Steam generator and gas insertion device

Claim 2

A steam generator adapted to expose a work object to a controlled ambient which includes steam including in combination: first hollow container means at least partially enclosing a space surrounding a work object; heater means associated with said first hollow container means for increasing the temperature of the space enclosed therein; second hollow container means included within said first container means and substantially enclosing an interior region, said second container means having a first portion, a second portion with an outlet therein which is located near the work object and an intermediate portion located between and integral with said first and second portions and having an inlet located therein; first pipe means extending into said inlet in said intermediate portion of said second container means; porous filter means fused around its periphery to said intermediate portion and located in said interior region enclosed by said second container means between said first and second portions, said porous means being adapted to be raised to a sufficiently high temperature by heat from said heater means to change liquid water passing into said interior region from said first pipe means into steam; and said second portion of said second container means being shaped to direct the flow of said steam out of said outlet and onto the work object.

Claim 3

The steam generator of claim 1 wherein said first pipe means has a first cross-sectional area and an end portion extending through said intermediate portion of said second container means and into said interior region enclosed by said second container means, said end portion of said first pipe means having a second cross-sectional area which is less than said first cross-sectional area.

Claim 4

The steam generator of claim 1 wherein said porous filter means includes a member comprised of number one type fritted quartz.

Claim 5

The steam generator of claim 1 further including blocking plate means connected to said second portion of said second container means and having a member located external to said container means and adjacent said outlet, said member extending substantially perpendicular to the steam flow to prevent liquid water passing out of said outlet from striking the work object.

Claim 6

The steam generator of claim 4 wherein said member of said blocking plate means is comprised of a quartz plate which is mechanically connected to said second container means.

Claim 7

The steam generator of claim 1 further including second pipe means which extends through a second opening in said second container means and which is adapted to inject gases into said interior region thereof.

Claim 8

The steam generator of claim 6 further including: water supply means having an outlet; first electrically controlled valve means having an inlet connected to said water supply means, an outlet and a control terminal, said outlet of said first valve meanS being connected to said first pipe means; gas supply means having an outlet; second electrically controlled valve means having an inlet connected to said gas supply means, an outlet and a control terminal, said outlet of said second valve means being connected to said second pipe means; and electric control circuit means including timing circuits having at least one output terminal which is connected to said control terminals of said first and second electrically controlled valve means, said control circuit means selectively supplying control signals to said first and second electrically controlled valve means for controlling the flow of water through said first pipe means and the flow of gas through said second pipe means into said second container.

Claim 9

A steam generator and gas mixing device located in a heating chamber of a semiconductor diffusion furnace and which utilizes heat from the furnace to convert water into steam which it mixes with a selected gas to facilitate the thermal growth of oxides on a semiconductor work product also included in the chamber, such device including in combination: container means having an elongated, cylindrical body which is closed by first and second curved end members, said first and second end members being integrally affixed to said cylindrical body, said first end member having an aperture therein, said second end member having an aperture therein and said cylindrical body having an aperture located about half way between said apertures in said first and second end members; first pipe means extending from a gas supply through said aperture in said first end member, said first end member being sealed around said first pipe means; second pipe means extending from a water supply and through said aperture in said cylindrical body, said cylindrical body being sealed around said second pipe means; filter means selectively located between ends of said first and second pipe means and the aperture in said second end member, said filter means being connected to the inside of said cylindrical body and being adapted to pass gas from said gas source and to be raised to a sufficient temperature to heat water from said water source to provide steam, said filter means facilitating the mixing of said steam with said gas; and nozzle means connected with said second end member and aligned with said aperture therein for directing said steam and gas mixture onto the work product.

Claim 10

A steam generator and gas mixing device located in a heating chamber of a semiconductor diffusion furnace and which utilizes heat from the furnace to convert water into steam which it mixes with a selected gas to facilitate the thermal growth of oxides on a semiconductor work product also included in the chamber, such device including in combination: container means having an elongated, cylindrical body which is closed by first and second curved end members, said first and second end members being integrally affixed to said cylindrical body, said first end member having an aperture therein, said second end member having an aperture therein and said cylindrical body having an aperture located about half way between said apertures in said first and second end members; first pipe means extending from a gas supply through said aperture in said first end member, said first end member being sealed around said first pipe means; second pipe means extending from a water supply and through said aperture in said cylindrical body, said cylindrical body being sealed around said second pipe means; filter means selectively located between ends of said first and second pipe means and the aperture in said second end member, said filter means being connected to the inside of said cylindrical body and being adapted to pass gas from said gas source and to be raised to a sufficient temperature to heat water from said water source to provide steam, said filter means facilitating the mixing of said steam with said gas; and nozzle means connected with said second end member and aligned with said aperture therein for directing said steam and gas mixture onto the work product.

Claim 11

The steam generator and gas mixing device of claim 8 wherein said second pipe means has a first cross-sectional area and an end portion extending through said cylindrical body portion and into the interior region of said container, said end portion of said second pipe means having a second cross-sectional area which is less than said first cross-sectional area.