Patent US3730134A successfully refreshed from Google Patents.
US3730134A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pneumatic wafer spinner and control for same
Assignee: Individual
•
Filing: 1970-12-17
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Granted: 1973-05-01
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Expires: 1990-12-17
Abstract
Abstract A pneumatic wafer spinner and pneumatic control for same are disclosed. The pneumatic wafer spinner includes a vacuum chuck affixed to a spindle with the vacuum supplied to the chuck from a venturi disposed in the spindle and supplied with a flow of fluid, such as gas, under pressure. The chuck is rotated by means of a pneumatic turbine. Pneumatic bearings provide support for the spindle. Exhaust back pressure on the turbine is sensed and fed to a pilot valve for controlling the speed of the spindle and chuck. A pneumatic accumulator timer is employed for operating a pneumatic clutch for selectively braking rotation of the chuck and spindle after an elapsed time determined by the accumulator.
Inventors
- 👤 F Kadi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 07:25
CPC Classifications
A; A23; A23G; A23G7/00; A23G3/00; A23G3/02; A23G3/20; A23G3/28; Y; Y10; Y10T; Y10T279/00; Y10T279/11
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
178 words
In a wafer spinner of the type for applying a flowable liquid substance to one surface of a workpiece and for spinning the workpiece to cause the liquid to spread uniformly over the surface of the workpiece, vacuum chuck means having a workpiece holding surface to which a workpiece to be coated uniformly is to be held by atmospheric pressure applied to one side of the workpiece and working against less than atmospheric pressure applied to the holding surface side of the workpiece through a perforated portion of said holding surface of said chuck, spindle means affixed to said chuck for rotating same, pneumatic turbine means having impeller and stator means, and said impeller means being affixed to said spindle means for rotating said spindle and chuck, venturi means carried from said spindle, gas passageway means for supplying gas at positive pressure to said venturi means, gas passageway means interconnecting said chuck and said venturi means for supplying the less than atmospheric pressure to said vacuum chuck means from said venturi for holding the workpiece to said chuck.
Claim 2
Dependent Claim
178 words
In a wafer spinner of the type for applying a flowable liquid substance to one surface of a workpiece and for spinning the workpiece to cause the liquid to spread uniformly over the surface of the workpiece, vacuum chuck means having a workpiece holding surface to which a workpiece to be coated uniformly is to be held by atmospheric pressure applied to one side of the workpiece and working against less than atmospheric pressure applied to the holding surface side of the workpiece through a perforated portion of said holding surface of said chuck, spindle means affixed to said chuck for rotating same, pneumatic turbine means having impeller and stator means, and said impeller means being affixed to said spindle means for rotating said spindle and chuck, venturi means carried from said spindle, gas passageway means for supplying gas at positive pressure to said venturi means, gas passageway means interconnecting said chuck and said venturi means for supplying the less than atmospheric pressure to said vacuum chuck means from said venturi for holding the workpiece to said chuck.
Claim 3
Dependent Claim
27 words
The apparatus of claim 1 including, pneumatic bearing means for rotatably supporting said spindle means via the intermediary of a cushion of gas in said bearing means.
Claim 4
Dependent Claim
31 words
The apparatus of claim 1 including pneumatic sensor means for sensing when said impeller has reached a predetermined angular velocity and for reducing the pneumatic energy supplied to said turbine means.
Claim 5
Dependent Claim
69 words
The apparatus of claim 1 including, a braking member, pneumatic clutch means for selectively coupling said spindle to said braking member, pneumatic timer means in fluid coupled relation to said pneumatic clutch means for causing said clutch to couple said spindle to said braking member for braking rotation of said spindle after a certain lapsed time which is a function of the time setting of said pneumatic timer means.
Claim 6
Dependent Claim
49 words
The apparatus of claim 4 wherein said pneumatic clutch means includes a pneumatic thrust bearing means for providing a cushion of gas between said braking member and a thrust bearing portion of said spindle, and wherein said pneumatic timer means controls flow of gas to said thrust bearing means.
Claim 7
Dependent Claim
22 words
The apparatus of claim 1 wherein said venturi means is disposed in said spindle intermediate said chuck means and said impeller means.
Claim 8
Dependent Claim
74 words
The apparatus of claim 3 including, gas conduit means for interconnecting said stator means and a source of gas, valve means disposed in said gas conduit for controlling the flow of pneumatic energy to said turbine means, and wherein said pneumatic sensor means reduces the flow of pneumatic energy to said turbine by substantially closing said valve means for shutting off the flow of gas from the source to said stator of said turbine.
Claim 9
Dependent Claim
33 words
The apparatus of claim 6 including detachable gas tight coupling means for detachable coupling said spindle to said chuck and venturi means to facilitate removinG said chuck and said venturi from said spindle.
References Cited (Backward Citations)
US2953483A
Cited
US3039623A
Cited
US3219380A
Cited
US3426727A
Cited
US3456875A
Cited
US3412976A
Cited
US3582228A
Cited
US3538883A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-04-30 | 1976-10-30 | 1977-05-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-04-30 | 1980-10-30 | 1981-05-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-04-30 | 1984-10-30 | 1985-05-01 | $7700.00 | Window Closed / Lapsed |