US3712740A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for the automatic alignment of two articles to be brought into register with one another
Assignee: Telefunken Electronic GmbH
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Filing: 1970-04-20
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Granted: 1973-01-23
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Expires: 1990-04-20
Abstract
Abstract A method for the automatic alignment of two articles to be brought into register with one another comprises forming an associated register mark on each article, detecting the register marks associated with one another on both articles using a single optical measuring system, and aligning the articles as a result of the detection. The method may suitably be applied to sheets provided with structures therein, such as semiconductor wafers and masks.
Inventors
- 👤 K Hennings
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 12:30
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; H10P72/53; G; G03; G03F; G03F9/00; G03F9/70; H10P95/00
Claims Analysis
Total Claims: 43
Claim 1
Independent Claim
164 words
A method for the automatic alignment of two sheets provided with structures to be brought into register with one another comprising the steps of: forming an associated register mark on each sheet; detecting said register marks associated with one another on both said sheets by means of a single optical measuring system including photoelectric means; altering the position of either of said sheets with respect to the other said sheet in response to the output of said photoelectric means; reproducing said register marks in said sheets in the entry plane of a reference system of a photoelectric device of said photoelectric means; producing an output signal, which corresponds to the relative position of said register marks in relation to the reference axis or plane of said reference system, from the output of said photoelectric device; and using said output signal to control a regulating device which controls the altering of the position of either of said sheets with respect to the other said sheet.
Claim 2
Independent Claim
164 words
A method for the automatic alignment of two sheets provided with structures to be brought into register with one another comprising the steps of: forming an associated register mark on each sheet; detecting said register marks associated with one another on both said sheets by means of a single optical measuring system including photoelectric means; altering the position of either of said sheets with respect to the other said sheet in response to the output of said photoelectric means; reproducing said register marks in said sheets in the entry plane of a reference system of a photoelectric device of said photoelectric means; producing an output signal, which corresponds to the relative position of said register marks in relation to the reference axis or plane of said reference system, from the output of said photoelectric device; and using said output signal to control a regulating device which controls the altering of the position of either of said sheets with respect to the other said sheet.
Claim 3
Dependent Claim
51 words
A method as defined in claim 1, wherein said register mark on each sheet serves for alignment of said sheets with respect to each of two cartesian coordinates x and y at right angles to each other and an angle of rotation psi in the same plane as said cartesian coordinates.
Claim 4
Dependent Claim
34 words
A method as defined in claim 2, further comprising using a coordinate system in which the axis of the two cartesian coordinates entered through the center about which the angle of rotation is taken.
Claim 5
Dependent Claim
34 words
A method as defined in claim 2, further comprising aligning said sheets in the direction of said two cartesian coordinates and said angle of rotation by means of a photo-electric device for each coordinate.
Claim 6
Dependent Claim
37 words
A method as defined in claim 2, further comprising aligning said sheets in the direction of a third cartesion coordinate at right angles to said two cartesion coordinates for adjusting the scale of respoduction between said sheets.
Claim 7
Dependent Claim
28 words
A method as defined in claim 5, wherein said aligning in said direction of said third cartesion coordinate is carried out by displacement of one of said sheets.
Claim 8
Dependent Claim
34 words
A method as defined in claim 5, wherein said aligning in said third cartesion coordinate is carried out by displacement of an image forming objective which serves to form the image of said sheets.
Claim 9
Dependent Claim
23 words
A method as defined in claim 1, further comprising using different wavelengths of light for the reproduction of each of said register marks.
Claim 10
Dependent Claim
24 words
A method as defined in claim 1, further comprising using different wavelength ranges of light for the reproduction of each of said register marks.
Claim 11
Dependent Claim
31 words
A method as defined in claim 1, further comprising dividing the light beam, reproducing said register marks in said entry plane at said entry plane and sensing the divided beam separately.
Claim 12
Dependent Claim
40 words
A method as defined in claim 1, wherein one of said two articles is a semiconductor wafer which is provided with structures and register marks on the surface and the other of said articles is a mask provided with structures.
Claim 13
Dependent Claim
18 words
A method as defined in claim 11, further comprising contact printing said mask on to said semiconductor wafer.
Claim 14
Dependent Claim
33 words
A method as defined in claim 2, further comprising forming register marks in the two sheets by means of which the scale of reproduction B between said structures on said sheets is adjusted
Claim 15
Dependent Claim
80 words
A method as defined in claim 13, wherein said register mark for aligning the scale of reproduction Beta is a line parallel to one of the register marks of the cartesian coordinates and situated at the position of the register mark for alignment of the angle of rotation psi , resulting in an arrangement of two crosses for the alignment of the two cartesian coordinates x and y, the angle of rotation psi and the scale of reproduction Beta .
Claim 16
Dependent Claim
40 words
A method as defined in claim 2, further comprising the detection and alignment of the register marks of two different coordinates with a single optical measuring system, reproducing the register marks on the entry plane of a two-coordinate photo-electric device.
Claim 17
Dependent Claim
30 words
A method as defined in claim 15, further comprising the application of a pyramid mirror for splitting the entering beam into two perpendicular beam pairs for each of the coordinates.
Claim 18
Independent Claim
109 words
A method for the automatic alignment of two sheets provided with structures to be brought into register with one another comprising the steps of: forming an associated register mark on each sheet; detecting said register marks associated with one another on both said sheets by means of a single optical measuring system including photoelectric means; altering the position of either of said sheets with respect to the other said sheet in response to the output of said photoelectric means; reproducing said register marks on said reference system of said photoelectric measuring device and aligning said reproduced marks in relation to said reference axis or plane of said reference system.
Claim 19
Independent Claim
109 words
A method for the automatic alignment of two sheets provided with structures to be brought into register with one another comprising the steps of: forming an associated register mark on each sheet; detecting said register marks associated with one another on both said sheets by means of a single optical measuring system including photoelectric means; altering the position of either of said sheets with respect to the other said sheet in response to the output of said photoelectric means; reproducing said register marks on said reference system of said photoelectric measuring device and aligning said reproduced marks in relation to said reference axis or plane of said reference system.
Claim 20
Dependent Claim
18 words
A method as defined in claim 17, further comprising reproducing said register marks simultaneously on said reference system.
Claim 21
Dependent Claim
21 words
A method as defined in claim 17, further comprising reproducing said register marks one after the other on said reference system.
Claim 22
Dependent Claim
33 words
A method as defined in claim 19, further comprising at least partially compressing the reproduction of one said register mark by reduction of its effective intensity while aligning the other said register mark.
Claim 23
Dependent Claim
30 words
A method as defined in claim 20, further comprising reproducing one said register mark bright against a dark background and the other said register mark dark against a light background.
Claim 24
Dependent Claim
25 words
A method as defined in claim 17, further comprising aligning said register marks so that they are reproduced simultaneously on said reference axis or plane.
Claim 25
Dependent Claim
77 words
A method as defined in claim 17, wherein said register mark on one said sheet is displaced in position from said associated register mark on the other said sheet in respect to the aligned position of both sheets, further comprising aligning one said sheet by means of said photoelectric device, displacing said photo-electric device by a dIstance to take into account the displacement of said register marks between said sheets and thereafter aligning the other said sheet.
Claim 26
Dependent Claim
72 words
A method as defined in claim 17, wherein said register mark on one said sheet is displaced in position from said associated register mark on the other said sheet, further comprising aligning one said sheet by means of said photoelectric device, displacing said reference system of said photoelectric device by a distance to take into account the displacement of said register marks between said sheets and thereafter aligning the other said sheet.
Claim 27
Dependent Claim
48 words
A method as defined in claim 17, further comprising using a register mark on one sheet which is covered by the register mark of the other sheet and therefore does not significantly affect the alignment of the other said register mark when said register marks are in alignment.
Claim 28
Dependent Claim
35 words
A method as defined in claim 18, wherein the extension of said register marks on said sheets is different in the direction of displacement during alignment of said register marks in respect to each other.
Claim 29
Independent Claim
186 words
A method for the automatic alignment of two sheets provided with structures to be brought into register with one another comprising the steps of: forming an associated register mark on each sheet such that said register marks are displaced in position from one another in respect to the aligned position of both sheets; detecting said register marks associated with one another on both said sheets by means of a single optical measuring system including photoelectric means; altering the position of either of said sheets with respect to the other said sheet in response to the output of said photoelectric means; reproducing one register mark on a first reference system of said photoelectric device; aligning said reproduced one register mark with the reference axis or plane of said first reference system; reproducing the other register mark on a second reference system of said photoelectric device situated optically side by side with said first reference system at a distance to take into account the displacement of both said register marks; and aligning said reproduced other register mark with the reference axis or plane of said second reference system.
Claim 30
Independent Claim
186 words
A method for the automatic alignment of two sheets provided with structures to be brought into register with one another comprising the steps of: forming an associated register mark on each sheet such that said register marks are displaced in position from one another in respect to the aligned position of both sheets; detecting said register marks associated with one another on both said sheets by means of a single optical measuring system including photoelectric means; altering the position of either of said sheets with respect to the other said sheet in response to the output of said photoelectric means; reproducing one register mark on a first reference system of said photoelectric device; aligning said reproduced one register mark with the reference axis or plane of said first reference system; reproducing the other register mark on a second reference system of said photoelectric device situated optically side by side with said first reference system at a distance to take into account the displacement of both said register marks; and aligning said reproduced other register mark with the reference axis or plane of said second reference system.
Claim 31
Independent Claim
93 words
A method for the automatic alignment of two sheets provided with structures to be brought into register with one another comprising the steps of: forming associated register marks on each sheet as a plurality of narrow parallel or meshed lines situated close beside one another; detecting said register marks associated with one another on both said sheets by means of a single optical measuring system including photoelectric means; and altering the position of either of said sheets with respect to the other said sheet in response to the output of said photoelectric means.
Claim 32
Independent Claim
93 words
A method for the automatic alignment of two sheets provided with structures to be brought into register with one another comprising the steps of: forming associated register marks on each sheet as a plurality of narrow parallel or meshed lines situated close beside one another; detecting said register marks associated with one another on both said sheets by means of a single optical measuring system including photoelectric means; and altering the position of either of said sheets with respect to the other said sheet in response to the output of said photoelectric means.
Claim 33
Independent Claim
98 words
A method for the automatic alignment of two sheets provided with structures to be brought into register with one another comprising the steps of: forming an associated register mark on each sheet by means of which the plane parallelism of the areas containing said structures on said sheets is adjusted; detecting said register marks associated with one another on both said sheets by means of a single optical measuring system including photoelectric means; and altering the position of either of said sheets with respect to the other said sheet in response to the output of said photoelectric means.
Claim 34
Independent Claim
98 words
A method for the automatic alignment of two sheets provided with structures to be brought into register with one another comprising the steps of: forming an associated register mark on each sheet by means of which the plane parallelism of the areas containing said structures on said sheets is adjusted; detecting said register marks associated with one another on both said sheets by means of a single optical measuring system including photoelectric means; and altering the position of either of said sheets with respect to the other said sheet in response to the output of said photoelectric means.
Claim 35
Independent Claim
109 words
A method for the automatic alignment of two sheets provided with structures to be brought into register with one another comprising the steps of: forming an associated register mark on each sheet by means of which the scale of reproduction between said structures on said sheets and the plane parallelism of the areas containing said structures on said sheets is adjusted; detecting said register marks associated with one another on both said sheets by means of a single optical measuring system including photoelectric means; and altering the position of either of said sheets with respect to the other said sheet in response to the output of said photoelectric means.
Claim 36
Independent Claim
109 words
A method for the automatic alignment of two sheets provided with structures to be brought into register with one another comprising the steps of: forming an associated register mark on each sheet by means of which the scale of reproduction between said structures on said sheets and the plane parallelism of the areas containing said structures on said sheets is adjusted; detecting said register marks associated with one another on both said sheets by means of a single optical measuring system including photoelectric means; and altering the position of either of said sheets with respect to the other said sheet in response to the output of said photoelectric means.
Claim 37
Independent Claim
137 words
A method for the automatic alignment of a semiconductor wafer which is provided with structures on the surface and a mask to be brought into register with one another, comprising the steps of: forming an associated register mark on both said semiconductor wafer and said mask; detecting said register marks associated with one another on said semiconductor wafer and said mask by means of a single optical measuring system including photoelectric means, said step of detecting being carried out by imaging said register marks onto an entry plane of said optical measuring system by a wavelength range forming an image on said entry plane by interference contrast due to light interferences in the illuminated register marks; and altering the relative positions of said semiconductor wafer and said mask in response to the output of said photoelectric means.
Claim 38
Independent Claim
137 words
A method for the automatic alignment of a semiconductor wafer which is provided with structures on the surface and a mask to be brought into register with one another, comprising the steps of: forming an associated register mark on both said semiconductor wafer and said mask; detecting said register marks associated with one another on said semiconductor wafer and said mask by means of a single optical measuring system including photoelectric means, said step of detecting being carried out by imaging said register marks onto an entry plane of said optical measuring system by a wavelength range forming an image on said entry plane by interference contrast due to light interferences in the illuminated register marks; and altering the relative positions of said semiconductor wafer and said mask in response to the output of said photoelectric means.
Claim 39
Dependent Claim
42 words
A method as defined in claim 31, wherein said register marks consist of several lines, and wherein the image contrast of the entire register marks is formed by addition of the interference contrast at the edges of each of said several lines.
Claim 40
Independent Claim
136 words
A method for the automatic alignment of a semiconductor wafer which is provided with structures on the surface and a mask to be brought into register with one another, comprising the steps of: forming an associated register mark on both said semiconductor wafer and said mask; detecting said register marks associated with one another on said semiconductor wafer and said mask by means of a single optical measuring system including photoelectric means; altering the relative positions of said semiconductor wafer and said mask in response to the output of said photoelectric means; reproducing said mask in said semiconductor wafer by projection and reproducing said semiconductor surface in the reverse path by the projection rays in the plane of the mask and reproducing said semiconductor surface and said mask on a reference system of said photoelectric means.
Claim 41
Independent Claim
136 words
A method for the automatic alignment of a semiconductor wafer which is provided with structures on the surface and a mask to be brought into register with one another, comprising the steps of: forming an associated register mark on both said semiconductor wafer and said mask; detecting said register marks associated with one another on said semiconductor wafer and said mask by means of a single optical measuring system including photoelectric means; altering the relative positions of said semiconductor wafer and said mask in response to the output of said photoelectric means; reproducing said mask in said semiconductor wafer by projection and reproducing said semiconductor surface in the reverse path by the projection rays in the plane of the mask and reproducing said semiconductor surface and said mask on a reference system of said photoelectric means.
Claim 42
Independent Claim
130 words
A method for the automatic alignment of a semiconductor wafer which is provided with structures on the surface and a mask to be brought into register with one another, comprising the steps of: forming an associated register mark on both said semiconductor wafer and said mask; detecting said register marks associated with one another on said semiconductor wafer and said mask by means of a single optical measuring system including photoelectric means; and altering the relative positions of said semiconductor wafer and said mask in response to the output of said photoelectric means, wherein said register marks on the semiconductor wafer, consist of thickness steps or windows in an insulating layer on top of the semiconductor surface or of steps or areas of different reflection on the semiconductor surface itself.
Claim 43
Independent Claim
130 words
A method for the automatic alignment of a semiconductor wafer which is provided with structures on the surface and a mask to be brought into register with one another, comprising the steps of: forming an associated register mark on both said semiconductor wafer and said mask; detecting said register marks associated with one another on said semiconductor wafer and said mask by means of a single optical measuring system including photoelectric means; and altering the relative positions of said semiconductor wafer and said mask in response to the output of said photoelectric means, wherein said register marks on the semiconductor wafer, consist of thickness steps or windows in an insulating layer on top of the semiconductor surface or of steps or areas of different reflection on the semiconductor surface itself.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-01-23 | 1976-07-24 | 1977-01-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-01-23 | 1980-07-24 | 1981-01-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-01-23 | 1984-07-24 | 1985-01-23 | $7700.00 | Window Closed / Lapsed |