US3842491A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Manufacture of assorted types of lsi devices on same wafer
Assignee: International Business Machines Corp
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Filing: 1972-12-08
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Granted: 1974-10-22
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Expires: 1992-12-08
Abstract
Abstract Multiple LSI (Large Scale Integrated) semiconductor devices (chips) of assorted types (different design and function, representing different assembly parts or devices) are fabricated in aggregate on one integral wafer crystal. A multitype composite mask or procedural equivalent is used. In specific instances this results in distinct savings in production apparatus, test apparatus, procedures and materials usage; e.g., low quantity multitype custom production runs. Devices of each desired type are scheduled for production in prescribed areas of the wafer. The areas are laid out as a function of pre-assessed yield probabilities and pre-established quantity requirements for the individual types. The wafer areas are allocated so as to optimize potential device yields in each type category; in the ultimate case to yield at least one useful device of each type.
Inventors
- 👤 A Depuy
- 👤 L Johnson
- 👤 S Scheinberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 19:06
CPC Classifications
H; H10; H10D; H10D89/00; H10D89/10; H10D84/00; H10D84/01; H10P; H10P95/00
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
127 words
A method of efficiently making predetermined quantities of each of a plurality of distinct types of differently structured LSI device units from a segmented wafer of predetermined form and composition comprising: preparing a layout, representing a mapping of multiple devices of each said type upon a specific surface portion of said wafer having substantially uniform yield characteristics throughout the area thereof, said mapped devices arranged in a predetermined intermixed distribution of said types; processing and segmenting said wafer in accordance with said layout to yield plural devices of each said type, including both operative and inoperative devices; the anticipated yields of operative devices of each said type being equal to or in excess of predetermined requirement numbers pre-specified for the respective types due to said intermixed distribution.
Claim 2
Independent Claim
127 words
A method of efficiently making predetermined quantities of each of a plurality of distinct types of differently structured LSI device units from a segmented wafer of predetermined form and composition comprising: preparing a layout, representing a mapping of multiple devices of each said type upon a specific surface portion of said wafer having substantially uniform yield characteristics throughout the area thereof, said mapped devices arranged in a predetermined intermixed distribution of said types; processing and segmenting said wafer in accordance with said layout to yield plural devices of each said type, including both operative and inoperative devices; the anticipated yields of operative devices of each said type being equal to or in excess of predetermined requirement numbers pre-specified for the respective types due to said intermixed distribution.
Claim 3
Independent Claim
155 words
A method of efficiently making plural different types of LSI devices in predetermined quantities from one predetermined type of segmentable wafer comprising: preparing a device layout, representing a mapping upon each of a plurality of discrete surface sections of said wafer of multiple devices of each said type positionally interspersed by type in a predetermined distribution within each said section; each said section having substantially constant yield characteristic throughout the area thereof; processing and segmenting a said wafer according to said layout to produce anticipated yields of operative and inoperative devices of such said type; the anticipated yield of operative devices of each said type being equal to or exceeding a predetermined required yield number prespecified for the respective device type; processing said operative and inoperative devices selectively by type to segregate said operative devices from the inoperative devices and to further segregate the operative devices of each type from the devices of other type.
Claim 4
Independent Claim
155 words
A method of efficiently making plural different types of LSI devices in predetermined quantities from one predetermined type of segmentable wafer comprising: preparing a device layout, representing a mapping upon each of a plurality of discrete surface sections of said wafer of multiple devices of each said type positionally interspersed by type in a predetermined distribution within each said section; each said section having substantially constant yield characteristic throughout the area thereof; processing and segmenting a said wafer according to said layout to produce anticipated yields of operative and inoperative devices of such said type; the anticipated yield of operative devices of each said type being equal to or exceeding a predetermined required yield number prespecified for the respective device type; processing said operative and inoperative devices selectively by type to segregate said operative devices from the inoperative devices and to further segregate the operative devices of each type from the devices of other type.
Claim 5
Dependent Claim
64 words
In a method of multi-type device production according to claim 2, the steps of: selecting, for use as said wafer, a wafer of a type previously utilized in large numbers for mass production of devices of the predetermined type; and basing said layout preparation upon statistics of device yield per wafer area section developed in connection with production handling of said previously utilized wafers.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-10-21 | 1978-04-22 | 1978-10-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-10-21 | 1982-04-22 | 1982-10-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-10-21 | 1986-04-22 | 1986-10-22 | $7700.00 | Window Closed / Lapsed |