Heat treating apparatus

Claim 2

Apparatus for heat treating semi-conductor elements in a diffusion furnace having an internal heat treating cylindrical chamber comprising an elongated carrier fixture formed with means for positioning said semi-conductor elements, a plurality of point contact support members mounted on said fixture, and each of said support members making point contact with the internal surface of said cylindrical chamber whereby an interface between said fixture and said heat treating chamber is established.

Claim 3

Apparatus for heat treating semi-conductor elements in a diffusion furnace according to claim 1 in which said means on said fixture comprise a plurality of wedge sections secured to the bottom of said fixture.

Claim 4

Apparatus for heat treating semi-conductor elements in a diffusion furnace according to claim 2 in which said wedge sections are fabricated from a material which is compatible with the operation within said diffusion furnace such that contamination will not occur within said diffusion furnace to adversely affect said semi-conductor elements.

Claim 5

Apparatus for heat treating semi-conductor elements in a diffusion furnace according to claim 2 in which said carrier fixture is fabricated from quartz material formed with a plurality of slot openings sized to receive said wedge sections.

Claim 6

Apparatus for heat treating semi-conductor elements in a diffusion furnace according to claim 2 in which said wedge sections are fabricated from silicone carbide material formed with a generally triangular shaped outer configuration.

Claim 7

Apparatus for heat treating semi-conductor elements in a diffusion furnace according to claim 1 in which said means on said fixture comprise a plurality of spherically shaped sections secured to the bottom of said fixture.

Claim 8

Apparatus for treating semi-conductor elements in a diffusion furnace having an internal heat treating chamber and a linear actuator capable of being extended and retracted within said chamber, comprising an elongated carrier fixture formed with means for positioning said semi-conductor elements, said carrier fixture mounted on said actuator for moving said fixture in said chamber, and a plurality of point contact support means on said fixture, and each of said support means making a point contact with tHe internal surface of said chamber, whereby an interface is established between said support means and said heat treating chamber, such that said support means are prevented from adhering to the surface of said heat treating chamber.

Claim 9

Apparatus for treating semi-conductor elements in a diffusion furnace having an internal heat treating chamber and a linear actuator capable of being extended and retracted within said chamber, comprising an elongated carrier fixture formed with means for positioning said semi-conductor elements, said carrier fixture mounted on said actuator for moving said fixture in said chamber, and a plurality of point contact support means on said fixture, and each of said support means making a point contact with tHe internal surface of said chamber, whereby an interface is established between said support means and said heat treating chamber, such that said support means are prevented from adhering to the surface of said heat treating chamber.

Claim 10

Apparatus for heat treating semi-conductor elements in a diffusion furnace according to claim 7 in which said means on said fixture comprise a plurality of wedge sections secured to the bottom of said fixture.

Claim 11

Apparatus for heat treating semi-conductor elements in a diffusion furnace according to claim 7 in which said carrier fixture is fabricated from quartz material formed with a plurality of slot openings sized to receive said wedge sections, such that said wedge sections can be secured to said fixture by applying heat to said slot openings.