Process for producing sputtered films
Abstract
Abstract A PROCESS FOR PRODUCING SPUTTERED FILMS AND AN APPARATUS FOR CARRYING OUT SAID PROCESS IN WHICH SUBSTRATES ARE TRANSFERRED BETWEEN A SPUTTERING CHAMBER AND ONE OF AT LEAST TWO PRELIMINARY CHAMBERS BOTH OF WHICH SPUTTERING AND ONE PRELIMINARY CHAMBERS ARE MAINTAINED UNDER THE SAME PRESSURE AND GAS ATMOSPHERIC CONDITIONS, SAID SUBSTRATES ARE SPUTTERED FILMS THEREON WHILE THEY ARE DISPOSED IN THE SPUTTERING CHAMBER AND DURING THE TRANSFER AND SPUTTERING OF SAID SUBSTRATES THE OTHER OF SAID PRELIMINARY CHAMBERS IS CHARGED WITH A NEW SUPPLY OF SUBSTRATES TO BE SPUTTERED FILMS THEREON AND EVACUATED SO THAT THE LASTMENTIONED PRELIMINARY CHAMBER IS READY FOR A SUBSEQUENT SPUTTERING CYCLE WHEREBY SUBSTRATES ARE CONTINUOUSLY SPUTTERED.
Inventors
- 👤 T Endo
Bibliographic Details
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-12-03 | 1977-06-04 | 1977-12-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-12-03 | 1981-06-04 | 1981-12-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-12-03 | 1985-06-04 | 1985-12-04 | $7700.00 | Window Closed / Lapsed |