US3735965A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Furnace carrier and handling system
Assignee: Schoger & Associates Inc Santa
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Filing: 1972-02-29
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Granted: 1973-05-29
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Expires: 1992-02-29
Abstract
Abstract In an impurity treatment chamber, such as a gas diffusion furnace or the like, of a type having means for passing gases into and out of a chamber for treating semiconductor elements disposed therein, a carrier is movable longitudinally thereof and adapted to support semiconductor elements within the chamber. An elongated screw mounted for rotation within the chamber adjacent to the bottom thereof cooperates with a follower portion formed on the carrier for engaging the threads of the screw for positive movement of the carrier in response to rotation of the screw. Motive means rotate the screw so as to positively drive the carrier between advanced and retracted positions within the chamber and to oscillate the carrier within the chamber over a short distance so as to preclude adhesion or sticking of the parts of the system which would otherwise make difficult the withdrawal of the carrier from the chamber.
Inventors
- 👤 J A Way
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 22:45
CPC Classifications
C; C30; C30B; C30B31/00; C30B31/06; C30B31/10; C30B31/103
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
131 words
In a treatment furnace for preparing semiconductor elements in exposure to gases and having an elongated chamber carried by the furnace to receive said elements via one end thereof, said one end protruding from a wall of the furnace, means for passing gases into and out of said chamber for treatment of said elements, means forming a carrier to support a number of said elements therefrom for movement in said chamber, an elongated screw mounted for rotation within, and adjacent to the bottom of, said chamber, means formed on said carrier for engaging the threads of said screw for positive movement of said carrier in response to rotation of said screw, and motive means for rotating said screw to positively drive said carrier between advanced and retracted positions within said chamber.
Claim 2
Dependent Claim
131 words
In a treatment furnace for preparing semiconductor elements in exposure to gases and having an elongated chamber carried by the furnace to receive said elements via one end thereof, said one end protruding from a wall of the furnace, means for passing gases into and out of said chamber for treatment of said elements, means forming a carrier to support a number of said elements therefrom for movement in said chamber, an elongated screw mounted for rotation within, and adjacent to the bottom of, said chamber, means formed on said carrier for engaging the threads of said screw for positive movement of said carrier in response to rotation of said screw, and motive means for rotating said screw to positively drive said carrier between advanced and retracted positions within said chamber.
Claim 3
Dependent Claim
92 words
In a treatment furnace having an elongated chamber for preparing semiconductor elements, a carrier within the chamber for supporting said elements for treatment, an elongated screw mounted for rotation within said chamber, means disposed at each end of said carrier for engaging said screw in positive driving relation to advance and retract said carrier in response to rotation of said screw, means for passing gas into and out of said chamber for treatment of said elements, and means for rotating said screw in each of two opposite directions to drive said carrier.
Claim 4
Dependent Claim
92 words
In a treatment furnace having an elongated chamber for preparing semiconductor elements, a carrier within the chamber for supporting said elements for treatment, an elongated screw mounted for rotation within said chamber, means disposed at each end of said carrier for engaging said screw in positive driving relation to advance and retract said carrier in response to rotation of said screw, means for passing gas into and out of said chamber for treatment of said elements, and means for rotating said screw in each of two opposite directions to drive said carrier.
Claim 5
Dependent Claim
50 words
In a furnace according to claim 2 wherein the last named means further includes means for oscillating the rotation of said screw to continuously cycle said carrier to move back and forth in said chamber over a relatively short distance sufficient to keep the parts of the apparatus from sticking.
Claim 6
Dependent Claim
103 words
In an impurity treatment chamber of a type having means for passing gases into and out of same, a carrier movable longitudinally thereof and adapted to support semiconductor elements in said chamber, said carrier including side portions for engaging the inner surface of said chamber and supporting said carrier in a substantially horizontal plane, element-supporting portions carried between said side portions, thread-engaging means carried from the ends of said carrier, and an elongated lead screw element disposed in said chamber and mounted for rotation in position aligned to engage said thread-engaging means to positively drive said carrier back and forth within said chamber.
Claim 7
Dependent Claim
103 words
In an impurity treatment chamber of a type having means for passing gases into and out of same, a carrier movable longitudinally thereof and adapted to support semiconductor elements in said chamber, said carrier including side portions for engaging the inner surface of said chamber and supporting said carrier in a substantially horizontal plane, element-supporting portions carried between said side portions, thread-engaging means carried from the ends of said carrier, and an elongated lead screw element disposed in said chamber and mounted for rotation in position aligned to engage said thread-engaging means to positively drive said carrier back and forth within said chamber.
Claim 8
Dependent Claim
64 words
In a chamber according to claim 4 wherein said lead screw element includes unthreaded elongated end portions at each end and a threaded portion therebetween, said threaded portion having a follower-arresting convolution at each end serving to preclude unscrewing the terminal one of said thread-engaging means thereby retaining said carrier threadedly engaged thereon at both ends of its travel along said lead screw element.
Claim 9
Dependent Claim
70 words
A carrier for supporting elements for treatment within an impurity treatment chamber, saiD carrier comprising a pair of spaced apart side portions adapted to ride upon the inner surface of the chamber, means between said side portions for supporting a number of semiconductor elements to be treated, and thread-follower means disposed from the last named means in position for engaging an elongated threaded element mounted for rotation within the chamber.
Claim 10
Dependent Claim
70 words
A carrier for supporting elements for treatment within an impurity treatment chamber, saiD carrier comprising a pair of spaced apart side portions adapted to ride upon the inner surface of the chamber, means between said side portions for supporting a number of semiconductor elements to be treated, and thread-follower means disposed from the last named means in position for engaging an elongated threaded element mounted for rotation within the chamber.
Claim 11
Dependent Claim
153 words
In a treatment furnace having an elongated chamber for preparing semiconductor elements, a carrier within the chamber for supporting said elements for treatment, an elongate drive element in said chamber, means disposed at each end of said carrier for engaging said drive element in positive driving relation to advance and retract said carrier in response to driving of said elongate element, means for passing gas into and out of said chamber for treatment of said semiconductor elements, and means for driving said drive element in each of two opposite directions to drive said carrier, the last named means further including means for oscillating the movement of said drive element to continuously cycle said carrier to move back and forth in said chamber over a relatively short distance sufficient to keep the parts of the apparatus from sticking while maintaining said carrier substantially at a predetermined station in said chamber during said oscillating movement.
Claim 12
Dependent Claim
153 words
In a treatment furnace having an elongated chamber for preparing semiconductor elements, a carrier within the chamber for supporting said elements for treatment, an elongate drive element in said chamber, means disposed at each end of said carrier for engaging said drive element in positive driving relation to advance and retract said carrier in response to driving of said elongate element, means for passing gas into and out of said chamber for treatment of said semiconductor elements, and means for driving said drive element in each of two opposite directions to drive said carrier, the last named means further including means for oscillating the movement of said drive element to continuously cycle said carrier to move back and forth in said chamber over a relatively short distance sufficient to keep the parts of the apparatus from sticking while maintaining said carrier substantially at a predetermined station in said chamber during said oscillating movement.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-05-28 | 1976-11-27 | 1977-05-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-05-28 | 1980-11-27 | 1981-05-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-05-28 | 1984-11-27 | 1985-05-29 | $7700.00 | Window Closed / Lapsed |