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US3714422A
Expired / Lapsed
US
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Scanning stereoscopic electron microscope
Assignee: Hitachi Ltd
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Filing: 1970-04-06
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Granted: 1973-01-30
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Expires: 1990-04-06
Abstract
Abstract A charged particle beam apparatus provided with an adjusting device to change an impinging angle of charged particle beams to be irradiated onto a specimen, thereby enabling a stereo-image thereof without tilting the same.
Inventors
- 👤 S Hosoki
- 👤 H Okano
- 👤 K Kamijo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 19:10
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/147
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
152 words
In a scanning-type electron microscope comprising an electron source operable to emit an electron beam; focusing means for focusing the electron beam; scanning signal generating means for providing a scanning signal; scanning means receptive of said scanning signal for scanning the focused electron beam across a specimen to be observed in accordance with said scanning signal whereby the specimen emits secondary electrons; detecting means for detecting secondary electrons emitted from the specimen and providing a corresponding detecting signal; and indicating means receptive of both said scanning signal and said detecting signal for providing a visual image of the specimen; the improvement comprising angle varying means disposed upstream from said scanning means for selective varying the angle at which the focused electron beam impinges upon the specimen to accordingly vary the secondary electron emission from the specimen in such a manner that said indicating means provides a visual stereoscopic image of the specimen.
Claim 2
Dependent Claim
152 words
In a scanning-type electron microscope comprising an electron source operable to emit an electron beam; focusing means for focusing the electron beam; scanning signal generating means for providing a scanning signal; scanning means receptive of said scanning signal for scanning the focused electron beam across a specimen to be observed in accordance with said scanning signal whereby the specimen emits secondary electrons; detecting means for detecting secondary electrons emitted from the specimen and providing a corresponding detecting signal; and indicating means receptive of both said scanning signal and said detecting signal for providing a visual image of the specimen; the improvement comprising angle varying means disposed upstream from said scanning means for selective varying the angle at which the focused electron beam impinges upon the specimen to accordingly vary the secondary electron emission from the specimen in such a manner that said indicating means provides a visual stereoscopic image of the specimen.
Claim 3
Dependent Claim
152 words
In a scanning-type electron microscope comprising an electron source operable to emit an electron beam; focusing means for focusing the electron beam; scanning signal generating means for providing a scanning signal; scanning means receptive of said scanning signal for scanning the focused electron beam across a specimen to be observed in accordance with said scanning signal whereby the specimen emits secondary electrons; detecting means for detecting secondary electrons emitted from the specimen and providing a corresponding detecting signal; and indicating means receptive of both said scanning signal and said detecting signal for providing a visual image of the specimen; the improvement comprising angle varying means disposed upstream from said scanning means for selective varying the angle at which the focused electron beam impinges upon the specimen to accordingly vary the secondary electron emission from the specimen in such a manner that said indicating means provides a visual stereoscopic image of the specimen.
Claim 4
Dependent Claim
152 words
In a scanning-type electron microscope comprising an electron source operable to emit an electron beam; focusing means for focusing the electron beam; scanning signal generating means for providing a scanning signal; scanning means receptive of said scanning signal for scanning the focused electron beam across a specimen to be observed in accordance with said scanning signal whereby the specimen emits secondary electrons; detecting means for detecting secondary electrons emitted from the specimen and providing a corresponding detecting signal; and indicating means receptive of both said scanning signal and said detecting signal for providing a visual image of the specimen; the improvement comprising angle varying means disposed upstream from said scanning means for selective varying the angle at which the focused electron beam impinges upon the specimen to accordingly vary the secondary electron emission from the specimen in such a manner that said indicating means provides a visual stereoscopic image of the specimen.
Claim 5
Dependent Claim
53 words
A scanning-type electron microscope according to claim 1; wherein said angle varying means comprises an aperture plate having means therein defining one passage-hole, and means mounting said aperture plate for alternate movement in a direction substantially transverse to the electron beam to effect selection of only a desired portion of said electron beam.
Claim 6
Dependent Claim
55 words
A scanning-type electron microscope according to claim 1; wherein said angle varying means comprises an aperture plate having means therein defining at least two passage-holes, a shutter plate having means therein defining one passage-hole, and means mounting said shutter plate for alternate movement on said aperture plate to alternately open and close said two passage-holes.
Claim 7
Dependent Claim
66 words
A scanning-type electron microscope according to claim 1; wherein said angle varying means comprises an aperture plate having means therein defining at least two passage-holes, an electrode connectable to a source of electrical potential for dividing the electron beam into two beam portions, and deflecting means for deflecting one of the divided electron beam portions to prevent same from passing through one of said two passage-holes.
Claim 8
Dependent Claim
38 words
A scanning-type electron microscope according to claim 1; wherein said angle varying means comprises deflecting means disposed at the image plane of said focusing means for alternately deflecting the electron beam in two directions towards said focusing means.
Claim 9
Dependent Claim
63 words
A scanning-type electron microscope according to claim 1; wherein said angle varying means comprises an aperture plate having means therein defining one passage hole disposed below an image plane of said focusing means, and deflecting means disposed downstream from said aperture plate having meaNs therein defining one passage-hole for alternately deflecting the electron beam passing therethrough in two directions towards said focusing means.
Claim 10
Independent Claim
126 words
A method for obtaining a stereoscopic image of a specimen comprising: providing a specimen to be observed and placing same in an observation plane; emitting an electron beam and directing same towards the specimen; focusing the electron beam on the specimen located in said observation plane; scanning the focused electron beam across the specimen in a predetermined scanning pattern causing the specimen to emit secondary electrons; selectively varying the angle at which the focused electron beam impinges upon the specimen while same is located in said observation plane to accordingly vary the secondary electron emission from the specimen; detecting secondary electrons emitted from the specimen and providing a corresponding detecting signal; and providing a stereoscopic visual image of the specimen in response to said detecting signal.
Claim 11
Independent Claim
126 words
A method for obtaining a stereoscopic image of a specimen comprising: providing a specimen to be observed and placing same in an observation plane; emitting an electron beam and directing same towards the specimen; focusing the electron beam on the specimen located in said observation plane; scanning the focused electron beam across the specimen in a predetermined scanning pattern causing the specimen to emit secondary electrons; selectively varying the angle at which the focused electron beam impinges upon the specimen while same is located in said observation plane to accordingly vary the secondary electron emission from the specimen; detecting secondary electrons emitted from the specimen and providing a corresponding detecting signal; and providing a stereoscopic visual image of the specimen in response to said detecting signal.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-01-30 | 1976-07-31 | 1977-01-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-01-30 | 1980-07-31 | 1981-01-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-01-30 | 1984-07-31 | 1985-01-30 | $7700.00 | Window Closed / Lapsed |