, analog gate means responsive to the ramp signal and the output signals from the x-ray responsive means for delivering output pulses having levels corresponding to the levels of the ramp signal when the output signals are received, the level of each output pulse corresponding to the position of the element giving rise thereto, and pulse height analyzer means responsive to the output pulses for giving a visual display of the distribution of the predetermined element in the specimen.

Claim 7

In apparatus for determining the distribution of a predetermined element in a specimen: an electron column device for scanning the specimen repeatedly along a predetermined line and providing a timing signal at the start of each scan, means responsive to x-rays emitted by the scanned portion of the specimen for delivering output signals in response to x-rays having energy levels corresponding to the predetermined element, a ramp generator for producing a ramp signal which increases from an initial level at a predetermined rate, said ramp signal being reset to the initial level in response to the timing signal whereby the level of the ramp signal corresponds to the position of the electron beam on the specimen, analog gate means responsive to the ramp signal and the output signals from the x-ray responsive means for delivering output pulses having levels corresponding to the levels of the ramp signal when the output signals are received, the level of each output pulse corresponding to the position of the element giving rise thereto, and pulse height analyzer means responsive to the output pulses for giving a visual display of the distribution of the predetermined element in the specimen.

Claim 8

In apparatus for determining the distribution of a predetermined element in a specimen from signals produced by repeatedly scanning a portion of the specimen with an electron beam and delivering an output signal whenever the element is detected, the start of each scan being accompanied by a timing signal: a ramp generator for producing a ramp signal which increases at a predetermined rate from an initial level, means for applying the timing signal to the ramp generator for resetting the ramp signal to the initial level at the outset of each scan, whereby the level of the ramp signal corresponds to the position of the beam on the specimen, and analog gate means responsive to the output signals for passing the ramp signal to produce output pulses having heights corresponding to the positions of the beam when the predetermined element is detected.

Claim 9

In apparatus for determining the distribution of a predetermined element in a specimen from signals produced by repeatedly scanning a portion of the specimen with an electron beam and delivering an output signal whenever the element is detected, the start of each scan being accompanied by a timing signal: a ramp generator for producing a ramp signal which increases at a predetermined rate from an initial level, means for applying the timing signal to the ramp generator for resetting the ramp signal to the initial level at the outset of each scan, whereby the level of the ramp signal corresponds to the position of the beam on the specimen, and analog gate means responsive to the output signals for passing the ramp signal to produce output pulses having heights corresponding to the positions of the beam when the predetermined element is detected.

Claim 10

The apparatus of claim 6 further including pulse height analyzer means responsive to tHe output pulses for giving a visual display of the distribution of the predetermined element of the specimen.

Claim 11

The apparatus of claim 7 further including gate means responsive to the timing signal for inhibiting delivery of the output signals to the analog gate means during retrace intervals between successive scans.

Claim 12

The apparatus of claim 6 further including data storage means for storing the output pulses.