US3563434A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for loading and unloading furnace
Assignee: Texas Instruments Inc
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Filing: 1969-02-27
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Granted: 1971-02-16
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Expires: 1989-02-27
Abstract
Abstract In order to minimize slip dislocations, the rates of introduction and withdrawal of semiconductor wafers into and from a high temperature furnace are carefully controlled by means of apparatus comprising a conveyor, a pushrod for moving a furnace boat along the conveyor path, and a novel mechanism for driving the pushrod. The mechanism includes a roller drive and two idler wheels pivotally supported about an axis lying in a common plane with the roller drive axis.
Inventors
- 👤 James E Shriver
- 👤 Gerald M Streater
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 12:24
CPC Classifications
C; C30; C30B; C30B31/00; C30B31/06; C30B31/10; C30B31/103; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/14
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
87 words
A mechanism for driving a pushrod comprising a combination: a. roller drive means; means for urging the pushrod against the roller drive means, including a pair of idler wheels pivotally supported about an axis lying in a common plane with the roller drive axis; c. first support means centrally supporting each of said idler wheels; and d. second support means pivotally supporting said first support means at a point halfway between the centers of said idler wheels, and directly across the pushrod from the roller drive axis.
Claim 2
Dependent Claim
87 words
A mechanism for driving a pushrod comprising a combination: a. roller drive means; means for urging the pushrod against the roller drive means, including a pair of idler wheels pivotally supported about an axis lying in a common plane with the roller drive axis; c. first support means centrally supporting each of said idler wheels; and d. second support means pivotally supporting said first support means at a point halfway between the centers of said idler wheels, and directly across the pushrod from the roller drive axis.
Claim 3
Dependent Claim
28 words
A mechanism for driving a pushrod as defined in claim 1 wherein said means for urging the pushrod against the roller drive means further includes spring tension means.
Claim 4
Dependent Claim
28 words
A mechanism for driving a pushrod as defined in claim 1 wherein said roller drive means includes a DC servosystem for controlling the rate motion of the pushrod.
Claim 5
Dependent Claim
26 words
A mechanism as defined by claim 1 wherein both said idler wheels and said roller drive are circumferentially grooved to fit the contour of said pushrod.
Claim 6
Dependent Claim
105 words
A mechanism for driving a pushrod comprising in combination: a. two idler wheels to engage one side of the rod at first and second locations; b. a driver wheel to engage the opposite side of the rod at a third location, intermediate said first and second locations; c. first support means centrally supporting each of said idler wheels; d. second support means pivotally supporting said first support means at a point intermediate the centers of said idler wheels; and e. means for urging said first and second support means in a direction to cause said idler wheels to urge said rod against said driver wheel.
Claim 7
Dependent Claim
105 words
A mechanism for driving a pushrod comprising in combination: a. two idler wheels to engage one side of the rod at first and second locations; b. a driver wheel to engage the opposite side of the rod at a third location, intermediate said first and second locations; c. first support means centrally supporting each of said idler wheels; d. second support means pivotally supporting said first support means at a point intermediate the centers of said idler wheels; and e. means for urging said first and second support means in a direction to cause said idler wheels to urge said rod against said driver wheel.
References Cited (Backward Citations)
US1096857A
Cited
US3243059A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-02-15 | 1974-08-17 | 1975-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-02-15 | 1978-08-17 | 1979-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-02-15 | 1982-08-17 | 1983-02-16 | $7700.00 | Window Closed / Lapsed |