Patent US3778131A successfully refreshed from Google Patents.
US3778131A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for microscopically inspecting opposite sides of objects
Assignee: AT&T Inc
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Filing: 1972-05-18
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Granted: 1973-12-11
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Expires: 1992-05-18
Abstract
Abstract Microscopic inspection of objects such as beam-lead integrated circuits is accomplished by positioning the objects mounted on platforms in a spaced relationship under a vacuum pickup needle located in the field of view of the microscope. Rapid and accurate positioning is aided by air bearing facilities. One of the platforms includes a transparent disc for supporting the bottom sides of the objects. The disc is parallel to and spaced from a mirror which reflects an image of the bottom sides to the microscope. The microscope is first raised to its upper position along its principal axis and focused on the top sides of the objects so that the mirror image of the bottom sides is out of focus and not visible. The top sides are then individually inspected. Next, the microscope is moved to its lower position along its axis and then focused on the mirror image of the bottom sides of the objects so that the top sides are out of focus. Preferably, the magnification of the microscope while in its lower position is increased to provide a larger image of the bottom sides to thereby facilitate their inspection. The increasing of the magnification also decreases the depth of field of the microscope so that an image of the top sides is far out of focus and therefore not visible. This improves the clarity of the image of the bottom sides to further facilitate their inspection. The bottom sides are then individually inspected. During the inspection the objects are separated in accordance with certain characteristics with the aid of a vacuum pickup needle. The movement of the needle is limited by a ball plunger to prevent damage to the objects.
Inventors
- 👤 W Wanesky
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 09:24
CPC Classifications
G; G02; G02B; G02B21/00; G02B21/0004; G02B21/0016; G02B21/24; G02B21/241
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
327 words
Apparatus for inspecting the top and bottom surfaces of a plurality of objects which comprises: a microscope having a fixed principal axis and mounted for movement along such axis to an upper and a lower position; first means for supporting the objects and positioning them within the field of view of the microscope; transparent means for supporting the objects in a predetermined spaced relationship on the top surface of such transparent means; second means, laterally spaced from the first means, for supporting the transparent means and the objects thereon and positioning the objects in the field of view of the microscope; mirror means for reflecting an image of each bottom surface of the objects to the microscope, said mirror means being mounted on the second supporting means and being spaced from the transparent means; means for moving the microscope without tilting it along its fixed axis to (a) its upper position for focusing the microscope on the top surfaces of the objects to produce images thereof in the microscope and (b) its lower position for focusing the microscope on the reflected images of the bottom surfaces of the objects to produce reflected images in the microscope of the bottom surfaces, whereby the top and bottom surfaces of the objects are inspected for a first and a second characteristic with the microscope without turning the objects; and means movably mounted between the microscope and the first and second supporting and positioning means for (a) picking up the objects with the first characteristic, from the first supporting and positioning means and depositing them on the second supporting and positioning means, leaving objects having the second characteristic on the first supporting and positioning means and (b) picking up the objects having the second characteristic, from the second supporting and positioning means, leaving the objects having the first characteristic on the second supporting and posiTioning means and redepositing the objects having the second characteristic on the first supporting and positioning means.
Claim 2
Dependent Claim
327 words
Apparatus for inspecting the top and bottom surfaces of a plurality of objects which comprises: a microscope having a fixed principal axis and mounted for movement along such axis to an upper and a lower position; first means for supporting the objects and positioning them within the field of view of the microscope; transparent means for supporting the objects in a predetermined spaced relationship on the top surface of such transparent means; second means, laterally spaced from the first means, for supporting the transparent means and the objects thereon and positioning the objects in the field of view of the microscope; mirror means for reflecting an image of each bottom surface of the objects to the microscope, said mirror means being mounted on the second supporting means and being spaced from the transparent means; means for moving the microscope without tilting it along its fixed axis to (a) its upper position for focusing the microscope on the top surfaces of the objects to produce images thereof in the microscope and (b) its lower position for focusing the microscope on the reflected images of the bottom surfaces of the objects to produce reflected images in the microscope of the bottom surfaces, whereby the top and bottom surfaces of the objects are inspected for a first and a second characteristic with the microscope without turning the objects; and means movably mounted between the microscope and the first and second supporting and positioning means for (a) picking up the objects with the first characteristic, from the first supporting and positioning means and depositing them on the second supporting and positioning means, leaving objects having the second characteristic on the first supporting and positioning means and (b) picking up the objects having the second characteristic, from the second supporting and positioning means, leaving the objects having the first characteristic on the second supporting and posiTioning means and redepositing the objects having the second characteristic on the first supporting and positioning means.
Claim 3
Dependent Claim
25 words
Apparatus as recited in claim 1, further comprising: means for increasing the brightness and clarity of the image of the bottom surface of the object.
Claim 4
Dependent Claim
32 words
Apparatus as recited in claim 1, further comprising: means for decreasing the magnification of the microscope in its upper position and for increasing the magnification of such microscope in its lower position.
Claim 5
Dependent Claim
443 words
Apparatus for inspecting the top and bottom surfaces of a plurality of objects having beams extending from the bottom surfaces thereof and for separating them in accordance with a first and a second characteristic, which comprises: a microscope having a fixed principal axis and mounted for movement along such axis to an upper and a lower position; means for increasing the magnification of the microscope; first means for supporting the objects and positioning them within the field of view of the microscope and perpendicular to its principal axis; transparent means for supporting the objects in a predetermined spaced relationship with their beams resting on the top surface of such transparent means; second means, laterally spaced from the first means, for supporting the transparent means and the objects thereon and positioning the objects in the field of view of the microscope and perpendicular to its principal axis; mirror means for reflecting an image of each bottom surface of the objects to the microscope, said mirror means being mounted on the second supporting means and being spaced from the transparent means; means for moving the microscope without tilting it along its fixed axis to (a) its upper position for focusing the microscope on the top surfaces of the objects to produce images thereof in the microscope and (b) its lower position for focusing the microscope through the spaces between the objects and between their beams on the reflected images of the bottom surfaces of the objects after the magnification increasing means has been rendered effective to produce reflected images in the microscope of the bottom surfaces that are larger than those of the top surfaces, whereby the top and bottom surfaces of the objects are inspected for the first and the second characteristic with the microscope without turning the objects; means movably mounted between the microscope and the first and second supporting and positioning means for (a) picking up the objects, the top surfaces of which have the first characteristic, from the first supporting and positioning means and depositing them on the second supporting and positioning means, leaving objects, the top surfaces of which have the second characteristic on the first supporting and positioning means and (b) picking up the objects, the bottom surfaces of which have the second characteristic, from the second supporting and positioning means, leaving the objects, the top and bottom surfaces of which have the first characteristic on the second supporting and positioning means and redepositing the objects, the bottom surfaces of which have the second characteristic, on the first supporting and positioning means; and a glare preventative substance coated on the picking up and depositing means to render it unobtrusive.
Claim 6
Dependent Claim
443 words
Apparatus for inspecting the top and bottom surfaces of a plurality of objects having beams extending from the bottom surfaces thereof and for separating them in accordance with a first and a second characteristic, which comprises: a microscope having a fixed principal axis and mounted for movement along such axis to an upper and a lower position; means for increasing the magnification of the microscope; first means for supporting the objects and positioning them within the field of view of the microscope and perpendicular to its principal axis; transparent means for supporting the objects in a predetermined spaced relationship with their beams resting on the top surface of such transparent means; second means, laterally spaced from the first means, for supporting the transparent means and the objects thereon and positioning the objects in the field of view of the microscope and perpendicular to its principal axis; mirror means for reflecting an image of each bottom surface of the objects to the microscope, said mirror means being mounted on the second supporting means and being spaced from the transparent means; means for moving the microscope without tilting it along its fixed axis to (a) its upper position for focusing the microscope on the top surfaces of the objects to produce images thereof in the microscope and (b) its lower position for focusing the microscope through the spaces between the objects and between their beams on the reflected images of the bottom surfaces of the objects after the magnification increasing means has been rendered effective to produce reflected images in the microscope of the bottom surfaces that are larger than those of the top surfaces, whereby the top and bottom surfaces of the objects are inspected for the first and the second characteristic with the microscope without turning the objects; means movably mounted between the microscope and the first and second supporting and positioning means for (a) picking up the objects, the top surfaces of which have the first characteristic, from the first supporting and positioning means and depositing them on the second supporting and positioning means, leaving objects, the top surfaces of which have the second characteristic on the first supporting and positioning means and (b) picking up the objects, the bottom surfaces of which have the second characteristic, from the second supporting and positioning means, leaving the objects, the top and bottom surfaces of which have the first characteristic on the second supporting and positioning means and redepositing the objects, the bottom surfaces of which have the second characteristic, on the first supporting and positioning means; and a glare preventative substance coated on the picking up and depositing means to render it unobtrusive.
References Cited (Backward Citations)
FR1304134A
Cited
DE1210584B
Cited
US3357091A
Cited
US3388848A
Cited
US3458102A
Cited
US3633991A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-12-10 | 1977-06-11 | 1977-12-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-12-10 | 1981-06-11 | 1981-12-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-12-10 | 1985-06-11 | 1985-12-11 | $7700.00 | Window Closed / Lapsed |