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US3777703A Expired / Lapsed US ⏱️ 0.0 years remaining

Apparatus for supporting and rotating a workpiece

Assignee: AT&T Inc
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Filing: 1972-06-02
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Granted: 1973-12-11
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Expires: 1992-06-02
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Abstract

Abstract A workpiece or substrate holder is rotatably supported on a revolving frame within a film deposition or coating chamber. A pair of pins are secured to the holder, symmetrically with respect to the axis of rotation of the holder, and are received within a channel formed on one side by an arcuate guide ring, having a sector thereof formed in an arcuate trackway, the radius of the trackway being less than the radius of the guide ring. Rotation of the frame advances the pins along the guide ring, and the trackway is so configured that only the leading pin enters it. As the leading pin progresses through the trackway, the lagging pin is swung out of the channel, around the leading pin in the trackway, and back into the channel as the leading pin, to rotate the workpiece holder to allow for the deposition of a film on both sides of the workpiece.

Inventors

  • 👤 R Gillie

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 14:06
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/50; C23C14/505

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 172 words
In an apparatus for advancing and turning over a substantially planar workpiece: a rotatable holder means, for supporting the workpiece in a plane parallel to its axis of rotation; means for advancing the holder means with its axis of rotation in an arc to move the workpiece in a path substantially tangent to the arc of the axis; means positioned in the path of the holder means for rotating the holder means about its axis to a first position aslant of the tangent of the arc; a stop means, for momentarily arresting movement of a portion of the holder means, to further rotate the holder means about its axis into a second position aslant of the tangent of the arc, and for then releasing the portion of the holder means upon continued advancement of the holder means, and means for returning the released holder means into the original position with the workpiece turned over and advancing in a path substantially tangent to the arc of the advancing holder means axis of rotation.
Claim 2
Dependent Claim 172 words
In an apparatus for advancing and turning over a substantially planar workpiece: a rotatable holder means, for supporting the workpiece in a plane parallel to its axis of rotation; means for advancing the holder means with its axis of rotation in an arc to move the workpiece in a path substantially tangent to the arc of the axis; means positioned in the path of the holder means for rotating the holder means about its axis to a first position aslant of the tangent of the arc; a stop means, for momentarily arresting movement of a portion of the holder means, to further rotate the holder means about its axis into a second position aslant of the tangent of the arc, and for then releasing the portion of the holder means upon continued advancement of the holder means, and means for returning the released holder means into the original position with the workpiece turned over and advancing in a path substantially tangent to the arc of the advancing holder means axis of rotation.
Claim 3
Dependent Claim 103 words
An apparatus as recited in claim 1, wherein the means for advancing the holder means, with its axis of rotation in an arc, comprises: a pivot arm, secured at its midsection to the axis of rotation of the holder means, and having a leading and a trailing end; means for rotating the holder means about a center, and guide means, for guiding the leading and trailing ends of the pivot arm, to guide the advancing holder means with its axis of rotation in an arc and with the workpiece moving in a path substantially tangent to the arc of the axis of rotation.
Claim 4
Dependent Claim 123 words
In apparatus for turning an article over, a frame, mounted for rotation, for holding the article; a guide ring having a gap sector; a pivot arm having its midsection secured to the frame; a pair of guide rollers individually mounted on the ends of the arm; means for advancing the frame with the guide rollers within the gap sector and bearing against the inner surface of the guide ring; a trackway spanning the gap sector for receiving the leading guide roller and for rotating the arm and holder, and means for engaging the leading roller to further rotate the arm and frame to move the trailing roller into position to first engage the ring while the leading roller is movinG from the trackway.
Claim 5
Dependent Claim 123 words
In apparatus for turning an article over, a frame, mounted for rotation, for holding the article; a guide ring having a gap sector; a pivot arm having its midsection secured to the frame; a pair of guide rollers individually mounted on the ends of the arm; means for advancing the frame with the guide rollers within the gap sector and bearing against the inner surface of the guide ring; a trackway spanning the gap sector for receiving the leading guide roller and for rotating the arm and holder, and means for engaging the leading roller to further rotate the arm and frame to move the trailing roller into position to first engage the ring while the leading roller is movinG from the trackway.
Claim 6
Dependent Claim 46 words
Apparatus as recited in claim 3, wherein the engaging means comprises: a stop, positioned within the trackway, for momentarily resisting movement of the leading roller, to further rotate the arm and frame, and for then releasing the roller as it continues to move through the trackway.
Claim 7
Dependent Claim 236 words
In a turnover apparatus: a carrier means having a pivot axis and a pair of follower members spaced along a line passing through the pivot axis and on opposite sides of the pivot axis; a first arcuate guide rail having a first radius of curvature; means for advancing the carrier means with both the follower members bearing against the guide rail to move the carrier means in an arcuate path; a second arcuate guide rail, having a radius of curvature less than the first radius of curvature, for engaging the leading follower member as it advances along the first guide rail and for rotating the carrier means about the pivot axis into a first aslant position; a straight guide rail section contiguous with the end of the second arcuate guide rail; a yieldable stop, positioned for engaging the leading follower member, to further rotate the carrier means into a second aslant position and for urging the leading follower member against the straight guide rail, whereupon further advancing of the carrier means moves the leading follower member past the yieldable stop, and a third arcuate guide rail, having a radius of curvature less than the radius of curvature of the first guide rail and contiguous with the end of the straight guide rail section for engaging the leading follower member to further rotate the carrier means into a position that completes the turnover of the carrier means.
Claim 8
Dependent Claim 236 words
In a turnover apparatus: a carrier means having a pivot axis and a pair of follower members spaced along a line passing through the pivot axis and on opposite sides of the pivot axis; a first arcuate guide rail having a first radius of curvature; means for advancing the carrier means with both the follower members bearing against the guide rail to move the carrier means in an arcuate path; a second arcuate guide rail, having a radius of curvature less than the first radius of curvature, for engaging the leading follower member as it advances along the first guide rail and for rotating the carrier means about the pivot axis into a first aslant position; a straight guide rail section contiguous with the end of the second arcuate guide rail; a yieldable stop, positioned for engaging the leading follower member, to further rotate the carrier means into a second aslant position and for urging the leading follower member against the straight guide rail, whereupon further advancing of the carrier means moves the leading follower member past the yieldable stop, and a third arcuate guide rail, having a radius of curvature less than the radius of curvature of the first guide rail and contiguous with the end of the straight guide rail section for engaging the leading follower member to further rotate the carrier means into a position that completes the turnover of the carrier means.
Claim 9
Dependent Claim 102 words
In a turnover apparatus as recited in claim 5, which further comprises: means for spanning the end of the third arcuate guide rail with the beginning of the first arcuate guide rail for bringing the lagging follower member to bear against the first guide rail as the carrier means is rotated into the position that completes its turnover, and for bringing the leading follower member to bear against the first guide rail, behind the other follower member, when it advances out of engagement with the third guide rail, so that the leading follower member becomes the lagging follower member, and vice versa.
Claim 10
Dependent Claim 35 words
In a turnover apparatus as recited in claim 6, wherein: the first, second, third and straight guide rails define a flat plane, and the pivot axis of the carrier means if perpendicular to the plane.
Claim 11
Dependent Claim 205 words
In an apparatus for supporting and guiding a substrate along an endless loop track within a vacuum chamber to successively position opposite surfaces of the substrate in registry with a film deposition device: a rotatable substrate holder, for supporting the substrate in a plane parallel to its axis of rotation; means for advancing the holder along the track, the holder at a point along the track positioning a first surface of the substrate in registry with the film deposition device; means positioned in the path of the holder for rotating the holder about its axis to a first aslant position with respect to the track; a stop means for momentarily arresting movement of a portion of the holder, to further rotate the holder to a second aslant position with respect to the track, and for then releasing the portion of the holder upon continued advancement of the holder, and means for returning the released holder to a position, with respect to the track, that is opposite to the position of the holder prior to rotation thereof, to position a second and opposite side of the substrate in registry with the film deposition device as the holder is again advanced to the point along the track.
Claim 12
Dependent Claim 205 words
In an apparatus for supporting and guiding a substrate along an endless loop track within a vacuum chamber to successively position opposite surfaces of the substrate in registry with a film deposition device: a rotatable substrate holder, for supporting the substrate in a plane parallel to its axis of rotation; means for advancing the holder along the track, the holder at a point along the track positioning a first surface of the substrate in registry with the film deposition device; means positioned in the path of the holder for rotating the holder about its axis to a first aslant position with respect to the track; a stop means for momentarily arresting movement of a portion of the holder, to further rotate the holder to a second aslant position with respect to the track, and for then releasing the portion of the holder upon continued advancement of the holder, and means for returning the released holder to a position, with respect to the track, that is opposite to the position of the holder prior to rotation thereof, to position a second and opposite side of the substrate in registry with the film deposition device as the holder is again advanced to the point along the track.
Claim 13
Dependent Claim 122 words
In an apparatus for advancing and rotating a workpiece: a frame mounted for rotation about a first axis; means for rotating the frame about the first axis; a workpiece holder pivotally mounted about a secoNd axis on the frame; a guide ring having an inner surface centered about the first axis; a leading follower and a trailing follower secured to the workpiece holder and spaced on opposite sides of the second axis for bearing against the inner surface; a guideway running offset from the inner surface for engaging the leading follower to pivot the holder about the second axis to position the trailing follower in front of the leading follower as the followers leave the guideway and again engage the inner surface.
Claim 14
Dependent Claim 122 words
In an apparatus for advancing and rotating a workpiece: a frame mounted for rotation about a first axis; means for rotating the frame about the first axis; a workpiece holder pivotally mounted about a secoNd axis on the frame; a guide ring having an inner surface centered about the first axis; a leading follower and a trailing follower secured to the workpiece holder and spaced on opposite sides of the second axis for bearing against the inner surface; a guideway running offset from the inner surface for engaging the leading follower to pivot the holder about the second axis to position the trailing follower in front of the leading follower as the followers leave the guideway and again engage the inner surface.

References Cited (Backward Citations)

US2414406A Cited
US2665659A Cited
US2912351A Cited
US3322290A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1976-12-10 1977-06-11 1977-12-11 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1980-12-10 1981-06-11 1981-12-11 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1984-12-10 1985-06-11 1985-12-11 $7700.00 Window Closed / Lapsed

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