US3288700A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering apparatus including a folded flexible conveyor
Assignee: Nortel Networks Ltd
•
Filing: 1963-10-23
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Granted: 1966-11-29
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Expires: 1983-10-23
Abstract
No abstract record available.
Inventors
- 👤 Needham James Garland
- 👤 Davies Neville Cary
- 👤 Ranshaw James Hallam
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 08:56
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/56
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
50 words
IN A SPUTTERING APPARATUS FOR THE PRODUCTION OF THIN FILMS ON FLAT SUBSTRATES THE IMPROVEMENT COMPRISING THE COMBINATION OF A VERTICAL SPUTTERING CATHODE, A VERTICAL SPUTTERING ANODE POSITIONED IN JUXTAPOSED RELATIONSHIP WITH SAID CATHODE AND PROVIDED WITH AN APERTURE THROUGH WHICH SAID SUBSTRATES MAY BE COATED, AND A FOLDED FLEXI-
Claim 2
Dependent Claim
50 words
IN A SPUTTERING APPARATUS FOR THE PRODUCTION OF THIN FILMS ON FLAT SUBSTRATES THE IMPROVEMENT COMPRISING THE COMBINATION OF A VERTICAL SPUTTERING CATHODE, A VERTICAL SPUTTERING ANODE POSITIONED IN JUXTAPOSED RELATIONSHIP WITH SAID CATHODE AND PROVIDED WITH AN APERTURE THROUGH WHICH SAID SUBSTRATES MAY BE COATED, AND A FOLDED FLEXI-
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-11-28 | 1970-05-30 | 1970-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-11-28 | 1974-05-30 | 1974-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-11-28 | 1978-05-30 | 1978-11-29 | $7700.00 | Window Closed / Lapsed |