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US3847658A
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Article of manufacture having a film comprising nitrogen-doped beta tantalum
Assignee: AT&T Inc
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Filing: 1972-12-15
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Granted: 1974-11-12
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Expires: 1992-12-15
Abstract
Abstract An article of manufacture comprising nitrogen-doped beta tantalum is disclosed. The article of manufacture comprises a substrate having a film comprising nitrogen-doped beta tantalum where tantalum atoms are combined with nitrogen atoms in a betatantalum crystal structure. The film comprises an amount of nitrogen ranging from about 0.1 atomic percent to about 10 atomic percent of nitrogen.
Inventors
- 👤 H Kumagai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 13:26
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/0021; C23C14/0036; H; H10; H10D; H10D86/00; H10D86/80; H10D86/85
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
35 words
AN ARTICLE OF MANUFACTURE WHICH COMPRISES A NONCONDUCTIVE SUBSTRATE HAVING A FILM COMPRISING NITROGEN-DOPED BETA TANTALUM WHEREIN NITROGEN IS PRESENT IN AN AMOUNT RANGING FROM ABOUT 0.1 ATOMATIC PERCENT TO ABOUT 10 ATOMATIC PERCENT NITROGEN.
Claim 2
Dependent Claim
35 words
AN ARTICLE OF MANUFACTURE WHICH COMPRISES A NONCONDUCTIVE SUBSTRATE HAVING A FILM COMPRISING NITROGEN-DOPED BETA TANTALUM WHEREIN NITROGEN IS PRESENT IN AN AMOUNT RANGING FROM ABOUT 0.1 ATOMATIC PERCENT TO ABOUT 10 ATOMATIC PERCENT NITROGEN.
Claim 3
Dependent Claim
26 words
The article of manufacture as defined in claim 1 wherein at least a portion of said film has been anodized to form nitrogen-doped beta tantalum oxide.
Claim 4
Dependent Claim
40 words
An article of manufacture which comprises a film comprising tantalum atoms combined with nitrogen atoms in a beta tantalum crystal structure wherein nitrogen is present in an amount ranging from about 0.1 atomic percent to about 10 atomic percent nitrogen.
Claim 5
Dependent Claim
40 words
An article of manufacture which comprises a film comprising tantalum atoms combined with nitrogen atoms in a beta tantalum crystal structure wherein nitrogen is present in an amount ranging from about 0.1 atomic percent to about 10 atomic percent nitrogen.
Claim 6
Dependent Claim
26 words
The article of manufacture as defined in claim 3 wherein at least a portion of said film has been anodized to form nitrogen-doped beta tantalum oxide.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-11-11 | 1978-05-13 | 1978-11-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-11-11 | 1982-05-13 | 1982-11-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-11-11 | 1986-05-13 | 1986-11-12 | $7700.00 | Window Closed / Lapsed |