Patent US3785717A successfully refreshed from Google Patents.
US3785717A
Expired / Lapsed
US
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Stepped integrated waveguide structure with directional coupling and a method of manufacturing such structures
Assignee: Thales SA
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Filing: 1972-08-10
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Granted: 1974-01-15
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Expires: 1992-08-10
Abstract
Abstract A multilayer structure of integrated optical waveguides is provided. Each waveguide is produced by the diffusion of a doping agent into the layer into which it is integrated. This doping agent, in the zone in which it is implanted, causes a variation in the refractive index. The result is that the waveguide is formed by a region of higher refractive index than that of the layer in which it is implanted. Thus, superimposed waveguide structures are obtained which can be used to form directional couplers.
Inventors
- 👤 M Croset
- 👤 G Velasco
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 12:29
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/12002
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
108 words
An integrated waveguide structure, made of a plurality of superimposed plane layers of respective constant thicknesses, for super high frequency electromagnetic waves, comprising in combination, in said layers respectively:waveguides capable of transmitting said waves, made of a first substance having a first refractive index, a medium of a second substance having a second refractive index, lower than the first, surrounding said waveguides, said first and said second substance, comprising a basic chemical material, and at least one of them being a solid solution of another chemical material the amount of said other material in said solid solution respectively having different values in said first and said second substances.
Claim 2
Dependent Claim
108 words
An integrated waveguide structure, made of a plurality of superimposed plane layers of respective constant thicknesses, for super high frequency electromagnetic waves, comprising in combination, in said layers respectively:waveguides capable of transmitting said waves, made of a first substance having a first refractive index, a medium of a second substance having a second refractive index, lower than the first, surrounding said waveguides, said first and said second substance, comprising a basic chemical material, and at least one of them being a solid solution of another chemical material the amount of said other material in said solid solution respectively having different values in said first and said second substances.
Claim 3
Dependent Claim
27 words
A structure as claimed in claim 1, wherein said medium is a wafer having two parallel faces, said guides having respectively two walls parallel to said faces.
Claim 4
Dependent Claim
58 words
A structure as claimed in claim 2, wherein said basic chemical material is a mixture of several chemical elements in proportion close to the stoichiometric, for a well defined chemical compound, said other chemical material comprising at least one of the chemical elements contained in said basic material, making it possible to obtain said well defined chemical compound.
Claim 5
Dependent Claim
32 words
A structure as claimed in claim 3, wherein said well defined chemical compound is amorphous tantalum pentoxide Ta2O5, said basic chemical material, amorphous tantalum suboxide Ta2O5(1 x) said other chemical material oxygen.
Claim 6
Dependent Claim
32 words
A structure as claimed in claim 3, wherein said well defined chemical compound is amorphous zirconium dioxide ZrO2, said basic material amorphous zirconium suboxide ZrO2 (1 y), and said other material oxygen.
Claim 7
Dependent Claim
44 words
A method for manufacturing a structure as claimed in claim 1, wherein said other material is locally diffused through masks having predetermined patterns, in said medium, said masks protecting the remaining medium from diffusion, the depth of diffusion determining the thickness of said guides.
Claim 8
Dependent Claim
27 words
A method as claimed in claim 6, wherein said diffusion decreases the refraction index of said medium, said guides extending in the regions protected by said masks.
Claim 9
Dependent Claim
62 words
A method as claimed in claim 6, comprising in succession and in repetition the following steps : deposition upon a substrate of an uniform layer of said first substance ; deposition of a mask pattern upon said layer ; diffusion through said mask pattern of said other chemical material, for forming inside said medium said second substance; removal of said mask pattern.
Claim 10
Dependent Claim
103 words
A method for manufacturing the structure as claimed in claim 1, comprising in repetition and in succession the followinG steps : deposition upon a substrate by simultaneous condensation, in a predetermined proportions of a plurality of elements capable of forming a well defined chemical compound for forming in a stoichiometric proportion, an uniform layer of said substance upon a substrate ; deposition upon said layer of mask according a predetermined pattern ; deposition by condensation of at least one of said elements in the unmasked portion, for modifying the proportion of said elements, thus forming said second substance ; removing said mask pattern.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-01-14 | 1977-07-16 | 1978-01-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-01-14 | 1981-07-16 | 1982-01-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-01-14 | 1985-07-16 | 1986-01-15 | $7700.00 | Window Closed / Lapsed |