US3866013A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for controlling movable means such as an electron beam
Assignee: International Business Machines Corp
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Filing: 1973-09-19
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Granted: 1975-02-11
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Expires: 1993-09-19
Abstract
Abstract A square-shaped electron beam is stepped from one predetermined position to another in a line-by-line scan to form a desired pattern on each chip of a semiconductor wafer to which the beam is applied. At each of the predetermined positions, the beam is on, off, or on for a portion of the time period at which the beam is disposed at the predetermined position. The beam also can be offset both along its direction of movement and perpendicular thereto at each of the predetermined positions. Control of this movement of the beam is obtained through utilizing a memory with no change being made in the memory if the predetermined position at the next line does not have any change from the predetermined position at the line along which the beam is moving.
Inventors
- 👤 Philip M Ryan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 09:41
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/302; H01J37/3023
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
137 words
A method of positioning means movable in a line by line pattern at each of a plurality of predetermined positions along each of the lines including: selectively controlling at least one function of the movable means at each of the predetermined positions on the line in accordance with information from a memory for each of the plurality of the predetermined positions along the line; determining if the function at the same predetermined position in the next line is different than in the line along which the movable means is moving prior to the movable means being moved from the predetermined position; and changing the information in the memory for the same predetermined position in the next line prior to the movable means being moved from the predetermined position if it is determined that the function is different.
Claim 2
Independent Claim
137 words
A method of positioning means movable in a line by line pattern at each of a plurality of predetermined positions along each of the lines including: selectively controlling at least one function of the movable means at each of the predetermined positions on the line in accordance with information from a memory for each of the plurality of the predetermined positions along the line; determining if the function at the same predetermined position in the next line is different than in the line along which the movable means is moving prior to the movable means being moved from the predetermined position; and changing the information in the memory for the same predetermined position in the next line prior to the movable means being moved from the predetermined position if it is determined that the function is different.
Claim 3
Dependent Claim
73 words
The method according to claim 1 including: supplying the changed information from a first source when the rate of change of the information in the memory is below the rate at which the first source can supply the information; and supplying the changed information from a second source when the rate of change of the information in the memory is greater than the rate at which the first source can supply the information.
Claim 4
Dependent Claim
42 words
The method according to claim 2 in which the movable means is a beam of charged particles and the function of the movable means at each of the predetermined positions is the exposure of the beam at each of the predetermined positions.
Claim 5
Dependent Claim
42 words
The method according to claim 1 in which the movable means is a beam of charged particles and the function of the movable means at each of the predetermined positions is the exposure of the beam at each of the predetermined positions.
Claim 6
Dependent Claim
130 words
The method according to claim 4 including: selectively offsetting the beam in directions both along the line in which the beam is moving and perpendicular thereto at each of the predetermined positions along the line in accordance with information from the memory for each of the plurality of the predetermined positions along the line; determining if the offset of the beam at the same predetermined position for the next line is different than in the line along which the beam is moving prior to the beam being moved from the predetermined position; and changing the beam offset information in the memory for the same predetermined position in the next line prior to the beam being moved from the predetermined position if it is determined that the beam offset is different.
Claim 7
Dependent Claim
73 words
The method according to claim 5 including: supplying the changed information from a first source when the rate of change of the information in the memory is below the rate at which the first source can supply the information; and supplying the changed information from a second source when the rate of change of the information in the memory is greater than the rate at which the first source can supply the information.
Claim 8
Dependent Claim
21 words
The method according to claim 5 in which the beam is moved along the lines in a back and forth scan.
Claim 9
Dependent Claim
21 words
The method according to claim 4 in which the beam is moved along the lines in a back and forth scan.
Claim 10
Dependent Claim
40 words
The method according to claim 1 including ascertaining if there is any error in the memory for the next line along which the movable means is to be moved prior to the movable means being moved to the next line.
Claim 11
Independent Claim
245 words
An apparatus for controlling movable means movable in a line by line pattern to each of a plurality of predetermined positions along each of the lines including: moving means to move the movable means in the line by line pattern to each of the plurality of predetermined positions along each of the lines; memory means to store information concerning at least one controllable function of the movable means at each of the predetermined positions along the line, said memory means storing information for the number of predetermined positions equal to the number of predetermined positions for a single line; means to select the information in said memory means in accordance with the predetermined position to which the movable means is moved by said moving means; control means to control the function of the movable means at each of the predetermined positions in accordance with the selected information stored in said memory means for the predetermined position; determining means to determine if the function of the movable means at the same predetermined position in the next line is different than in the line along which the movable means is moving prior to the movable means being moved from the predetermined position; and introducing means to introduce new information in said memory means for the same predetermined position in the next line prior to the movable means being moved from a predetermined position if said determining means determines that the function of the movable means is different.
Claim 12
Independent Claim
245 words
An apparatus for controlling movable means movable in a line by line pattern to each of a plurality of predetermined positions along each of the lines including: moving means to move the movable means in the line by line pattern to each of the plurality of predetermined positions along each of the lines; memory means to store information concerning at least one controllable function of the movable means at each of the predetermined positions along the line, said memory means storing information for the number of predetermined positions equal to the number of predetermined positions for a single line; means to select the information in said memory means in accordance with the predetermined position to which the movable means is moved by said moving means; control means to control the function of the movable means at each of the predetermined positions in accordance with the selected information stored in said memory means for the predetermined position; determining means to determine if the function of the movable means at the same predetermined position in the next line is different than in the line along which the movable means is moving prior to the movable means being moved from the predetermined position; and introducing means to introduce new information in said memory means for the same predetermined position in the next line prior to the movable means being moved from a predetermined position if said determining means determines that the function of the movable means is different.
Claim 13
Dependent Claim
59 words
The apparatus according to claim 10 in which: said introducing means includes: first means to supply information to said memory means; and second means to supply information to said memory means when the rate at which the information is to be supplied is greater than the rate at which said first means can supply information to said memory means.
Claim 14
Dependent Claim
147 words
The apparatus according to claim 11 including: said first means producing a first signal when the rate at which the information is to be supplied to said memory means is greater than the rate at which said first means can supply the information to said memory means; means responsive to the first signal from said first means to connect said second means to said memory means; said second means producing a second signal if said second means is to remain connected to said memory means for the next of the predetermined positions; and said responsive means disconnecting said second means from said memory means after information for the predetermined position in the line has been transmitted to said memory means unless the second signal from said second means is received to maintain said second means connected to said memory means for the next of the predetermined positions.
Claim 15
Dependent Claim
42 words
The apparatus according to claim 12 in which: the movable means is a beam of charged particles; and the function of the movable means at each of the predetermined positions is the exposure of the beam at each of the predetermined positions.
Claim 16
Dependent Claim
122 words
The apparatus according to claim 11 in which: sAid first means of said introducing means includes: buffer means to receive and store information; and decode means connected to said buffer means to supply information from said buffer means to said memory means; said second means of said introducing means includes second memory means to store information for various portions of the line by line portion along which the movable means moves; storage means to store information from said buffer means or said second memory means of said second means for supply to said memory means; and means to control whether said decond means of said first means or said second memory means of said second means is connected to said storage means.
Claim 17
Dependent Claim
42 words
The apparatus according to claim 14 in which: the movable means is a beam of charged particles; and the function of the movable means at each of the predetermined positions is the exposure of the beam at each of the predetermined positions.
Claim 18
Dependent Claim
42 words
The apparatus according to claim 10 in which: the movable means is a beam of charged particles; and the function of the movable means at each of the predetermined positions is the exposure of the beam at each of the predetermined positions.
Claim 19
Dependent Claim
89 words
The apparatus according to claim 16 in which said control means includes means responsive to the information in said memory means concerning the exposure of the beam at the predetermined position to turn the beam on for the entire time period during which the beam is at the predetermined position, turn the beam off for the entire time period during which the beam is at the predetermined position, or turn the beam on for a portion of the time period during which the beam is at the predetermined position.
Claim 20
Dependent Claim
35 words
The apparatus according to claim 17 including means to turn the beam on for the portion of the time period so that said moving means becomes effective when the portion of the time period expires.
Claim 21
Dependent Claim
42 words
The apparatus according to claim 10 in which: the movable means is a beam of charged particles; and the function of the movable means at each of the predetermined positions is the offset of the beam at each of the predetermined positions.
Claim 22
Dependent Claim
154 words
The apparatus according to claim 19 in which: said memory means stores information concerning the offset of the beam at each of the predetermined positions along the line; said control means includes means to control the offset of the beam in directions both along the line being scanned and perpendicular thereto in accordance with the offset information stored in said memory means for the predetermined position; said determining means includes means to determine if the offset of the beam at the same predetermined position in the next line is different than in the line along which the beam is moving prior to the beam being moved from the predetermined position; and said introducing means includes means to introduce new information in said memory means for the same predetermined position in the next line prior to the beam being moved from the predetermined position if said offset determining means determines that the offset is different.
Claim 23
Dependent Claim
59 words
The apparatus according to claim 20 in which: said introducing means includes: first means to supply information to said memory means; and second means to supply information to said memory means when the rate at which the information is to be supplied is greater than the rate at which said first means can supply information to said memory means.
Claim 24
Dependent Claim
147 words
The apparatus according to claim 21 including: said first means producing a first signal when the rate at which the information is to be supplied to said memory means is greater than the rate at which said first means can supply the information to said memory means; means responsive to the first signal from said first means to connect said second means to said memory means; said second means producing a second signal if said second means is to remain connected to saiD memory means for the next of the predetermined positions; and said responsive means disconnecting said second means from said memory means after information for the predetermined position in the line has been transmitted to said memory means unless the second signal from said second means is received to maintain said second means connected to said memory means for the next of the predetermined positions.
Claim 25
Dependent Claim
122 words
The apparatus according to claim 21 in which: said first means of said introducing means includes: buffer means to receive and store information; and decode means connected to said buffer means to supply information from said buffer means to said memory means; said second means of said introducing means includes second memory means to store information for various portions of the line by line portion along which the movable means moves; storage means to store information from said buffer means or said second memory means of said second means for supply to said memory means; and means to control whether said decode means of said first means or said second memory means of said second means is connected to said storage means.
Claim 26
Dependent Claim
26 words
The apparatus according to claim 20 in which said moving means includes means to move the beam along the lines in a back and forth scan.
Claim 27
Dependent Claim
61 words
The apparatus according to claim 24 in which said selecting means includes means to to address said memory means in one direction when the beam is moved in one direction in its back and forth scan and to address said memory means in the opposite direction when the beam is moved in the opposite direction in its back and forth scan.
Claim 28
Dependent Claim
42 words
The apparatus according to claim 10 including means to ascertain if there is any error in said memory means for the next line along which the movable means is to be moved prior to the beam being moved to the next line.
Claim 29
Dependent Claim
122 words
The apparatus according to claim 10 in which: said memory means includes means to store information concerning each of a plurality of controllable functions; said determining means includes function determining means to determine if any of the functions of the movable means at the same predetermined position in the next line is different than in the line along which the memory means is moving prior to the memory means being moved from the predetermined position; and said introducing means includes means to introduce new information in said memory means for the same predetermined position in the next line prior to the memory means being moved from the predetermined position if said function determining means determines that any of the functions is different.
Claim 30
Dependent Claim
58 words
The apparatus according to claim 27 in which: the movable means is a beam of charged particles; and the plurality of the controllable functions of the movable means at each of the predetermined positions includes the exposure of the beam at each of the predetermined positions and the offset of the beam at each of the predetermined positions.
Claim 31
Dependent Claim
187 words
The apparatus according to claim 28 in which: said memory means stores information concerning the exposure and offset of the beam at each of the predetermined positions along the line; said control means includes: means to control the exposure of the beam at each of the predetermined positions in accordance with the exposure information stored in said memory means; and means to control the offset of the beam in directions both along the line being scanned and perpendicular thereto at each of the predetermined positions in accordance with the offset information stored in said memory means; said determining means includes means to determine if the exposure or offset of the beam at the same predetermined position in the next line is different than in the line along which the beam is moving prior to the beam being moved from the predetermined position; and said introducing means includes means to introduce new information in said memory means for thE same predetermined position in the next line prior to the beam being moved from the predetermined position if said determining means determines that the exposure or offset is different.
Claim 32
Dependent Claim
59 words
The apparatus according to claim 29 in which said introducing means includes: first means to supply information to said memory means; and second means to supply information to said memory means when the rate at which the information is to be supplied is greater than the rate at which said first means can supply information to said memory means.
Claim 33
Dependent Claim
147 words
The apparatus according to claim 30 including: said first means producing a first signal when the rate at which the information is to be supplied to said memory means is greater than the rate at which said first means can supply the information to said memory means; means responsive to the first signal from said first means to connect said second means to said memory means; said second means producing a second signal if said second means is to remain connected to said memory means for the next of the predetermined positions; and said responsive means disconnecting said second means from said memory means after information for the predetermined position in the line has been transmitted to said memory means unless the second signal from said second means is received to maintain said second means connected to said memory means for the next of the predetermined positions.
Claim 34
Dependent Claim
26 words
The apparatus according to claim 10 in which said moving means includes means to move the beam along the lines in a back and forth scan.
Claim 35
Dependent Claim
60 words
The apparatus according to claim 32 in which said selecting means includes means to address said memory means in one direction when the beam is moved in one direction in its back and forth scan and to address said memory means in the opposite direction when the beam is moved in the opposite direction in its back and forth scan.
Claim 36
Independent Claim
123 words
An apparatus for controlling a beam of charged particles including: means to move the beam to each of a plurality of predetermined positions; means to hold the beam at each of the predetermined positions for a time period; means to control the exposure of the beam at each of the predetermined positions; and means to select whether said control means turns the beam on for the entire time period during which the beam is at each of the predetermined positions, turns the beam off for the entire time period during which the beam is at each of the predetermined positions, or turns the beam on for a portion of the time period during which the beam is at each of the predetermined positions.
Claim 37
Independent Claim
123 words
An apparatus for controlling a beam of charged particles including: means to move the beam to each of a plurality of predetermined positions; means to hold the beam at each of the predetermined positions for a time period; means to control the exposure of the beam at each of the predetermined positions; and means to select whether said control means turns the beam on for the entire time period during which the beam is at each of the predetermined positions, turns the beam off for the entire time period during which the beam is at each of the predetermined positions, or turns the beam on for a portion of the time period during which the beam is at each of the predetermined positions.
Claim 38
Dependent Claim
35 words
The apparatus according to claim 34 including means to turn the beam on for the portion of the time period so that said moving means becomes effective when the portion of the time period expires.
References Cited (Backward Citations)
US3644700A
Cited
US3789185A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-02-10 | 1978-08-12 | 1979-02-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-02-10 | 1982-08-12 | 1983-02-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-02-10 | 1986-08-12 | 1987-02-11 | $7700.00 | Window Closed / Lapsed |