Patent US3782940A successfully refreshed from Google Patents.
US3782940A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ion-etching method
Assignee: Shin-Etsu Chemical Co Ltd
•
Filing: 1972-09-18
•
Granted: 1974-01-01
•
Expires: 1992-09-18
Abstract
Abstract A PHOTOPOLYMERIZABLE COMPOSITION COMPRISING 100 PARTS BY WEIGHT OF PHOTOPROPYLTRICHLORSILANE AND SILOXANE MADE FROM Y-ACRYLOXYPROPYLTRICHLORSILANE AND DIHYDROXYDIMETHYLPOLYSILOXANE, 4 PARTS BY WEIGHT OF 4,4''BIS(DIMETHYLAMINO)BENZOPHENON, AND 1,000 PARTS BY WEIGHT OF A SOLVENT IS APPLIED OVER A BASE PLATE, AND THEREON A POSITIVE PATTERN IS LAID. FROM ABOVE THE POSITIVE PATTERN A LIGHT IS SUPPLIED TO CARRY OUT DEVELOPING AND FIXING TREATMENTS AND SUBSEQUENTLY ION-ETCHONG TO FINALLY OBTAIN ETCHED PRODUCTS HAVING FINE PATTERNS WITH LITTLE SIDE-ETCHING PHENOMENON.
Inventors
- 👤 M Ohto
- 👤 A Noshiro
- 👤 T Mayuzumi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 09:46
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0757
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-12-31 | 1977-07-02 | 1978-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-12-31 | 1981-07-02 | 1982-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-12-31 | 1985-07-02 | 1986-01-01 | $7700.00 | Window Closed / Lapsed |