Enhancement mode n-channel mos structure and method
Abstract
Abstract Enhancement mode N-channel MOS structure having a semiconductor body with a region of P conductivity type formed in the body and extending to the surface. A polycrystalline gate structure is formed on said surface. Spaced source and drain regions are formed in the region of P conductivity type and form a channel in said body underlying said gate structure with the polycrystalline material of the gate structure having an N-type impurity therein. A layer of insulating material is formed on the surface and covers the gate structure. Contact elements are formed on the layer of insulating material and extend therethrough to make contact with the source and drain regions and said polycrystalline gate structure to form an active device. In the method for fabricating the structure, the polycrystalline material of the polycrystalline gate structure is doped independently of doping for forming the channel underlying the polycrystalline gate structure.
Inventors
- 👤 W Brand
- 👤 F Kashkooli
Bibliographic Details
Claims Analysis
Total Claims: 3References Cited (Backward Citations)
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