Patent US3719166A successfully refreshed from Google Patents.
US3719166A
Expired / Lapsed
US
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Coating apparatus
Assignee: Telefunken Electronic GmbH
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Filing: 1970-12-10
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Granted: 1973-03-06
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Expires: 1990-12-10
Abstract
Abstract VAPOR DEPOSITION APPARATUS INCLUDES A COATING CHAMBER HAVING A PLURALITY OF VERTICALLY, ALIGNED GAS INLET MEANS EACH ONE OF WHICH IS DIAMETRICALLY OPPOSED TO AN EXHAUST MEANS. EACH ALIGNED INLET AND EXHAUST MEANS PAIR IS ALIGNED WITH A SEPARATE ROW OF SEMI-CONDUCTOR SUBSTRATES SUPPORTED ON A VERTICALLY EXTENDING, ROTATABLE SUCEPTOR.
Inventors
- 👤 R Gereth
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 20:46
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/08; C30B25/14
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-03-05 | 1976-09-04 | 1977-03-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-03-05 | 1980-09-04 | 1981-03-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-03-05 | 1984-09-04 | 1985-03-06 | $7700.00 | Window Closed / Lapsed |