Patent US3730760A successfully refreshed from Google Patents.
US3730760A
Expired / Lapsed
US
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Vertical centrifugal spin coating method
Assignee: International Business Machines Corp
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Filing: 1971-11-26
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Granted: 1973-05-01
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Expires: 1991-11-26
Abstract
Abstract A METHOD OF SPIN COATING BOTH SIDES OF AN OBJECT SUCH AS A DISK SUBSTRATE BY MOUNTING THE OBJECT IN A VERTICAL POSITION, EXPOSING THE BOTH SIDES TO BE COATED, VERTICALLY ROTATING THE OBJECT ABOUT ITS OWN AXIS, AND CENTRIFUGALLY COATNG BOTH SIDES OF THE OBJECT DURING ROTATION OF THE OBJECT. VERTICAL COATING ELIMINATES SKITTERING PROBLEMS ASSOCIATED WITH HORIZONTAL SPIN COATING AND ALLOWS ACCURATE THICKNESS CONTROL.
Inventors
- 👤 A Machmiller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 22:11
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/002; B05D1/005
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-04-30 | 1976-10-30 | 1977-05-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-04-30 | 1980-10-30 | 1981-05-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-04-30 | 1984-10-30 | 1985-05-01 | $7700.00 | Window Closed / Lapsed |