US3779841A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fabrication of thin film resistor crossovers for integrated circuits
Assignee: Harris Corp
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Filing: 1972-07-21
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Granted: 1973-12-18
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Expires: 1992-07-21
Abstract
Abstract Thin film resistors with metal connector crossovers are fabricated on smooth nonconducting materials. The thin film resistor crossover regions are delineated by a photo-resist emulsion. After deposition of an insulator, the photo-resist material is chemically removed, leaving insulating material only in the crossover regions. Metal connectors and interconnectors are applied and delineated to the resistor and over the insulator respectively.
Inventors
- 👤 T Sanders
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 16:57
CPC Classifications
H; H01; H01C; H01C13/00; H01C13/02; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
27 words
A method as in claim 1 wherein the step of removing said insulating material is accomplished by chemically removing said photoresist emulsion and the overlying insulating material.
Claim 2
Dependent Claim
29 words
A method as in claim 1 wherein said insulating material is silicone dioxide deposited to a thickness of a few thousand angstroms, and said layer of metal is aluminum.
Claim 3
Dependent Claim
39 words
A method as in claim 1 wherein the step of exposing and developing said emulsion delineates a crossover which covers all of said thin film resistor except the ends where contact is to be made with said metal connectors.
Claim 4
Dependent Claim
33 words
A method as in claim 1 wherein the step of depositing an insulating material is carried out at a temperature below 200* C. so that the photoresist emulsion is not appreciably disturbed chemically.
Claim 5
Dependent Claim
24 words
A method as in claim 5 wherein the step of depositing an insulating material is carried out at a temperature of below 100* C.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-12-17 | 1977-06-18 | 1977-12-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-12-17 | 1981-06-18 | 1981-12-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-12-17 | 1985-06-18 | 1985-12-18 | $7700.00 | Window Closed / Lapsed |