Patent US3783009A successfully refreshed from Google Patents.
US3783009A
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US
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Method for improving perfection of epitaxially grown germanium films
Assignee: Airco Inc
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Filing: 1971-02-22
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Granted: 1974-01-01
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Expires: 1991-02-22
Abstract
Abstract A METHOD FOR IMPROVING THE CRYSTALLINE PERFECTION OF EPITAXIAL FILMS OF GERMANIUM IS SET FORTH, WHICH IS PARTICULARLY APPLICABLE TO FORMING A DEVICE-QUALITY LAYER ON A FOEIGN SUBSTRATE. IN THIS LATTER ENVIRONMENT, THE PROCESS IS CARRIED OUT BY VAPOR DEPOSITING ON THE FOREIGN SUBSTRATE A GERMANIUM SINGLE CRYSTAL BASE FILM AT TEMPERATURES IN THE RANGE OF 800*C. TO 825*C., EPITAXIALLY VAPOR DEPOSITING A BUFFER GERMANIUM LAYER ON SAID BASE FILM AT TEMPERATURES IN THE RANGE 340*C TO 360*., AND THEREAFTER EPITAXIALY DEPOSITING A LAYER OF GERMANIUM AT A HIGHER TEMPERATURE RANGE OF 700*C. AND ABOVE.
Inventors
- 👤 R Tramposch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 16:30
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2921; H10P14/32; H10P14/3202; H10P14/3204; H10P14/3211; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/006; Y10S148/007; Y10S148/025; Y10S148/049; Y10S148/052; Y10S148/072; Y10S148/15; Y10S428/00; Y10S428/922; Y10S428/9335; Y10S428/938; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528; Y10T428/12535; Y10T428/12611; Y10T428/12674
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-12-31 | 1977-07-02 | 1978-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-12-31 | 1981-07-02 | 1982-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-12-31 | 1985-07-02 | 1986-01-01 | $7700.00 | Window Closed / Lapsed |