US3789185A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron beam deflection control apparatus
Assignee: International Business Machines Corp
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Filing: 1971-06-01
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Granted: 1974-01-29
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Expires: 1991-06-01
Abstract
Abstract Apparatus for controlling the deflection of an energy beam to impinge a workpiece with improved accuracy. A computer and interface unit direct the movement of the beam over a master target to learn and record addresses of impingement areas corresponding to those on a workpiece. Differential current flow in two conductive elements is used to determine accurate location of the address. Upon the substitution of a workpiece for the master target, impingement addresses can be selected without additional corrective deflection circuits.
Inventors
- 👤 E Baldwin
- 👤 W Wrenner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:25
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/304; H01J37/3045
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
175 words
Apparatus for correcting the deflection addresses for a beam of charged particles comprising: a target having a plurality of predetermined impingement areas thereon, each said area having a preselected deflection address along orthogonal axes for the impingement of said beam thereon; deflection control means having said addresses stored therein and operable to move said beam over said target along one of said axes to successively impinge on each of a plurality of said areas in response to electrical signals representative of said addresses; detection means indicating aligned and misaligned impingement of said beam upon each of said plurality of areas as said beam is deflected along said one axis in accordance with said addresses; and means responsive to the misaligned impingement of said beam on each said impinged area in said plurality during movement of said beam along said one axis at each said address for modifying the address at said control means by moving said beam along the other of said axes until said beam achieves aligned impingement at each said area in succession.
Claim 2
Dependent Claim
175 words
Apparatus for correcting the deflection addresses for a beam of charged particles comprising: a target having a plurality of predetermined impingement areas thereon, each said area having a preselected deflection address along orthogonal axes for the impingement of said beam thereon; deflection control means having said addresses stored therein and operable to move said beam over said target along one of said axes to successively impinge on each of a plurality of said areas in response to electrical signals representative of said addresses; detection means indicating aligned and misaligned impingement of said beam upon each of said plurality of areas as said beam is deflected along said one axis in accordance with said addresses; and means responsive to the misaligned impingement of said beam on each said impinged area in said plurality during movement of said beam along said one axis at each said address for modifying the address at said control means by moving said beam along the other of said axes until said beam achieves aligned impingement at each said area in succession.
Claim 3
Dependent Claim
44 words
Apparatus as described in claim 1 wherein each said address is defined by values along each of two orthogonal axes and said deflection control means comprises first and second axis deflection control means each operable to effect said beam deflection independently of the other.
Claim 4
Dependent Claim
41 words
Apparatus as described in claim 1 wherein said address modifying means includes means responsive to said misaligned impingement for applying to said deflection control means a fixed sequence of address changes along said other axis until said beam achieves aligned impingement.
Claim 5
Dependent Claim
39 words
Aparatus as described in claim 1 wherein said modifying means determines the differences in address values between said aligned impingement address and said stored address values and annexes said difference to said stored values as corresponding correction values therefor.
Claim 6
Dependent Claim
42 words
Apparatus as described in claim 1 wherein said target has electrically conductive target areas supported on but insulated from an electrically conductive substrate surface and said detection means includes means to indicate beam impingement on either said areas or said substrate surface.
Claim 7
Dependent Claim
31 words
Apparatus as described in claim 5 wherein said detection means is operable to indicate the proportion of said beam impingement occurring simultaneously on each of said area and said substrate surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-01-28 | 1977-07-30 | 1978-01-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-01-28 | 1981-07-30 | 1982-01-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-01-28 | 1985-07-30 | 1986-01-29 | $7700.00 | Window Closed / Lapsed |