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Low-loss, highly reflective multilayer coating system formed of alternate highly refractive and low-refractive oxide layers

Assignee: Balzers Patent und Beteiligungs AG
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Filing: 1973-09-06
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Granted: 1974-12-10
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Expires: 1993-09-06
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Abstract

Abstract A low-loss, highly reflective multilayer system for coating a substrate comprises alternate layers of high refraction and lowrefraction oxide layers whose low-refraction layers comprise a low-absorption oxide of silicon and whose high refraction layers comprise titanium oxide, and wherein at least the three last high refraction layers located on the side of the system which is opposite to the substrate side comprises zirconium oxide.

Inventors

  • 👤 E Ritter
  • 👤 H Pulker

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 10:09
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/08; G02B5/0816; G02B5/0825; G02B5/0833; C; C03; C03C; C03C17/00; C03C17/34; C03C17/3411; C03C17/3417; Y; Y10; Y10T; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 64 words
A LOW-LOSS, HIGHLY REFLECTIVE MULTILAYER SYSTEM FOR COATING A SUBSTRATE COMPRISING ALTERNATE LAYERS OF HIGH REFRACTION AND LOW-REFRACTION OXIDE LAYERS WHOSE LOW-REFRACTION LAYERS COMPRISE A LOW-ABSORPTION OXIDE OF SILICON AND SAID HIGH REFRACTION LAYERS COMPRISE TITANIUM OXIDE, AND WHEREIN AT LEAST THE THREE LAST HIGH REFRACTION LAYERS LOCATED ON THE SIDE OF THE SYSTEM WHICH IS OPPOSITE TO THE SUBSTRATE SIDE COMPRISES ZIRCONIUM OXIDE.
Claim 2
Dependent Claim 64 words
A LOW-LOSS, HIGHLY REFLECTIVE MULTILAYER SYSTEM FOR COATING A SUBSTRATE COMPRISING ALTERNATE LAYERS OF HIGH REFRACTION AND LOW-REFRACTION OXIDE LAYERS WHOSE LOW-REFRACTION LAYERS COMPRISE A LOW-ABSORPTION OXIDE OF SILICON AND SAID HIGH REFRACTION LAYERS COMPRISE TITANIUM OXIDE, AND WHEREIN AT LEAST THE THREE LAST HIGH REFRACTION LAYERS LOCATED ON THE SIDE OF THE SYSTEM WHICH IS OPPOSITE TO THE SUBSTRATE SIDE COMPRISES ZIRCONIUM OXIDE.
Claim 3
Dependent Claim 23 words
A multilayer system, according to claim 1, wherein the sum of the thicknesses of the zirconium oxide layers is at least 200 nm.
Claim 4
Dependent Claim 42 words
A multilayer system, according to claim 1, wherein the thickness of the zirconium oxide layers is d (1/n) ( lambda /4) where n is the index of refraction of the layer and lambda is the wave length of the maximum of reflection.
Claim 5
Dependent Claim 45 words
A multilayer system, according to claim 1, wherein there are 25 layers alternately from the substrate of titanium oxide and silicon dioxide up to the 18th layer and seven alternate layers thereafter of zirconium dioxide and silicon dioxide with the outermost layer being zirconium dioxide.

References Cited (Backward Citations)

CH358249A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-12-09 1978-06-10 1978-12-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-12-09 1982-06-10 1982-12-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-12-09 1986-06-10 1986-12-10 $7700.00 Window Closed / Lapsed

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