Patent US3861353A successfully refreshed from Google Patents.
US3861353A
Expired / Lapsed
US
⏱️ 0.0 years remaining
System for vapor deposition of thin films
Assignee: Xerox Corp
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Filing: 1974-05-03
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Granted: 1975-01-21
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Expires: 1994-05-03
Abstract
Abstract A method and apparatus is disclosed for vapor depositing a thin film of material on image retention surface substrate bodies comprising the steps of positioning a plurality of substrate bodies on a plurality of elongated, horizontally extending support mandrels, rotating each of said mandrels about an associated longitudinal axis thereof while simultaneously transporting said plurality of mandrels in an annular path about a horizontal axis, establishing an evacuated atmosphere about said assembly of mandrels, and vaporizing a material which is positioned in a planar array of crucibles located within a path defined by the annular travel of said mandrels.
Inventors
- 👤 Francis J Erhart
- 👤 Harold H Schroeder
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 19:04
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C14/505
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
160 words
Apparatus for the vapor deposition of a layer of material on substrate bodies comprising: a generally vertically orientated support table adapted for rotation about a horizontal axis; means for rotating said support table; a plurality of elongated horizontally orientated mandrels rotatably supported in an annular array on said support table; means for rotating each of said mandrels about a longitudinal axis thereof; each of said mandrels adapted for receiving, supporting, and rotating therewith a plurality of substrate bodies; means for vaporizing a predetermined quantity of material which is to be deposited upon said substrate bodies; said vaporizing mEans comprising a planar array of crucible members including a plurality of elongated strips of crucibles extending substantially coextensively with the elongated mandrels and a plurality of relatively shorter strips of outrigger crucible members positioned near opposite ends of said enclosure; means to simultaneously activate said crucibles and means providing an evacuated enclosure for said transported mandrels and the substrate bodies supported thereon.
Claim 2
Dependent Claim
160 words
Apparatus for the vapor deposition of a layer of material on substrate bodies comprising: a generally vertically orientated support table adapted for rotation about a horizontal axis; means for rotating said support table; a plurality of elongated horizontally orientated mandrels rotatably supported in an annular array on said support table; means for rotating each of said mandrels about a longitudinal axis thereof; each of said mandrels adapted for receiving, supporting, and rotating therewith a plurality of substrate bodies; means for vaporizing a predetermined quantity of material which is to be deposited upon said substrate bodies; said vaporizing mEans comprising a planar array of crucible members including a plurality of elongated strips of crucibles extending substantially coextensively with the elongated mandrels and a plurality of relatively shorter strips of outrigger crucible members positioned near opposite ends of said enclosure; means to simultaneously activate said crucibles and means providing an evacuated enclosure for said transported mandrels and the substrate bodies supported thereon.
Claim 3
Dependent Claim
16 words
The apparatus of claim 1 including means for heating said substrate bodies to an elevated temperature.
Claim 4
Dependent Claim
24 words
The apparatus of claim 1 wherein said means for vaporizing said material is positioned substantially outside an annular path of travel of said mandrels.
Claim 5
Dependent Claim
24 words
The apparatus of claim 1 wherein said means for vaporizing said material is positioned substantially within an annular path of travel of said mandrels.
Claim 6
Dependent Claim
53 words
The apparatus of claim 4 wherein said vaporizing means comprises a planar array of boat shaped crucibles formed of an electrically conductive material and said means to activate apply an electrical potential to said array for causing a heating current to flow in said crucibles and vaporizing a material positioned in said crucibles.
Claim 7
Dependent Claim
14 words
The apparatus of claim 5 wherein said crucibles are coupled in a series circuit.
Claim 8
Dependent Claim
80 words
The apparatus of claim 1 wherein said enclosure comprises a stationary, generally vertically orientated wall member having an aperture therein, means extending through said aperture for coupling rotational forces to said support plate and to said mandrels, a generally bell shaped enclosure member adapted to engage said plate member and form a vacuum tight enclosure therewith; and means for horizontally displacing said bell shaped housing member and providing access to said mandrels for mounting said substrate bodies on said mandrels.
Claim 9
Dependent Claim
34 words
The apparatus of claim 1 wherein said vaporizing means comprises an array of crucibles and means are provided for supporting said array of crucibles from a wall segment of said bell shaped housing member.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-01-20 | 1978-07-22 | 1979-01-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-01-20 | 1982-07-22 | 1983-01-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-01-20 | 1986-07-22 | 1987-01-21 | $7700.00 | Window Closed / Lapsed |