US3787312A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for passing substrates through a vapor deposition zone
Assignee: Balzers Patent und Beteiligungs AG
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Filing: 1972-09-14
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Granted: 1974-01-22
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Expires: 1992-09-14
Abstract
Abstract A device for coating substrates in a vacuum plant comprising a vacuum chamber which is adapted to be subjected to reduced pressures and which includes at least one pair of laterally spaced sources for producing a deposition vapor current of the material to be coated in a deposition zone therebetween. A conveyor is movable through the chamber and through the deposition zone. A slider shield carrier extends over the conveyor and is supported thereon for movement through the deposition zone and provides a covering to shield the conveyor parts against the deposition of the material thereon. The substrates are supported preferably on each side of the slider shield carrier and they are moved with the carrier on the conveyor to expose them to the vapor deposition current.
Inventors
- 👤 R Wagner
- 👤 R Schertler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 07:33
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/50
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
119 words
A device for coating substrates in a plant in which under underpressures are employed, comprising a chamber adapted to be subject to reduced pressures, at least one pair of laterally spaced sources for producing a deposition vapor current of the material to be coated in a deposition zone therebetween, a conveyor movable through said chamber and through said deposition zone, a slider shield-carrier extending over said conveyor and supported thereon for movement through said deposition zone and covering and shielding said conveyor against the deposition of material thereon and having means thereon for supporting a substrate on at least one side of said conveyor in a position to expose it to the vapor current for receiving a coating thereon.
Claim 2
Independent Claim
119 words
A device for coating substrates in a plant in which under underpressures are employed, comprising a chamber adapted to be subject to reduced pressures, at least one pair of laterally spaced sources for producing a deposition vapor current of the material to be coated in a deposition zone therebetween, a conveyor movable through said chamber and through said deposition zone, a slider shield-carrier extending over said conveyor and supported thereon for movement through said deposition zone and covering and shielding said conveyor against the deposition of material thereon and having means thereon for supporting a substrate on at least one side of said conveyor in a position to expose it to the vapor current for receiving a coating thereon.
Claim 3
Dependent Claim
62 words
A device according to claim 1, wherein said laterally spaced sources for producing a deposition vapor current comprises a plate of the material arranged on each side of said conveyor, and means for supplying an electrical potential to the each plate on each side of said conveyor for generating a vapor deposition zone of the material of the plate between said plates.
Claim 4
Dependent Claim
41 words
A device according to claim 1 wherein said conveyor comprises an endless conveyor member with guide roller means over which said conveyor member is directed, said slider shield carrier being of U-shaped configuration and being engaged over said endless conveyor member.
Claim 5
Dependent Claim
70 words
A device according to claim 1 wherein said slider shield carriers comprises substantially symmetrical U-shaped members having a central roof portion adapted to engage at its interior on said conveyor and including a side like portion on each side extending downwardly on each respective side of said conveyor from said roof portion said side legs having means for supporting a substrate thereon in a position facing outwardly from said conveyor.
Claim 6
Dependent Claim
38 words
A device according to claim 3 wherein said slider shield carriers comprise individual cassettes which are loaded with substrate plates and have internal supporting flanges at their lower ends of each side engaging and holding said substrate plates.
Claim 7
Independent Claim
119 words
A device for conveying substrates through a zone of reduced pressure for receiving a coating on the substrates comprising a conveyor frame, a pair of spaced apart rollers carried on said frame, an endless member guided over said rollers and defining an upper movable reach between said rollers, drive means for driving said rollers, a slider shield carrier comprising a longitudinally elongated member of generally U-shaped configuration having a leg portion on each side extending downwardly over said conveyor and protecting said conveyor and a top portion between said leg portions supported on the upper reach for movement thereon along with the endless member, and means on each of said leg portions for supporting a substrate to be coated.
Claim 8
Independent Claim
119 words
A device for conveying substrates through a zone of reduced pressure for receiving a coating on the substrates comprising a conveyor frame, a pair of spaced apart rollers carried on said frame, an endless member guided over said rollers and defining an upper movable reach between said rollers, drive means for driving said rollers, a slider shield carrier comprising a longitudinally elongated member of generally U-shaped configuration having a leg portion on each side extending downwardly over said conveyor and protecting said conveyor and a top portion between said leg portions supported on the upper reach for movement thereon along with the endless member, and means on each of said leg portions for supporting a substrate to be coated.
Claim 9
Dependent Claim
36 words
A device according to claim 5 wherein said conveyor frame comprises a U-shaped member having upright leg portions, said conveyor rollers having shafts journaled in respective upright leg portions and being disposed between said leg portions.
Claim 10
Dependent Claim
24 words
A device according to claim 6 including a drive pulley engaged with said endless member and located below one end of said U-shaped frame.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-01-21 | 1977-07-23 | 1978-01-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-01-21 | 1981-07-23 | 1982-01-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-01-21 | 1985-07-23 | 1986-01-22 | $7700.00 | Window Closed / Lapsed |