US3853648A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for forming a metal oxide pattern
Assignee: Material Sciences Corp
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Filing: 1972-08-14
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Granted: 1974-12-10
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Expires: 1992-08-14
Abstract
Abstract A process for forming a pattern of metal oxide on a substrate wherein a metal oxide is selectively formed or etched in accordance with a thermal pattern. In one embodiment, selected portions of a uniform layer of substantially amorphous metal oxide are converted to a more crystalline form by heat and remaining amorphous oxide portions are removed by chemical etching to form the pattern. In another embodiment, a metalorganic compound precursor of the metal oxide is thermally decomposed on the substrate in accordance with the pattern. A novel vapor etching process, and a novel sputtering process for forming amorphous metal oxide, are disclosed.
Inventors
- 👤 M Ridosh
- 👤 W Freihube
- 👤 A Janus
- 👤 P Fletcher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 00:32
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23C14/06; C23C14/08; C23C14/085; C23C14/58; C23C14/5806; C23C14/582; C23C14/5846; C23C14/5873; C30; C30B; C30B1/00; C30B1/02; C30B29/00; C30B29/10; C30B29/16
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
92 words
A PROCESS FOR FORMING AN OPTICAL MASK DEFINED BY A SELECTED PATTERN OF FERRIC OXIDE ON A SUBSTRATE, COMPRISING: DEPOSITIONING ON SAID SUBSTRATE, A UNIFORM LAYER OF AMORPHOUS FERRIC OXIDE; HEATING SELCTED REGIONS ONLY OF SAID LAYER TO A TEMPERATURE OF AT LEAST 160*C TO CONVERT SAID SELECTED REGIONS OF FERRIC OXIDE TO A CRYSTALLINE FORM WHILE LEAVING REMAINING REGIONS IN AN AMORPHOUS FORM TO OBTAIN A DESIRED PATTERN DEFINED BY SAID CYRSTALLINE FERRIC OXIDE AND AMORPHOUS FERRIC OXIDE REGIONS; AND THEN SELECTIVELY REMOVING ONLY SAID REMAINING REGIONS OF AMORPHOUS FERRIC OXIDE.
Claim 2
Dependent Claim
92 words
A PROCESS FOR FORMING AN OPTICAL MASK DEFINED BY A SELECTED PATTERN OF FERRIC OXIDE ON A SUBSTRATE, COMPRISING: DEPOSITIONING ON SAID SUBSTRATE, A UNIFORM LAYER OF AMORPHOUS FERRIC OXIDE; HEATING SELCTED REGIONS ONLY OF SAID LAYER TO A TEMPERATURE OF AT LEAST 160*C TO CONVERT SAID SELECTED REGIONS OF FERRIC OXIDE TO A CRYSTALLINE FORM WHILE LEAVING REMAINING REGIONS IN AN AMORPHOUS FORM TO OBTAIN A DESIRED PATTERN DEFINED BY SAID CYRSTALLINE FERRIC OXIDE AND AMORPHOUS FERRIC OXIDE REGIONS; AND THEN SELECTIVELY REMOVING ONLY SAID REMAINING REGIONS OF AMORPHOUS FERRIC OXIDE.
Claim 3
Dependent Claim
14 words
The process according to claim 1 in which said substrate is formed of glass.
Claim 4
Dependent Claim
14 words
The process according to claim 1 in which said substrate is a plastic sheet.
Claim 5
Dependent Claim
63 words
The process according to claim 1 in which saId step of selectively removing only said remaining regions of amorphous ferric oxide comprises applying an etchant directly to both said selected regions and remaining regions for a time sufficient to convert said remaining regions of amorphous ferric oxide to a soluble product, while leaving said selected regions substantially intact, and removing said soluble product.
Claim 6
Dependent Claim
18 words
The process according to claim 4 in which said etchant is applied in the form of a vapor.
Claim 7
Dependent Claim
15 words
The process according to claim 5 in which said etchant is an inorganic acid vapor.
Claim 8
Dependent Claim
58 words
The process according to claim 1 in which said depositing step comprises applying a thermally decomposable iron-organic compound precursor of said ferric oxide in combination with an oxidant therefor to a surface of said substrate while heating said substrate at a temperature less than 160* C but sufficient to thermally decompose said precursor to said amorphous ferric oxide.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-12-09 | 1978-06-10 | 1978-12-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-12-09 | 1982-06-10 | 1982-12-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-12-09 | 1986-06-10 | 1986-12-10 | $7700.00 | Window Closed / Lapsed |