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US3859535A Expired / Lapsed US ⏱️ 0.0 years remaining

Apparatus for imparting contrast to a microscope object

Assignee: Ernst Leitz Wetzlar GmbH
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Filing: 1972-06-12
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Granted: 1975-01-07
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Expires: 1992-06-12
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Abstract

Abstract The method of imparting contrast to the surface of an object to be viewed microscopically comprises the steps of introducing the object into a vacuum chamber, connecting the object to the positive pole of a high voltage d.c. source, evacuating the chamber, bombarding the surface of the object with a gasconcentrated electron-ion beam, and feeding into the chamber a gas which reacts chemically with the bombarded object surface. Under the effect of the electron beam and negative or neutralized ions then forms a reaction layer characteristic of the component parts of the object material which layer, after the conclusion of the contrasting process can be observed and evaluated under a microscope.

Inventors

  • 👤 Gunter Bartz

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 03:07
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J2237/00; H01J2237/30; H01J2237/31; H01J2237/3151

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 240 words
An apparatus for imparting contrast to the surface portion of an object to be investigated microscopically, the apparatus comprising: a. a non-grounded vacuum chamber (1); b. an object carrier (2) inside the vacuum chamber for disposing an object thereon, the carrier being connected to one wall of the chamber; c. a high voltage D.C. source (3) outside the vacuum chamber, the positive pole of the D.C. source being connected to the object carrier and to the ground; d. a combined electron-ion gun (5) of the gas discharging type mounted in the wall of the vacuum chamber opposite from the object carrier, the cathode of said combined electron-ion gun being connected to the negative pole of the D.C. source and being so adjusted that an electron-ion-beam derived from the gun impinges on an object, which is electrically conductive, positioned on the object carrier, and wherein the ion gun of the said combined electron-ion gun has a regulatable gas source connected thereto for bombarding said surface portion of an object with a gas concentrated electron ion-beam; e. means for supplying a reagent gas into the vacuum chamber; f. means for evacuating the vacuum chamber; and g. switching means located between said negative pole and said electron-ion upon closing of which the voltage between the object and the electron-ion gun causes an electron-ion beam to impinge on the object where a layer characteristic of the component parts of the object material is formed.
Claim 2
Independent Claim 240 words
An apparatus for imparting contrast to the surface portion of an object to be investigated microscopically, the apparatus comprising: a. a non-grounded vacuum chamber (1); b. an object carrier (2) inside the vacuum chamber for disposing an object thereon, the carrier being connected to one wall of the chamber; c. a high voltage D.C. source (3) outside the vacuum chamber, the positive pole of the D.C. source being connected to the object carrier and to the ground; d. a combined electron-ion gun (5) of the gas discharging type mounted in the wall of the vacuum chamber opposite from the object carrier, the cathode of said combined electron-ion gun being connected to the negative pole of the D.C. source and being so adjusted that an electron-ion-beam derived from the gun impinges on an object, which is electrically conductive, positioned on the object carrier, and wherein the ion gun of the said combined electron-ion gun has a regulatable gas source connected thereto for bombarding said surface portion of an object with a gas concentrated electron ion-beam; e. means for supplying a reagent gas into the vacuum chamber; f. means for evacuating the vacuum chamber; and g. switching means located between said negative pole and said electron-ion upon closing of which the voltage between the object and the electron-ion gun causes an electron-ion beam to impinge on the object where a layer characteristic of the component parts of the object material is formed.

References Cited (Backward Citations)

US2200909A Cited
US3308049A Cited
US3418229A Cited
US3477936A Cited
US3604970A Cited
US3704216A Cited
US3650930A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1978-01-06 1978-07-08 1979-01-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1982-01-06 1982-07-08 1983-01-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1986-01-06 1986-07-08 1987-01-07 $7700.00 Window Closed / Lapsed

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