Patent US3837873A successfully refreshed from Google Patents.
US3837873A
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Compositions for use in forming a doped oxide film
Assignee: Texas Instruments Inc
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Filing: 1972-05-31
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Granted: 1974-09-24
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Expires: 1992-05-31
Abstract
Abstract A doped silicon oxide-forming film is produced on a semiconductor wafer by coating the wafer with a solution prepared by the reaction of tetraethylorthosilicate with acetic anhydride in the presence of a suitable solvent. A suitable dopant species is also contained in the solution. Upon heating the wafer to diffusion temperature, a doped oxide film is formed, and the dopant diffuses from the doped oxide film into the semiconductor.
Inventors
- 👤 G Pollack
- 👤 J Fish
- 👤 S Shortes
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:35
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6342; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6923; H10P14/6928; H10P32/00; H10P32/10; H10P32/14; H10P32/1408; H10P32/141; H10P32/17; H10P32/171; H10P32/174; H10P32/18; H10P32/19; H10P95/00; H10W; H10W74/00; H10W74/40; H10W74/47; Y; Y10; Y10S; Y10S252/00; Y10S252/95
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
11 words
A composition as in claim 1 wherein said solvent is ethanol.
Claim 2
Dependent Claim
13 words
A composition as in claim 2 wherein said reaction product comprises diethoxysilicon diacetate.
Claim 3
Dependent Claim
12 words
A composition as in claim 3 wherein said dopant comprises boron oxide.
Claim 4
Dependent Claim
20 words
A composition as defined by claim 3 wherein said dopant comprises a compound of boron, phosphorus, arsenic, gold or zinc.
References Cited (Backward Citations)
US3615493A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-09-23 | 1978-03-25 | 1978-09-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-09-23 | 1982-03-25 | 1982-09-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-09-23 | 1986-03-25 | 1986-09-24 | $7700.00 | Window Closed / Lapsed |