Patent US3747559A successfully refreshed from Google Patents.
US3747559A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for production of a closed tube of semiconductor material
Assignee: Siemens AG
•
Filing: 1972-05-15
•
Granted: 1973-07-24
•
Expires: 1992-05-15
Abstract
Abstract An apparatus comprised of a housing member having an inner hollow chamber, a pair of electrically conductive mounting members electrically insulated from each other and positioned within the chamber, a carbon rod member mounted on one of the mounting members and a carbon tube member mounted on the other of the mounting members concentrically about the rod member, a carbon cap member joining the rod and tube members at their upper surfaces to provide a substantially continuous smooth exterior surface for formation of a tube thereon, means for feeding a gaseous material which includes a semiconductor material into the chamber, means for withdrawing a residual gas from the chamber and means for supplying energy to the mounting means so that the exterior surfaces of the tube member and cap member are uniformly heated and a desired tube closed at one end thereof forms about such heated carbon surfaces.
Inventors
- 👤 W Dietze
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 13:07
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/01
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
164 words
An apparatus for producing tubes closed at one end thereof and composed of a semiconductor material comprising; a gas-impermeable housing member having a relatively large inner chamber; a pair of electrically conductive mounting members electrically insulated from each other and positioned within said inner chamber; an electrically conductive closed and tube carrier means having a substantially smooth continuous outer surface mounted within said inner chamber and in working relation on said mounting members; said tube carrier means including a hollow cylindrical member mounted on one of said pair of mounting members and a rod member mounted on the other of said pair of mounting members and concentrically within said hollow cylindrical member and connected to said closed end; means for feeding and withdrawing a gaseous material to and from said inner chamber; and means for supplying electrical energy to said cylindrical member and rod member via said pair of mounting members for substantially uniform heating of the outer surface of said tube carrier means.
Claim 2
Independent Claim
164 words
An apparatus for producing tubes closed at one end thereof and composed of a semiconductor material comprising; a gas-impermeable housing member having a relatively large inner chamber; a pair of electrically conductive mounting members electrically insulated from each other and positioned within said inner chamber; an electrically conductive closed and tube carrier means having a substantially smooth continuous outer surface mounted within said inner chamber and in working relation on said mounting members; said tube carrier means including a hollow cylindrical member mounted on one of said pair of mounting members and a rod member mounted on the other of said pair of mounting members and concentrically within said hollow cylindrical member and connected to said closed end; means for feeding and withdrawing a gaseous material to and from said inner chamber; and means for supplying electrical energy to said cylindrical member and rod member via said pair of mounting members for substantially uniform heating of the outer surface of said tube carrier means.
Claim 3
Dependent Claim
52 words
An apparatus as defined in claim 1 wherein the cylindrical member includes a centralized recess at an outer upper end surface portion thereof, said recess defining cylindrical inner side surface portions; and the rod member includes an outer upper end surface portion in snug contact with said cylindrical inner side surface portions.
Claim 4
Dependent Claim
64 words
An apparatus as defined in claim 1 wherein the closed end includes a cap member securely mounted onto the outer upper end surface portion of the rod member and in snug contact with cylindrical inner side surface portions of the cylinder member, said cap and rod members being relatively movable for varying the surface contact between said cylindrical member, rod member and cap member.
Claim 5
Dependent Claim
68 words
An apparatus as defined in claim 2 wherein the closed end includes a cap member having a stem portion with outer stem side surface portions and the rod member includes a centralized recess at the outer upper end surface portions thereof, said recess defining rod recess inner side surface portions, said outer stem side surface portions being in snug contact with said rod recess inner side surface portions.
Claim 6
Dependent Claim
47 words
An apparatus as defined in claim 4 wherein the outer stem side surface portions of the cap member and the rod recess inner side surface portions of the rod member are provided with matching thread means for thread securement of the cap member to the rod member.
Claim 7
Dependent Claim
47 words
An apparatus as defined in claim 4 wherein the outer stem side surface portions of the cap member and the rod recess inner side surface portions of the rod member are provided with matching machined surfaces for press-fit securement of the cap member to the rod member.
Claim 8
Dependent Claim
85 words
An apparatus as defined in claim 3 wherein the cap member includes a centralized recess at an outer lower surface portion thereof, said recess defining cap recess inner side surface portions, said cap member including outer side surface portions, said cap recess inner side surface portions being in snug contact with the outer upper end surface portions of the rod member and said outer side sur-face portions of the cap member Being in snug contact with the cylindrical inner side surfaces of the cylindrical member.
Claim 9
Dependent Claim
59 words
An apparatus as defined in claim 7 wherein the cap recess inner side surface portions, the outer upper end surface portions of the rod member, the outer side surface portions of the cap member and the cylindrical inner side surfaces of the cylindrical member are provided with matching thread means for thread securement of said members to one another.
Claim 10
Dependent Claim
59 words
An apparatus as defined in claim 7 wherein the cap recess inner side surface portions, the outer upper end surface portions of the rod member, the outer side surface portions of the cap member and the cylindrical inner side surfaces of the cylindrical member are provided with matching machined surfaces for press-fit securement of said members to one another.
Claim 11
Independent Claim
201 words
An apparatus for producing tubes closed at one end thereof and composed of a semicomductor material comprising; a gas-impermeable housing means having a relatively large inert chamber; a pair of electrically conductive mounting members electrically insulated from each other and positioned within said inner chamber; a tube carrier means having a substantially smooth continuous outer surface mounted in working relation on said mounting members; said tube carrier means comprising: a hollow cylindrical member mounted on one of said pair of mounting members, a rod member mounted on the other of said pair of mounting members and concentrically within said hollow cylindrical member out of contact therewith, and a cap member mechanically and electrically interlocking the rod member with the cylindrical member, said cap member being relatively movable for varying the surface contact between said cylindrical member, rod member and cap member, said tube carrier means being composed of a carbon material selected from the group of vitreous carbon, spectral carbon and pyrolytic graphite; means for feeding with withdrawing a gaseous material to and from said inner chamber; and means for supplying electrical energy to said tube carrier means via said pair of mounting members to uniformly heat the outer surface thereof.
Claim 12
Independent Claim
201 words
An apparatus for producing tubes closed at one end thereof and composed of a semicomductor material comprising; a gas-impermeable housing means having a relatively large inert chamber; a pair of electrically conductive mounting members electrically insulated from each other and positioned within said inner chamber; a tube carrier means having a substantially smooth continuous outer surface mounted in working relation on said mounting members; said tube carrier means comprising: a hollow cylindrical member mounted on one of said pair of mounting members, a rod member mounted on the other of said pair of mounting members and concentrically within said hollow cylindrical member out of contact therewith, and a cap member mechanically and electrically interlocking the rod member with the cylindrical member, said cap member being relatively movable for varying the surface contact between said cylindrical member, rod member and cap member, said tube carrier means being composed of a carbon material selected from the group of vitreous carbon, spectral carbon and pyrolytic graphite; means for feeding with withdrawing a gaseous material to and from said inner chamber; and means for supplying electrical energy to said tube carrier means via said pair of mounting members to uniformly heat the outer surface thereof.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-23 | 1977-01-22 | 1977-07-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-23 | 1981-01-22 | 1981-07-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-23 | 1985-01-22 | 1985-07-24 | $7700.00 | Window Closed / Lapsed |