Field termination plate

Claim 2

An end disc for minimization of electrical field fringing in a cylindrical analyzer for charged particles comprising: a. a generally annular shaped disc member constructed of an electrically insulating material; b. a high electrical resistance electrically conductive material coating a side surface of said disc member; and c. a plurality of spaced narrow width annular conductors in physical and electrical contact with said high resistance material and coaxially arranged with respect to the axis of said disc member and with respect to one another.

Claim 3

An end disc in accordance with claim 1 wherein said disc member is a flat disc.

Claim 4

An end disc in accordance with claim 1 wherein said disc is frusto-conical in shape and said coating is on the interior side face thereof.

Claim 5

An end disc in accordance with claim 1 wherein said disc is alumina and said coating has a resistance of from about 10 to about 100 megohms measured between the inner and outer edges of said disc.

Claim 6

An end disc in accordance with claim 1 wherein said annular conductors are metal.

Claim 7

An end disc in accordance with claim 5 wherein said conductors are sputtered gold-chromium.

Claim 8

A concentric tubE electron analyzer comprising: a. first and second electrically conducting tube members coaxially arranged with respect to one another, the inner of said tubes having openings around the circumference near each end thereof for passage of the electrons being analyzed into the space between the inner and outer tubes; b. annularly shaped end discs intermediate said tubes adjacent each end of said tubes, said disc being formed of an insulator material and coated on the side interior facing surface thereof with an electrically conductive high electrical resistance material, said electrically conductive material being in electrical contact at its inner and outer edges with the inner and outer tubes respectively; c. each of said end discs including a plurality of spaced narrow width annular conductors on the inner side thereof in electrical and physical contact with said high resistance coating and coaxially arranged with respect to the axis of each of said discs; d. means for applying a potential across said tubes; e. means for irradiating a sample to be analyzed with high energy radiation when the sample is positioned near the opening defined by a first end of said inner tube to thereby produce secondary electron emissions from said sample; and f. detecting means at the opposite end of said inner tube for detecting the electrons analyzed by the detector.

Claim 9

A concentric tubE electron analyzer comprising: a. first and second electrically conducting tube members coaxially arranged with respect to one another, the inner of said tubes having openings around the circumference near each end thereof for passage of the electrons being analyzed into the space between the inner and outer tubes; b. annularly shaped end discs intermediate said tubes adjacent each end of said tubes, said disc being formed of an insulator material and coated on the side interior facing surface thereof with an electrically conductive high electrical resistance material, said electrically conductive material being in electrical contact at its inner and outer edges with the inner and outer tubes respectively; c. each of said end discs including a plurality of spaced narrow width annular conductors on the inner side thereof in electrical and physical contact with said high resistance coating and coaxially arranged with respect to the axis of each of said discs; d. means for applying a potential across said tubes; e. means for irradiating a sample to be analyzed with high energy radiation when the sample is positioned near the opening defined by a first end of said inner tube to thereby produce secondary electron emissions from said sample; and f. detecting means at the opposite end of said inner tube for detecting the electrons analyzed by the detector.

Claim 10

An analyzer in accordance with claim 7 wherein said annular discs are both planar.

Claim 11

An analyzer in accordance with claim 8 wherein said coating has a resistance of from about 10 to about 100 megohms measured between the inner and outer edges of said disc.

Claim 12

An analyzer in accordance with claim 7 wherein the annular disc on said first end is of a hollow frusto-conical configuration.

Claim 13

An analyzer in accordance with claim 10 wherein said coating has a resistance of from about 10 to about 100 megohms measured between the inner and outer edges of said disc.

Claim 14

An analyzer in accordance with claim 7 wherein said high resistance coating is a cermet having a resistance of about 30 megohms measured between the inner and outer edges of said disc and said low resistance conductors are metal.

Claim 15

An analyzer in accordance with claim 12 wherein said conductors are sputtered gold-chromium.

Claim 16

An analyzer is accordance with claim 12 wherein said cermet is a sputtered deposit of alumina and nickel metal.