Patent US3740835A successfully refreshed from Google Patents.
US3740835A
Expired / Lapsed
US
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Method of forming semiconductor device contacts
Assignee: Fairchild Semiconductor Corp
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Filing: 1970-08-31
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Granted: 1973-06-26
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Expires: 1990-08-31
Abstract
Abstract A semiconductor device contact is made by depositing a layer of semiconductor material in the contact opening of an insulating mask, metallizing, and heating to bond the metal to the layer of deposited semiconductor material and to the original device surface for permitting greater ease of contacting shallow junctions.
Inventors
- 👤 D Duncan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 12:45
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0112; H10P; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/02; Y10S148/026; Y10S148/122
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
50 words
The method of claim 1 wherein the oxide protective layer comprises silicon oxide; the first layer comprises nonepitaxial silicon at least 200 angstroms thick; the second layer comprises aluminum deposited by evaporation; and the heating step is performed in a temperature range of about 300* C to about 565* C.
Claim 2
Dependent Claim
58 words
The method of claim 2 wherein the step of depositing the first layer is performed by evaporating silicon with the device temperature less than 800* C, the step continuing until the first layer is at least 300 angstroms thick; and the step of depositing the second layer continuing until the second layer is at least 100 angstroms thick.
Claim 3
Dependent Claim
18 words
the method of claim 1 wherein the first layer has a substantially higher resistivity than the first region.
Claim 4
Dependent Claim
13 words
The method of claim 1 wherein the first layer is doped with impurities.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-06-25 | 1976-12-25 | 1977-06-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-06-25 | 1980-12-25 | 1981-06-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-06-25 | 1984-12-25 | 1985-06-26 | $7700.00 | Window Closed / Lapsed |