US3747562A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sliding furnace boat apparatus
Assignee: Texas Instruments Inc
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Filing: 1971-05-28
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Granted: 1973-07-24
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Expires: 1991-05-28
Abstract
Abstract An improved furnace boat has been developed for the epitaxial solution growth of III-V compounds. The boat comprises one or more closed compartments wherein the growth solution or solutions are located, in combination with a sliding substrate support member at the base of the solution compartments, such that the substrate wafer can be moved quickly and easily into contact with, or out of contact with, the growth solution. The technique permits optimum surface protection of the substrate prior to immersion, removal of the slice at any time increment of the growth and/or cooling cycle, and will ensure complete removal of gallium solution from the grown surface without damage to the surface.
Inventors
- 👤 L Stone
- 👤 R Romano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 09:59
CPC Classifications
C; C30; C30B; C30B19/00; C30B19/06; C30B19/063
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
54 words
A furnace boat structure as defined by claim 1 further including means for cleaning the surface of said substrate upon sliding said support member to displace the substrate into contact with, or out of contact with said growth solution, said cleaning means comprising a fibrous pad mounted in compression adjacent said substrate support member.
Claim 2
Dependent Claim
91 words
A furnace boat structure comprising a body member having at least one chamber therein for holding a melt, a slideable substrate support member in communication with a lower portion of said chamber, said support member having a recessed area therein for retaining a substrate, and a fibrous pad mounted on said body member in compression adjacent said substrate support member for cleaning a substrate in said recessed area, upon sliding said support member to displace the substrate in said recessed area in contact with, or out of contact with said melt.
Claim 3
Dependent Claim
27 words
A furnace boat structure as defined by claim 3 further including means for adjusting the depth of said recessed area for the accommodation of different substrate thicknesses.
Claim 4
Dependent Claim
98 words
A furnace boat structure comprising a body member having at least one chamber therein for holding a growth solution, a slideable substrate support member at the base of said chamber, said support member having a recessed area therein for retaining a substrate, means for adjusting the depth of said recessed area for the accommodation of different substrate thicknesses, and a graphite felt pad mounted in compression adjacent said substrate support member for cleaning the surface of said substrate upon sliding said support member to displace the substrate into contact with, or out of contact with said growth solution.
Claim 5
Dependent Claim
79 words
A furnace boat structure comprising a body member having at least one chamber therein for holding a melt, a slideable substrate support member in communication with a lower portion of said chamber, said support member having a recessed area therein for retaining a substrate, and a graphite felt pad loaded in compression for cleaning a substrate in said recessed area, upon sliding said support member to displace the substrate in contact with or out of contact with said melt.
References Cited (Backward Citations)
US3565702A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-23 | 1977-01-22 | 1977-07-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-23 | 1981-01-22 | 1981-07-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-23 | 1985-01-22 | 1985-07-24 | $7700.00 | Window Closed / Lapsed |