US3845304A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ion microanalyzer
Assignee: Hitachi Ltd
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Filing: 1973-03-20
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Granted: 1974-10-29
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Expires: 1993-03-20
Abstract
Abstract An ion microanalyzer employing a mass spectrometer of a double focussing type in which a specimen is enclosed by a shield body, and variable voltage is applied to the specimen and the shield body to make the acceleration voltage for secondary ions variable.
Inventors
- 👤 H Tamura
- 👤 K Nakamura
- 👤 T Kondo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 06:01
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/26; H01J49/28; H01J49/32; H01J37/00; H01J37/252
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
59 words
An ion microanalyzer comprising: means for generating an ion beam, means for directing said beam to a desired portion of a specimen, a mass spectrometer for analyzing secondary ions emitted from said specimen, a variable electric source for applying a voltage to said specimen, and a shield body which encloses said specimen and to which said voltage is applied.
Claim 2
Dependent Claim
59 words
An ion microanalyzer comprising: means for generating an ion beam, means for directing said beam to a desired portion of a specimen, a mass spectrometer for analyzing secondary ions emitted from said specimen, a variable electric source for applying a voltage to said specimen, and a shield body which encloses said specimen and to which said voltage is applied.
Claim 3
Dependent Claim
65 words
An ion microanalyzer comprising: means for generating an ion beam; means for directing said beam to a desired portion of a specimen; a mass spectrometer for analyzing secondary ions emitted from said specimen; an electric source for applying a voltage to said specimen; a shield body which encloses said specimen; and means for applying a desired potential difference between said shield body and said specimen.
Claim 4
Dependent Claim
65 words
An ion microanalyzer comprising: means for generating an ion beam; means for directing said beam to a desired portion of a specimen; a mass spectrometer for analyzing secondary ions emitted from said specimen; an electric source for applying a voltage to said specimen; a shield body which encloses said specimen; and means for applying a desired potential difference between said shield body and said specimen.
Claim 5
Dependent Claim
26 words
An ion microanalyzer as claimed in claim 2, in which said mass spectrometer is of a single focusing type provided with a sector magnetic field device.
Claim 6
Dependent Claim
66 words
An ion microanalyzer comprising: first means for generating an ion beam; a specimen; second means for directing said beam to a desired portion of said specimen; a mass spectrometer for analyzing secondary ions emitted from said specimen; an electric source for applying a voltage to said specimen; a shield electrode which encloses said specimen; and third means for electrically connecting said specimen with said shield electrode.
Claim 7
Dependent Claim
66 words
An ion microanalyzer comprising: first means for generating an ion beam; a specimen; second means for directing said beam to a desired portion of said specimen; a mass spectrometer for analyzing secondary ions emitted from said specimen; an electric source for applying a voltage to said specimen; a shield electrode which encloses said specimen; and third means for electrically connecting said specimen with said shield electrode.
Claim 8
Dependent Claim
42 words
An ion microanalyzer according to claim 4, wherein said mass spectrometer is of a single focusing type provided with a sector magnetic field device, and said third means includes an electric source applying a voltage between said specimen and said shield electrode.
Claim 9
Dependent Claim
20 words
An ion microanalyzer according to claim 5, wherein said third means includes means for reversing the polarity of said voltage.
Claim 10
Dependent Claim
44 words
An ion microanalyzer according to claim 4, wherein said mass spectrometer is of a double focusing type provided with a sector electric field device, a sector magnetic field device, and a variable electric source for applying a voltage to said sector electric field device.
Claim 11
Dependent Claim
15 words
An ion microanalyzer according to claim 4, wherein said shield electrode is a conductive mesh.
Claim 12
Dependent Claim
16 words
An ion microanalyzer according to claim 4, wherein said shield electrode is a perforated conductive electrode.
Claim 13
Dependent Claim
15 words
An ion microanalyzer according to claim 7, wherein said shield electrode is a conductive mesh.
Claim 14
Dependent Claim
16 words
An ion microanalyzer according to claim 7, wherein said shield electrode is a perforated conductive electrode.
Claim 15
Dependent Claim
80 words
In an ion microanalyzer having first means for generating an ion beam and directing said ion beam onto a desired portion of a specimen; second means, connected to said specimen, for applying a prescribed voltage thereto; and a mass spectrometer for analyzing secondary ions emitted from said specimen as a result of said ion beam being directed thereon; the improvement comprising: a shield electrode body enclosing said specimen; and third means electrically connecting said shield electrode body to said specimen.
Claim 16
Dependent Claim
80 words
In an ion microanalyzer having first means for generating an ion beam and directing said ion beam onto a desired portion of a specimen; second means, connected to said specimen, for applying a prescribed voltage thereto; and a mass spectrometer for analyzing secondary ions emitted from said specimen as a result of said ion beam being directed thereon; the improvement comprising: a shield electrode body enclosing said specimen; and third means electrically connecting said shield electrode body to said specimen.
Claim 17
Dependent Claim
25 words
The improvement according to claim 12, wherein said third means comprises means for applying a selected voltage between said specimen and said shield electrode body.
Claim 18
Dependent Claim
14 words
The improvement according to claim 13, wherein said selected voltage is a variable voltage.
Claim 19
Dependent Claim
23 words
The improvement according to claim 12, wherein said third means comprises means for directly electrically connecting said specimen to said shield electrode body.
References Cited (Backward Citations)
US3646344A
Cited
US3686499A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-10-28 | 1978-04-29 | 1978-10-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-10-28 | 1982-04-29 | 1982-10-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-10-28 | 1986-04-29 | 1986-10-29 | $7700.00 | Window Closed / Lapsed |