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US3770870A Expired / Lapsed US ⏱️ 0.0 years remaining

Turret device for positioning crucibles in ion sources

Assignee: Thales SA
•
Filing: 1972-12-22
•
Granted: 1973-11-06
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Expires: 1992-12-22
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Abstract

Abstract Turret device making it possible to successively introduce, in the ionization chamber of an ion source, crucibles containing different kinds of elements, without any need to interrupt the operation of the source. This device comprises a detachable rotatable barrel associated with cylindrical support-members 8 carrying the crucibles 1, means being provided for rotating the barrel and for translating any one of the crucibles toward the ionization chamber C. This turret device is suitable for an ion source successively producion ions of arsenic, phosphorus, aluminium, silicium, for example.

Inventors

  • 👤 J Kervizic
  • 👤 R Masic
  • 👤 R Warnecke

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 15:50
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/20

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 38 words
A turret device as claimed in claim 1, further comprising a sliding valve located between sAid ionization chamber and said vacuum tight enclosure for isolating said enclosure from said ionization chamber, thereby allowing the opening of said enclosure.
Claim 2
Dependent Claim 52 words
A turret device as claimed in claim 1, wherein said means for heating comprise: an electric furnace located within said ionization chamber and electrically coupled to a heating system including a voltage supply; said heating system being associated to a control circuit for regulating and controlling the temperature of said selected crucible.
Claim 3
Dependent Claim 45 words
A turret device as claimed in claim 3, wherein means for rotating and translating said support-members comprise a motor drive associated to said control circuit, for obtaining the suitable temperature of said selected crucible, this temperature depending from the element contained within said selected crucible.
Claim 4
Dependent Claim 69 words
A turret device as claimed in claim 1, wherein said translating means comprise a circular plate provided internally with an eccentric circular opening having its inner edge surrounding said barrel, said plate being fixed to a ball nut movable along a screwed rod disposed parallel to the rotating axis of said barrel, said plate being equipped with an arm carrying pins for driving said support-members toward said ionization chamber.
Claim 5
Dependent Claim 30 words
A turret device as claimed in claim 1, wherein said means for rotating and translating said support-members within said vacuum tight enclosure include control shafts equipped with vacuum tight joints.
Claim 6
Dependent Claim 45 words
A turret device as claimed in claim 1, wherein means for rotating and translating said support-members comprise a motor drive associated to said control circuit, for obtaining the suitable temperature of said selected crucible, this temperature depending from the element contained within said selected crucible.

References Cited (Backward Citations)

US3190949A Cited
US3634591A Cited
US3629888A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1976-11-05 1977-05-07 1977-11-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1980-11-05 1981-05-07 1981-11-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1984-11-05 1985-05-07 1985-11-06 $7700.00 Window Closed / Lapsed

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