Patent US3743894A successfully refreshed from Google Patents.
US3743894A
Expired / Lapsed
US
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Electromigration resistant semiconductor contacts and the method of producing same
Assignee: Motorola Solutions Inc
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Filing: 1972-06-01
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Granted: 1973-07-03
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Expires: 1992-06-01
Abstract
Abstract A technique of reducing the susceptibility of aluminum semiconductor contacts to electromigration. Aluminum contacts containing a small percentage of copper therein are formed on a semiconductor device by evaporation techniques. Subsequently the device is heated to a temperature of greater than 400* to alloy the copper into the aluminum and quickly cooled to form copper rich precipitates between the grains of aluminum along the grain boundaries and triple points thereof for the purpose of reducing electromigration along grain boundaries.
Inventors
- 👤 E Hall
- 👤 E Philofsky
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 15:05
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/58; C23C14/06; C23C14/14; C23C14/18; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
15 words
A semiconductor device as recited in claim 1 wherein said copper rich grains include CuAl2.
Claim 2
Dependent Claim
26 words
A semiconductor device as recited in claim 2 wherein said copper rich grains are interspersed between aluminum grains along the grain boundaries and triple points thereof.
Claim 3
Dependent Claim
35 words
A semiconductor device as recited in claim 1 further including a second insulating layer formed on the surface of said device over said metal layer for reducing electromigration along the surface of said metal layer.
References Cited (Backward Citations)
US3634203A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-02 | 1977-01-01 | 1977-07-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-02 | 1981-01-01 | 1981-07-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-02 | 1985-01-01 | 1985-07-03 | $7700.00 | Window Closed / Lapsed |