Patent US3821038A successfully refreshed from Google Patents.
US3821038A
Expired / Lapsed
US
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Method for fabricating semiconductor structures with minimum crystallographic defects
Assignee: International Business Machines Corp
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Filing: 1972-05-22
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Granted: 1974-06-28
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Expires: 1992-05-22
Abstract
Abstract A method for manufacturing semiconductor bipolar devices and structures comprising carrying out processing steps such as diffusion, reoxidation, epitaxial deposition, isolation and similar process steps, at a processing temperature range in which the conductivity dopant or impurity exhibits maximum solubility in the semiconductor material thereby minimizing crystallographic dislocations which render subsequent device structures defective.
Inventors
- 👤 G Schwuttke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 07:16
CPC Classifications
H; H10; H10W; H10W15/00; H10P; H10P36/00; H10P36/03; H10P95/00; H10P95/40; H10P95/402; H10P95/90; H10W15/01; Y; Y10; Y10S; Y10S148/00; Y10S148/06; Y10S148/097; Y10S148/155
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
22 words
A method in accordance with claim 1 wherein said impurity dopant is selected from the group consisting of arsenic, boron and phosphorous.
Claim 2
Dependent Claim
21 words
A method in accordance with claim 1 wherein said semiconductor material is selected from the group consisting of silicon and germanium.
Claim 3
Dependent Claim
14 words
A method in accordance with claim 1 wherein the said impurity dopant is arsenic.
Claim 4
Dependent Claim
22 words
A method in accordance with claim 4 wherein said substrate is silicon and said temperature range is between 1,075*C and 1, 150*C.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-06-27 | 1977-12-27 | 1978-06-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-06-27 | 1981-12-27 | 1982-06-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-06-27 | 1985-12-27 | 1986-06-28 | $7700.00 | Window Closed / Lapsed |