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US3859098A Expired / Lapsed US ⏱️ 0.0 years remaining

Photoresist composition

Assignee: Konica Minolta Inc
•
Filing: 1972-07-13
•
Granted: 1975-01-07
•
Expires: 1992-07-13
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Abstract

Abstract A photoresist composition comprises a carboxy group-containing polymer, in which part or all of the hydrogen atoms have been substituted by an alkali metal, and a photoactivator having a polyhalogenated methyl group capable of yielding a free radical by action of light. The photoresist composition can be developed merely with water or hot water.

Inventors

  • 👤 Hideaki Iwama
  • 👤 Akio Iwaki
  • 👤 Hiroyoshi Yamaguchi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 13:34
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/126

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 16 words
A PHOTORESIST COMPOSITION CONSISTING ESSENTIALLY OF A SOLUTION OF (A) A POLYMERIC COMPOUND OF THE FORMULA
Claim 2
Dependent Claim 16 words
A PHOTORESIST COMPOSITION CONSISTING ESSENTIALLY OF A SOLUTION OF (A) A POLYMERIC COMPOUND OF THE FORMULA
Claim 3
Dependent Claim 18 words
A photoresist composition as claimed in claim 1, wherein said photoactivator is a compound of the general formula
Claim 4
Dependent Claim 17 words
A photoresist composition as claimed in claim 1, wherein said polymeric compound is represented by the formula
Claim 5
Dependent Claim 17 words
A photoresist composition as claimed in claim 1, wherein said polymeric compound is represented by the formula
Claim 6
Dependent Claim 17 words
A photoresist composition as claimed in claim 1, wherein said polymeric compound is represented by the formula
Claim 7
Dependent Claim 17 words
A photoresist composition as claimed in claim 1, wherein said polymeric compound is represented by the formula
Claim 8
Dependent Claim 17 words
A photoresist composition as claimed in claim 1, wherein said polymeric compound is represented by the formula
Claim 9
Dependent Claim 17 words
A photoresist composition as claimed in claim 1, wherein said polymeric compound is represented by the formula
Claim 10
Dependent Claim 17 words
A photoresist composition as claimed in claim 1, wherein said polymeric compound is represented by the formula
Claim 11
Dependent Claim 17 words
A photoresist composition as claimed in claim 1, wherein said polymeric compound is represented by the formula
Claim 12
Dependent Claim 17 words
A photoresist composition as claimed in claim 1, wherein said polymeric compound is represented by the formula
Claim 13
Dependent Claim 17 words
A photoresist composition as claimed in claim 1, wherein said polymeric compound is represented by the formula
Claim 14
Dependent Claim 17 words
A photoresist composition as claimed in claim 1, wherein said polymeric compound is represented by the formula
Claim 15
Dependent Claim 17 words
A photoresist composition as claimed in claim 1, wherein said polymeric compound is represented by the formula
Claim 16
Dependent Claim 23 words
A photoresist composition according to claim 1 where X is a group selected from the group consisting of -COOCH2CH2-, -CONH-, -COOCH2CH2O CH2CH2-, -CONHCH2CH2CH2-

References Cited (Backward Citations)

US3579343A Cited
US3690890A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1978-01-06 1978-07-08 1979-01-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1982-01-06 1982-07-08 1983-01-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1986-01-06 1986-07-08 1987-01-07 $7700.00 Window Closed / Lapsed

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