Patent US3855110A successfully refreshed from Google Patents.
US3855110A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cylindrical rf sputtering apparatus
Assignee: RTX Corp
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Filing: 1973-11-15
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Granted: 1974-12-17
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Expires: 1993-11-15
Abstract
Abstract A cylindrical cathode is used as a vacuum chamber to permit sputtering by means of an rf potential on all sides of a workpiece located coaxially within the chamber. Both insulators and conductors may be used as target materials and as workpieces. Even deposition of the sputtered material on long or continuously fed workpieces is achieved by properly terminating the ends of the coaxial sputtering chamber with grounded chambers of larger diameter than the sputtering chamber and of sufficient length to thereby gradually reduce the plasma density along the axial direction to a relatively small value before reaching the end walls.
Inventors
- 👤 D Quinn
- 👤 E Paradis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:46
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32733; H01J37/32752; H01J37/32761; H01J37/3277; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; H01J37/34; H01J37/3411; H01J37/3414; H01J37/342
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
120 words
Plasma utilization apparatus comprising a cylindrical electrode adapted to support a target material on the inner circumference thereof, said electrode defining a workpiece chamber adapted to contain a workpiece, means including a source of rf potential applied to said electrode for forming a plasma within said workpiece chamber, said plasma interacting with said target material and said workpiece, and a grounded cylindrical termination chamber connected to at least one end of said workpiece chamber and being electrically insulated from said workpiece chamber, said termination chamber having a cross-sectional area greater than the cross-sectional area of said workpiece chamber, said termination chamber having an aperture therein aligned with said workpiece chamber to permit expansion of said plasma into said termination chamber.
Claim 2
Dependent Claim
120 words
Plasma utilization apparatus comprising a cylindrical electrode adapted to support a target material on the inner circumference thereof, said electrode defining a workpiece chamber adapted to contain a workpiece, means including a source of rf potential applied to said electrode for forming a plasma within said workpiece chamber, said plasma interacting with said target material and said workpiece, and a grounded cylindrical termination chamber connected to at least one end of said workpiece chamber and being electrically insulated from said workpiece chamber, said termination chamber having a cross-sectional area greater than the cross-sectional area of said workpiece chamber, said termination chamber having an aperture therein aligned with said workpiece chamber to permit expansion of said plasma into said termination chamber.
Claim 3
Dependent Claim
25 words
Apparatus as in claim 1 and including a second said termination chamber connected to the other end of said workpiece chamber and electrically insulated therefrom.
Claim 4
Dependent Claim
13 words
Apparatus as in claim 1 and including a cylindrical magnet surrounding said electrode.
Claim 5
Dependent Claim
15 words
Apparatus as in claim 1 and including means for cooling the walls of said electrode.
Claim 6
Dependent Claim
28 words
Apparatus as in claim 1 in which said termination chamber is formed from a metallic material and is attached to said workpiece chamber by an annular insulating member.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-12-16 | 1978-06-17 | 1978-12-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-12-16 | 1982-06-17 | 1982-12-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-12-16 | 1986-06-17 | 1986-12-17 | $7700.00 | Window Closed / Lapsed |