US3700510A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Masking techniques for use in fabricating microelectronic components
Assignee: Raytheon Co
•
Filing: 1970-03-09
•
Granted: 1972-10-24
•
Expires: 1990-03-09
Abstract
Abstract A FILM WITH TAPERED OPENINGS OF SELECTED SIZE AND SHAPE IS FORMED ON A SUBSTRATE SURFACE BY THE PROGRESSIVE GROWTH OF THE FILM ABOUT THE BASE OF A MUSHROOM-SHAPED MASK. THE MASK IS FORMED ON, AND THEREBY MASKS, SELECTED SURFACE AREAS. THE FILM IS THEN DEPOSITED ON THE SURFACE AND THE MASKS BY SPUTTERING TO FORM THE TAPERED OPENINGS SIMULTANEOUSLY IN THE FILM ABOUT THE BASE OF THE MASK. THESE OPENINGS CAN LATER BE USED TO ADVANTAGE, PARTICULARLY FOR GAINING ACCESS TO ANY OF THE SELECTED SURFACE AREAS BENEATH THE FILM BY ETCHING AND FLOATING AWAY THE MUSHROOM MASK FROM THE FORMED OPENINGS.
Inventors
- 👤 Carl E Keene
- 👤 Ruth D Bradley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 11:19
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/60; H10W70/611; H10W70/62; H10W70/66
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-10-24 | 1976-04-24 | 1976-10-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-10-24 | 1980-04-24 | 1980-10-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-10-24 | 1984-04-24 | 1984-10-24 | $7700.00 | Window Closed / Lapsed |