US3604694A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for heat treatment of silicon discs
Assignee: Siemens AG
•
Filing: 1969-09-30
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Granted: 1971-09-14
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Expires: 1989-09-30
Abstract
Abstract A device for heat treatment of silicon discs in an evacuable horizontal quartz tube. The silicon discs are arranged in stacks. A plurality of thin silicon rods arranged inside the quartz tube in mutually parallel relationship support the silicon discs.
Inventors
- 👤 Adolf Muller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 23:04
CPC Classifications
C; C30; C30B; C30B31/00; C30B31/06; C30B31/14; Y; Y10; Y10S; Y10S118/00; Y10S118/90
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
85 words
A device for heat treatment of silicon discs in an evacuable horizontal quartz tube, which comprises a quartz tube and a plurality of thin silicon rods inside said quartz tube, in mutually parallel relationship, to support the silicon discs arranged in stacks, cylindrical end pieces are provided in the quartz tube for guiding the silicon rods, and support plates, whose diameter is larger than that of the silicon discs, are arranged at least between the end pieces and the outer silicon discs of the stack.
Claim 2
Independent Claim
85 words
A device for heat treatment of silicon discs in an evacuable horizontal quartz tube, which comprises a quartz tube and a plurality of thin silicon rods inside said quartz tube, in mutually parallel relationship, to support the silicon discs arranged in stacks, cylindrical end pieces are provided in the quartz tube for guiding the silicon rods, and support plates, whose diameter is larger than that of the silicon discs, are arranged at least between the end pieces and the outer silicon discs of the stack.
Claim 3
Dependent Claim
37 words
The device of claim 1, wherein the outer diameter of the end pieces and the inner diameter of the quartz tube are such that the silicon rods can freely move, in peripheral direction of the quartz tube.
Claim 4
Dependent Claim
32 words
The device of claim 1 wherein the number and thickness of the silicon rods are such that they cover at least the lower half of the inner diameter of the quartz tube.
References Cited (Backward Citations)
US3183130A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-09-13 | 1975-03-15 | 1975-09-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-09-13 | 1979-03-15 | 1979-09-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-09-13 | 1983-03-15 | 1983-09-14 | $7700.00 | Window Closed / Lapsed |